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Superconducting Transition and Heterodyne Performance at 730 GHz of a Diffusion-cooled Nb Hot-electron Bolometer Mixer

J. R. Gao, M. E. Glastra, R. H. Heeres, W. Hulshoff, D. Wilms Floet, Herman van de Stadt, T. M. Klapwijk, Th. de Graauw

Published Jan 1, 1997• 1 citation
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Abstract

We report two typical experimental results of waveguide diffusion-cooled Nb hotelectron bolometer (HEB) mixers. The device is a thin (10 nm) Nb bridge with a length of 0.3 Am and a width of 0.9 pm and is defined using photolithography. In the first experiment, the resistance of a HEB is studied as a function of temperature. We observe two critical temperatures, which correspond to the 71. of the Nb bridge and the T, of the Nb under the Au pads, respectively. These two 71. define a superconducting transition width AT of a HEB. The reduced T. of the Nb under the Au pads is explained by the superconducting proximity effect. In the second experiment, we measure relative conversion efficiency vs intermediate frequency (IF) by using two coherent sources, a carcinotron and a Gunn oscillator, and determine an IF roll-off (/F, 011 ,ff ) between 0.6 and 1.2 GHz, in agreement with a value estimated in terms of the diffusion-cooled model.

Related papers

Fabrication and characterisation of a Nb diffusion-cooled hot electron bolometer for a 730 GHz waveguide mixer

D. Wilms Floet, No Value Gao, W. Hulshoff +3 more

We have fabricated Nb diffusion-cooled hot electron bolometers for a waveguide mixer around 700 GHz. The device in this work is a thin (12 nm) Nb bridge with a length and width of 220 nm and is defined by a two-step electron beam lithography process. The resistance as a function of temperature shows two transitions, which we attribute to the Nb bridge (6.1 K) and to parts of the Nb which are covered by the Au pads (5.4 K). We have measured a DSB receiver noise temperature of 2200 K at 735 GHz and a bath temperature of 3.3 K. No significant increase of the noise temperature is observed at IF frequencies between 1.1 and 1.7 GHz. The coupled LO power is estimated to be 35 nW.

•Jan 1, 1997•0 citations

Heterodyne mixing in diffusion-cooled superconducting aluminum hot-electron bolometers

Irfan A. Siddiqi, A. Verevkin, D. E. Prober +4 more

We present microwave (30 GHz) measurements on aluminum superconducting hot-electron bolometer (HEB) mixers. Aluminum HEB mixers have a lower superconducting transition temperature than niobium and niobium nitride devices, and are predicted to have improved sensitivity and require less local oscillator power. The devices studied consist of a narrow superconducting aluminum microbridge with contacts comprised of thick aluminum, titanium, and gold. A perpendicular magnetic field is used to suppress superconductivity in the contacts. The device length is much shorter than the electron–phonon inelastic length [L≪(Dτe–ph)1/2] and thus the intermediate frequency (IF) bandwidth is set by the diffusion time of hot electrons from the microbridge into the contacts. We discuss limitations on the IF bandwidth in very short HEB mixers with fully normal contacts. Overall, the microwave heterodyne mixing results show good performance with a mixer noise temperature inferred from the conversion efficiency and output noise of TM⩾4 K, double side band (DSB). Measurements at 618 GHz yield a conversion efficiency approximately 10 dB lower than observed at 30 GHz. Output saturation by background radiation is postulated to contribute significantly to this difference. A similar decrease in conversion efficiency in the microwave mixing measurements is observed when broadband noise is added to the rf input signal. We discuss the tradeoff between increased sensitivity and the occurrence of saturation effects in low transition temperature HEBs.

Journal of Applied Physics•Apr 1, 2002•13 citations

Fabrication and Receiver Measurements of a Diffusion-cooled Hot-electron Bolometer at 800 GHz

J. Stodolka, Kristof J. P. Jacobs

We present a fabrication process for diffusion-cooled niobium hot-electron bolometers using a self-aligned process with gold as an initial protection layer and aluminum as an etch mask that is removed by a wet etch. This process proves to be reproducible and has a yield of ~70 % per batch. Great care has been taken to avoid processing temperatures above 120 °C to minimize degradation of the Nb film. We have performed heterodyne measurements of an HEB in a fixed tuned waveguide mixer at 804 GHz and at an IF-range from 1-2 GHz. The approximate dimensions of the bridge are 240 x 200 x 14 nm3. The Niobium bridge has a critical temperature of 6.0 K and a normal state resistance of 16.5 Ω. A standard Y-factor measurement leads to a minimum noise temperature of 1200 K at 1 GHz IF. The coupled LO-power is estimated by the isothermal method to be 21 nW. Introduction Superconducting Hot-Electron-Bolometers (HEB) utilizing thin superconducting films have become established as sensitive mixers in the THz region. The thermal response time τ can be very small if the superconductor is thin enough that only the electron gas is heated and the cooling is fast enough. The bolometers described in this paper are cooled by out-diffusion of the hot electrons in normal conducting heat sinks (diffusion-cooled HEB) rather than interactions with phonons of the lattice (phononcooled HEB) [1]. To meet the requirements for astronomical applications such as SOFIA, thermal response times down to several picoseconds are needed to get intermediate frequencies up to 10 GHz. Because of τ ~ L [1] the dimensions of the bolometer bridge have to be very small. We have fabricated diffusion-cooled HEBs with short (L<300 nm) and narrow (<200 nm) bridges consisting of thin (10-14 nm) Niobium (Nb) on z-cut quartz substrates. The normal conducting heat sinks consist of 70 nm Gold (Au). In the following paragraph 1 e-mail: stodolka@ph1.uni-koeln.de we discuss problems and merits of several approaches for the fabrication of diffusioncooled HEBs. Device Fabrication Aside from a good reproducibility, the essential requirement for the fabrication of a diffusion-cooled HEB is a good transparency of the interface between the heat sinks and the material of the bolometer bridge. A thermal resistance results in a slower out-diffusion of the hot electrons and thus increases the effective bridge length and thermal response time. Defining the bolometer bridge by lift-off with subsequent deposition of the heat sinks (Fig. 1) [2] has the major disadvantage of high requirements for the overlap accuracy of the Electron-Beam-Lithography (EBL) system to position the heat sinks on the contact areas of the bridge. A solution is offered by the self-aligned process (Fig. 2). Here, the substrate is covered with a blanket layer of Nb. The heat sinks and a metal strip of the width of the bolometer bridge are deposited in succession. The bridge is now etched out of the blanket layer by using reactive ion etching (RIE) where the heat sinks and the metal strip serve as etch masks: the spacing between the heat sinks determines the bridge length while the metal strip defines the width. The overlap between Nb and Au heat sinks is large. Fig. 1: Outline of HEB fabrication by lift off (top view) a) Bolometer bridge defined by liftoff. b) Deposition of the heat sinks. The contact area (shaded) to the heat sinks is small. bolometer bridge

•Dec 1, 2001•2 citations

Noise and conversion efficiency of aluminum superconducting hot-electron bolometer mixer

Irfan A. Siddiqi, A. Verevkin, D. E. Prober +5 more

We report on microwave measurements of superconducting aluminum hot-electron bolometers (Al HEBs). Diffusion-cooled Al HEB mixers are good candidates for space-borne applications in the Terahertz frequency range since they are predicted to have small local oscillator (LO) power requirements, intermediate frequency (IF) bandwidths /spl gsim/10 GHz, and a noise temperature lower than that of Nb and NbN HEB mixers. Mixer measurements were made at an LO frequency /spl sim/30 GHz, with an IF in the range 0.1 to 7.3 GHz. For T<0.8 K, a magnetic field H=0.1-0.3 T was applied to suppress the superconductivity in the contact pads, and partly in the bridge. For a 0.6 /spl mu/m long device, we measure an IF bandwidth of 4 GHz, a conversion efficiency /spl eta/=-8 dB, and a mixer noise temperature T/sub M//spl gsim/4 K, DSB (T/sub mixer/=T/sub output noise//2/spl eta/). These results are shown to be in quantitative agreement with simple theoretical predictions.

IEEE Transactions on Applied Superconductivity•Mar 1, 2001•17 citations

Detailed Characterization of Quasi-Optically Coupled Nb Hot Electron Bolometer Mixers in the 0.6-3 THz Range

W. F. M. Ganzevles, Pavel A. Yagoubov, W. J. Vreeling +3 more

Two type of Nb diffusion-cooled HEB mixers have been studied. One uses a twin-slot antenna designed for 700 GHz, and has a bridge length of 200 nm. This device is fabricated using an in situ-process for the interface between the bridge and the cooling pads. An uncorrected receiver noise temperature of 1200 K at 640 GHz and an IF bandwidth of 5 GHz have been measured. The second device uses a log-periodic antenna designed for a wide RF bandwidth. However, there is a misalignment of the Nb bridge with respect to the Au cooling pads. Receiver noise temperatures at 0.64, 1.9, and 2.5 THz have been measured. We are able to link the geometry feature to the measured properties.

•Mar 1, 2002•0 citations

Tantalum Hot-Electron Bolometers for Low-Noise Heterodyne Receivers

Anders J. Skalare, William R. McGrath, Bruce Bumble +1 more

We describe superconducting diffusion-cooled hot-electron bolometers that were fabricated fromtantalum films grown on a thin niobium seed layer. The seed layer promotes single-phase growth of the Ta films, resulting in high-quality bolometers with transition temperatures up to 2.35 K and transition widths of less than 0.2 K. An S-parameter measurement set-up in a He-3 cryostat was used to measure device impedance versus frequency of a 400 nm long device at a temperature of 400 mK. It is shown that a 3 dB roll-off frequency of about 1 GHz can be achieved when the device resistance matches the impedance of the embedding network (no electrothermal feedback). This would lead to a prediction of 16 GHz for a 100 nm device, and indicates that a heterodyne mixer using a Ta HEB should be able to operate at several GHz even with a significant amount of electrothermal feedback.

•Mar 26, 2002•1 citation
We report two typical experimental results of waveguide diffusion-cooled Nb hotelectron bolometer (HEB) mixers. The device is a thin (10 nm) Nb bridge with a length of 0.3 Am and a width of 0.9 pm and is defined using photolithography. In the first experiment, the resistance of a HEB is studied as a function of temperature. We observe two critical temperatures, which correspond to the 71. of the Nb bridge and the T, of the Nb under the Au pads, respectively. These two 71. define a superconducting transition width AT of a HEB. The reduced T. of the Nb under the Au pads is explained by the superconducting proximity effect. In the second experiment, we measure relative conversion efficiency vs intermediate frequency (IF) by using two coherent sources, a carcinotron and a Gunn oscillator, and determine an IF roll-off (/F, 011 ,ff ) between 0.6 and 1.2 GHz, in agreement with a value estimated in terms of the diffusion-cooled model.
We have fabricated Nb diffusion-cooled hot electron bolometers for a waveguide mixer around 700 GHz. The device in this work is a thin (12 nm) Nb bridge with a length and width of 220 nm and is defined by a two-step electron beam lithography process. The resistance as a function of temperature shows two transitions, which we attribute to the Nb bridge (6.1 K) and to parts of the Nb which are covered by the Au pads (5.4 K). We have measured a DSB receiver noise temperature of 2200 K at 735 GHz and a bath temperature of 3.3 K. No significant increase of the noise temperature is observed at IF frequencies between 1.1 and 1.7 GHz. The coupled LO power is estimated to be 35 nW.
We present microwave (30 GHz) measurements on aluminum superconducting hot-electron bolometer (HEB) mixers. Aluminum HEB mixers have a lower superconducting transition temperature than niobium and niobium nitride devices, and are predicted to have improved sensitivity and require less local oscillator power. The devices studied consist of a narrow superconducting aluminum microbridge with contacts comprised of thick aluminum, titanium, and gold. A perpendicular magnetic field is used to suppress superconductivity in the contacts. The device length is much shorter than the electron–phonon inelastic length [L≪(Dτe–ph)1/2] and thus the intermediate frequency (IF) bandwidth is set by the diffusion time of hot electrons from the microbridge into the contacts. We discuss limitations on the IF bandwidth in very short HEB mixers with fully normal contacts. Overall, the microwave heterodyne mixing results show good performance with a mixer noise temperature inferred from the conversion efficiency and output noise of TM⩾4 K, double side band (DSB). Measurements at 618 GHz yield a conversion efficiency approximately 10 dB lower than observed at 30 GHz. Output saturation by background radiation is postulated to contribute significantly to this difference. A similar decrease in conversion efficiency in the microwave mixing measurements is observed when broadband noise is added to the rf input signal. We discuss the tradeoff between increased sensitivity and the occurrence of saturation effects in low transition temperature HEBs.
We present a fabrication process for diffusion-cooled niobium hot-electron bolometers using a self-aligned process with gold as an initial protection layer and aluminum as an etch mask that is removed by a wet etch. This process proves to be reproducible and has a yield of ~70 % per batch. Great care has been taken to avoid processing temperatures above 120 °C to minimize degradation of the Nb film. We have performed heterodyne measurements of an HEB in a fixed tuned waveguide mixer at 804 GHz and at an IF-range from 1-2 GHz. The approximate dimensions of the bridge are 240 x 200 x 14 nm3. The Niobium bridge has a critical temperature of 6.0 K and a normal state resistance of 16.5 Ω. A standard Y-factor measurement leads to a minimum noise temperature of 1200 K at 1 GHz IF. The coupled LO-power is estimated by the isothermal method to be 21 nW. Introduction Superconducting Hot-Electron-Bolometers (HEB) utilizing thin superconducting films have become established as sensitive mixers in the THz region. The thermal response time τ can be very small if the superconductor is thin enough that only the electron gas is heated and the cooling is fast enough. The bolometers described in this paper are cooled by out-diffusion of the hot electrons in normal conducting heat sinks (diffusion-cooled HEB) rather than interactions with phonons of the lattice (phononcooled HEB) [1]. To meet the requirements for astronomical applications such as SOFIA, thermal response times down to several picoseconds are needed to get intermediate frequencies up to 10 GHz. Because of τ ~ L [1] the dimensions of the bolometer bridge have to be very small. We have fabricated diffusion-cooled HEBs with short (L<300 nm) and narrow (<200 nm) bridges consisting of thin (10-14 nm) Niobium (Nb) on z-cut quartz substrates. The normal conducting heat sinks consist of 70 nm Gold (Au). In the following paragraph 1 e-mail: stodolka@ph1.uni-koeln.de we discuss problems and merits of several approaches for the fabrication of diffusioncooled HEBs. Device Fabrication Aside from a good reproducibility, the essential requirement for the fabrication of a diffusion-cooled HEB is a good transparency of the interface between the heat sinks and the material of the bolometer bridge. A thermal resistance results in a slower out-diffusion of the hot electrons and thus increases the effective bridge length and thermal response time. Defining the bolometer bridge by lift-off with subsequent deposition of the heat sinks (Fig. 1) [2] has the major disadvantage of high requirements for the overlap accuracy of the Electron-Beam-Lithography (EBL) system to position the heat sinks on the contact areas of the bridge. A solution is offered by the self-aligned process (Fig. 2). Here, the substrate is covered with a blanket layer of Nb. The heat sinks and a metal strip of the width of the bolometer bridge are deposited in succession. The bridge is now etched out of the blanket layer by using reactive ion etching (RIE) where the heat sinks and the metal strip serve as etch masks: the spacing between the heat sinks determines the bridge length while the metal strip defines the width. The overlap between Nb and Au heat sinks is large. Fig. 1: Outline of HEB fabrication by lift off (top view) a) Bolometer bridge defined by liftoff. b) Deposition of the heat sinks. The contact area (shaded) to the heat sinks is small. bolometer bridge
We report on microwave measurements of superconducting aluminum hot-electron bolometers (Al HEBs). Diffusion-cooled Al HEB mixers are good candidates for space-borne applications in the Terahertz frequency range since they are predicted to have small local oscillator (LO) power requirements, intermediate frequency (IF) bandwidths /spl gsim/10 GHz, and a noise temperature lower than that of Nb and NbN HEB mixers. Mixer measurements were made at an LO frequency /spl sim/30 GHz, with an IF in the range 0.1 to 7.3 GHz. For T<0.8 K, a magnetic field H=0.1-0.3 T was applied to suppress the superconductivity in the contact pads, and partly in the bridge. For a 0.6 /spl mu/m long device, we measure an IF bandwidth of 4 GHz, a conversion efficiency /spl eta/=-8 dB, and a mixer noise temperature T/sub M//spl gsim/4 K, DSB (T/sub mixer/=T/sub output noise//2/spl eta/). These results are shown to be in quantitative agreement with simple theoretical predictions.
Two type of Nb diffusion-cooled HEB mixers have been studied. One uses a twin-slot antenna designed for 700 GHz, and has a bridge length of 200 nm. This device is fabricated using an in situ-process for the interface between the bridge and the cooling pads. An uncorrected receiver noise temperature of 1200 K at 640 GHz and an IF bandwidth of 5 GHz have been measured. The second device uses a log-periodic antenna designed for a wide RF bandwidth. However, there is a misalignment of the Nb bridge with respect to the Au cooling pads. Receiver noise temperatures at 0.64, 1.9, and 2.5 THz have been measured. We are able to link the geometry feature to the measured properties.
We describe superconducting diffusion-cooled hot-electron bolometers that were fabricated fromtantalum films grown on a thin niobium seed layer. The seed layer promotes single-phase growth of the Ta films, resulting in high-quality bolometers with transition temperatures up to 2.35 K and transition widths of less than 0.2 K. An S-parameter measurement set-up in a He-3 cryostat was used to measure device impedance versus frequency of a 400 nm long device at a temperature of 400 mK. It is shown that a 3 dB roll-off frequency of about 1 GHz can be achieved when the device resistance matches the impedance of the embedding network (no electrothermal feedback). This would lead to a prediction of 16 GHz for a 100 nm device, and indicates that a heterodyne mixer using a Ta HEB should be able to operate at several GHz even with a significant amount of electrothermal feedback.