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Fabrication and characterisation of a Nb diffusion-cooled hot electron bolometer for a 730 GHz waveguide mixer

D. Wilms Floet, No Value Gao, W. Hulshoff, Herman van de Stadt, T. M. Klapwijk, A. K. van Langen-Suurling

Published Jan 1, 1997• 0 citations
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Abstract

We have fabricated Nb diffusion-cooled hot electron bolometers for a waveguide mixer around 700 GHz. The device in this work is a thin (12 nm) Nb bridge with a length and width of 220 nm and is defined by a two-step electron beam lithography process. The resistance as a function of temperature shows two transitions, which we attribute to the Nb bridge (6.1 K) and to parts of the Nb which are covered by the Au pads (5.4 K). We have measured a DSB receiver noise temperature of 2200 K at 735 GHz and a bath temperature of 3.3 K. No significant increase of the noise temperature is observed at IF frequencies between 1.1 and 1.7 GHz. The coupled LO power is estimated to be 35 nW.

Related papers

Fabrication and Receiver Measurements of a Diffusion-cooled Hot-electron Bolometer at 800 GHz

J. Stodolka, Kristof J. P. Jacobs

We present a fabrication process for diffusion-cooled niobium hot-electron bolometers using a self-aligned process with gold as an initial protection layer and aluminum as an etch mask that is removed by a wet etch. This process proves to be reproducible and has a yield of ~70 % per batch. Great care has been taken to avoid processing temperatures above 120 °C to minimize degradation of the Nb film. We have performed heterodyne measurements of an HEB in a fixed tuned waveguide mixer at 804 GHz and at an IF-range from 1-2 GHz. The approximate dimensions of the bridge are 240 x 200 x 14 nm3. The Niobium bridge has a critical temperature of 6.0 K and a normal state resistance of 16.5 Ω. A standard Y-factor measurement leads to a minimum noise temperature of 1200 K at 1 GHz IF. The coupled LO-power is estimated by the isothermal method to be 21 nW. Introduction Superconducting Hot-Electron-Bolometers (HEB) utilizing thin superconducting films have become established as sensitive mixers in the THz region. The thermal response time τ can be very small if the superconductor is thin enough that only the electron gas is heated and the cooling is fast enough. The bolometers described in this paper are cooled by out-diffusion of the hot electrons in normal conducting heat sinks (diffusion-cooled HEB) rather than interactions with phonons of the lattice (phononcooled HEB) [1]. To meet the requirements for astronomical applications such as SOFIA, thermal response times down to several picoseconds are needed to get intermediate frequencies up to 10 GHz. Because of τ ~ L [1] the dimensions of the bolometer bridge have to be very small. We have fabricated diffusion-cooled HEBs with short (L<300 nm) and narrow (<200 nm) bridges consisting of thin (10-14 nm) Niobium (Nb) on z-cut quartz substrates. The normal conducting heat sinks consist of 70 nm Gold (Au). In the following paragraph 1 e-mail: stodolka@ph1.uni-koeln.de we discuss problems and merits of several approaches for the fabrication of diffusioncooled HEBs. Device Fabrication Aside from a good reproducibility, the essential requirement for the fabrication of a diffusion-cooled HEB is a good transparency of the interface between the heat sinks and the material of the bolometer bridge. A thermal resistance results in a slower out-diffusion of the hot electrons and thus increases the effective bridge length and thermal response time. Defining the bolometer bridge by lift-off with subsequent deposition of the heat sinks (Fig. 1) [2] has the major disadvantage of high requirements for the overlap accuracy of the Electron-Beam-Lithography (EBL) system to position the heat sinks on the contact areas of the bridge. A solution is offered by the self-aligned process (Fig. 2). Here, the substrate is covered with a blanket layer of Nb. The heat sinks and a metal strip of the width of the bolometer bridge are deposited in succession. The bridge is now etched out of the blanket layer by using reactive ion etching (RIE) where the heat sinks and the metal strip serve as etch masks: the spacing between the heat sinks determines the bridge length while the metal strip defines the width. The overlap between Nb and Au heat sinks is large. Fig. 1: Outline of HEB fabrication by lift off (top view) a) Bolometer bridge defined by liftoff. b) Deposition of the heat sinks. The contact area (shaded) to the heat sinks is small. bolometer bridge

•Dec 1, 2001•2 citations

Receiver Measurements at 700 GHz with a Niobium Diffusion-Cooled Hot-Electron Bolometer Mixer

D. Wilms Floet, J. R. Gao, T. M. Klapwijk +3 more

We report on heterodyne measurements with a Nb diffusion-cooled hot-electron bolometer in a fixed tuned waveguide mixer at 700 GHz. The device is a 300 nm long and 12 nm thick Nb microbridge, with a normal state resistance of 31 Si. We have measured the DSB receiver noise temperature using a standard Y-factor method with a 300 K and 77 K blackbody load. At 700 GHz, a bath temperature of 4.3 K, and an intermediate frequency of 1.25 GHz, the receiver noise temperature Tre, ,DsB is 1690 K after correction for the losses in the beamsplitter. Reducing the bath temperature to 3.3 K decreases Trec.Dsg to 1100 K. Careful inspection of the pumped differential I(V) characteristics does not reveal any influence due to direct detection. From the data we extract a maximum value of —17.8 dB for the conversion gain of the mixer at 4.3 K. The minimum mixer noise is determined to be 1170 K by applying a noise breakdown calculation. We expect significant improvement of the receiver noise performance upon further reduction of the bath temperature.

Softwaretechnik-Trends•Mar 1, 1999•1 citation

Superconducting Transition and Heterodyne Performance at 730 GHz of a Diffusion-cooled Nb Hot-electron Bolometer Mixer

J. R. Gao, M. E. Glastra, R. H. Heeres +5 more

We report two typical experimental results of waveguide diffusion-cooled Nb hotelectron bolometer (HEB) mixers. The device is a thin (10 nm) Nb bridge with a length of 0.3 Am and a width of 0.9 pm and is defined using photolithography. In the first experiment, the resistance of a HEB is studied as a function of temperature. We observe two critical temperatures, which correspond to the 71. of the Nb bridge and the T, of the Nb under the Au pads, respectively. These two 71. define a superconducting transition width AT of a HEB. The reduced T. of the Nb under the Au pads is explained by the superconducting proximity effect. In the second experiment, we measure relative conversion efficiency vs intermediate frequency (IF) by using two coherent sources, a carcinotron and a Gunn oscillator, and determine an IF roll-off (/F, 011 ,ff ) between 0.6 and 1.2 GHz, in agreement with a value estimated in terms of the diffusion-cooled model.

Softwaretechnik-Trends•Jan 1, 1997•1 citation

Diffusion-cooled superconducting hot electron bolometer heterodyne mixer between 630 and 820 GHz

Klaus Fiegle, D. Diehl, Karl Jacobs

We report on heterodyne mixing experiments between 630-820 GHz using a diffusion-cooled superconducting hot electron bolometer at intermediate frequencies from 1-2 GHz. The niobium bolometer which is cooled by diffusion of the hot electrons into a normal conductor has dimensions of 0.3 /spl mu/m/spl times/0.15 /spl mu/m and was fabricated at KOSMA with a two-step electron beam lithography process. The film thickness of the device is 30 nm with T/sub c/ of 6.1 K and /spl Delta/T/sub c/ of 0.7 K. The mixing experiments are performed with a tunerless waveguide mixer block previously used for very low-noise SIS receivers. At a physical temperature of 2.2 K, receiver noise temperatures at 666 GHz are 1500 K at 1.0 GHz intermediate frequency, increasing rapidly above 1.5 GHz. The dissipated local oscillator power is evaluated to be 65-90 nW.

IEEE Transactions on Applied Superconductivity•Jun 1, 1997•13 citations

Detailed Characterization of Quasi-Optically Coupled Nb Hot Electron Bolometer Mixers in the 0.6-3 THz Range

W. F. M. Ganzevles, Pavel A. Yagoubov, W. J. Vreeling +3 more

Two type of Nb diffusion-cooled HEB mixers have been studied. One uses a twin-slot antenna designed for 700 GHz, and has a bridge length of 200 nm. This device is fabricated using an in situ-process for the interface between the bridge and the cooling pads. An uncorrected receiver noise temperature of 1200 K at 640 GHz and an IF bandwidth of 5 GHz have been measured. The second device uses a log-periodic antenna designed for a wide RF bandwidth. However, there is a misalignment of the Nb bridge with respect to the Au cooling pads. Receiver noise temperatures at 0.64, 1.9, and 2.5 THz have been measured. We are able to link the geometry feature to the measured properties.

•Mar 1, 2002•0 citations

Measurements with a Diffusion-Cooled Nb Hot-Electron Bolometer Mixer at 1100 GHz

Anders J. Skalare, William R. McGrath, B. Bumble +1 more

In this paper we report receiver sensitivity measurements with a diffusion-cooled niobium hot-electron bolometer around 1100 GHz. The lowest receiver noise temperature was 1670 K DSB, with approximately 40 nW of local oscillator power being dissipated in the device. The intermediate frequency bandwidth of this device, due to its short length (0.15 gm) and low normal resistance (43 a), exceeded the 1.8 GHz bandwidth of the measurement setup. The receiver was used to detect the sulfur dioxide gas absorption line at 1102 GHz in a heterodyne mode.

•Mar 1, 1998•9 citations
We have fabricated Nb diffusion-cooled hot electron bolometers for a waveguide mixer around 700 GHz. The device in this work is a thin (12 nm) Nb bridge with a length and width of 220 nm and is defined by a two-step electron beam lithography process. The resistance as a function of temperature shows two transitions, which we attribute to the Nb bridge (6.1 K) and to parts of the Nb which are covered by the Au pads (5.4 K). We have measured a DSB receiver noise temperature of 2200 K at 735 GHz and a bath temperature of 3.3 K. No significant increase of the noise temperature is observed at IF frequencies between 1.1 and 1.7 GHz. The coupled LO power is estimated to be 35 nW.
We present a fabrication process for diffusion-cooled niobium hot-electron bolometers using a self-aligned process with gold as an initial protection layer and aluminum as an etch mask that is removed by a wet etch. This process proves to be reproducible and has a yield of ~70 % per batch. Great care has been taken to avoid processing temperatures above 120 °C to minimize degradation of the Nb film. We have performed heterodyne measurements of an HEB in a fixed tuned waveguide mixer at 804 GHz and at an IF-range from 1-2 GHz. The approximate dimensions of the bridge are 240 x 200 x 14 nm3. The Niobium bridge has a critical temperature of 6.0 K and a normal state resistance of 16.5 Ω. A standard Y-factor measurement leads to a minimum noise temperature of 1200 K at 1 GHz IF. The coupled LO-power is estimated by the isothermal method to be 21 nW. Introduction Superconducting Hot-Electron-Bolometers (HEB) utilizing thin superconducting films have become established as sensitive mixers in the THz region. The thermal response time τ can be very small if the superconductor is thin enough that only the electron gas is heated and the cooling is fast enough. The bolometers described in this paper are cooled by out-diffusion of the hot electrons in normal conducting heat sinks (diffusion-cooled HEB) rather than interactions with phonons of the lattice (phononcooled HEB) [1]. To meet the requirements for astronomical applications such as SOFIA, thermal response times down to several picoseconds are needed to get intermediate frequencies up to 10 GHz. Because of τ ~ L [1] the dimensions of the bolometer bridge have to be very small. We have fabricated diffusion-cooled HEBs with short (L<300 nm) and narrow (<200 nm) bridges consisting of thin (10-14 nm) Niobium (Nb) on z-cut quartz substrates. The normal conducting heat sinks consist of 70 nm Gold (Au). In the following paragraph 1 e-mail: stodolka@ph1.uni-koeln.de we discuss problems and merits of several approaches for the fabrication of diffusioncooled HEBs. Device Fabrication Aside from a good reproducibility, the essential requirement for the fabrication of a diffusion-cooled HEB is a good transparency of the interface between the heat sinks and the material of the bolometer bridge. A thermal resistance results in a slower out-diffusion of the hot electrons and thus increases the effective bridge length and thermal response time. Defining the bolometer bridge by lift-off with subsequent deposition of the heat sinks (Fig. 1) [2] has the major disadvantage of high requirements for the overlap accuracy of the Electron-Beam-Lithography (EBL) system to position the heat sinks on the contact areas of the bridge. A solution is offered by the self-aligned process (Fig. 2). Here, the substrate is covered with a blanket layer of Nb. The heat sinks and a metal strip of the width of the bolometer bridge are deposited in succession. The bridge is now etched out of the blanket layer by using reactive ion etching (RIE) where the heat sinks and the metal strip serve as etch masks: the spacing between the heat sinks determines the bridge length while the metal strip defines the width. The overlap between Nb and Au heat sinks is large. Fig. 1: Outline of HEB fabrication by lift off (top view) a) Bolometer bridge defined by liftoff. b) Deposition of the heat sinks. The contact area (shaded) to the heat sinks is small. bolometer bridge
We report on heterodyne measurements with a Nb diffusion-cooled hot-electron bolometer in a fixed tuned waveguide mixer at 700 GHz. The device is a 300 nm long and 12 nm thick Nb microbridge, with a normal state resistance of 31 Si. We have measured the DSB receiver noise temperature using a standard Y-factor method with a 300 K and 77 K blackbody load. At 700 GHz, a bath temperature of 4.3 K, and an intermediate frequency of 1.25 GHz, the receiver noise temperature Tre, ,DsB is 1690 K after correction for the losses in the beamsplitter. Reducing the bath temperature to 3.3 K decreases Trec.Dsg to 1100 K. Careful inspection of the pumped differential I(V) characteristics does not reveal any influence due to direct detection. From the data we extract a maximum value of —17.8 dB for the conversion gain of the mixer at 4.3 K. The minimum mixer noise is determined to be 1170 K by applying a noise breakdown calculation. We expect significant improvement of the receiver noise performance upon further reduction of the bath temperature.
We report two typical experimental results of waveguide diffusion-cooled Nb hotelectron bolometer (HEB) mixers. The device is a thin (10 nm) Nb bridge with a length of 0.3 Am and a width of 0.9 pm and is defined using photolithography. In the first experiment, the resistance of a HEB is studied as a function of temperature. We observe two critical temperatures, which correspond to the 71. of the Nb bridge and the T, of the Nb under the Au pads, respectively. These two 71. define a superconducting transition width AT of a HEB. The reduced T. of the Nb under the Au pads is explained by the superconducting proximity effect. In the second experiment, we measure relative conversion efficiency vs intermediate frequency (IF) by using two coherent sources, a carcinotron and a Gunn oscillator, and determine an IF roll-off (/F, 011 ,ff ) between 0.6 and 1.2 GHz, in agreement with a value estimated in terms of the diffusion-cooled model.
We report on heterodyne mixing experiments between 630-820 GHz using a diffusion-cooled superconducting hot electron bolometer at intermediate frequencies from 1-2 GHz. The niobium bolometer which is cooled by diffusion of the hot electrons into a normal conductor has dimensions of 0.3 /spl mu/m/spl times/0.15 /spl mu/m and was fabricated at KOSMA with a two-step electron beam lithography process. The film thickness of the device is 30 nm with T/sub c/ of 6.1 K and /spl Delta/T/sub c/ of 0.7 K. The mixing experiments are performed with a tunerless waveguide mixer block previously used for very low-noise SIS receivers. At a physical temperature of 2.2 K, receiver noise temperatures at 666 GHz are 1500 K at 1.0 GHz intermediate frequency, increasing rapidly above 1.5 GHz. The dissipated local oscillator power is evaluated to be 65-90 nW.
Two type of Nb diffusion-cooled HEB mixers have been studied. One uses a twin-slot antenna designed for 700 GHz, and has a bridge length of 200 nm. This device is fabricated using an in situ-process for the interface between the bridge and the cooling pads. An uncorrected receiver noise temperature of 1200 K at 640 GHz and an IF bandwidth of 5 GHz have been measured. The second device uses a log-periodic antenna designed for a wide RF bandwidth. However, there is a misalignment of the Nb bridge with respect to the Au cooling pads. Receiver noise temperatures at 0.64, 1.9, and 2.5 THz have been measured. We are able to link the geometry feature to the measured properties.
In this paper we report receiver sensitivity measurements with a diffusion-cooled niobium hot-electron bolometer around 1100 GHz. The lowest receiver noise temperature was 1670 K DSB, with approximately 40 nW of local oscillator power being dissipated in the device. The intermediate frequency bandwidth of this device, due to its short length (0.15 gm) and low normal resistance (43 a), exceeded the 1.8 GHz bandwidth of the measurement setup. The receiver was used to detect the sulfur dioxide gas absorption line at 1102 GHz in a heterodyne mode.