Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Tantalum Hot-Electron Bolometers for Low-Noise Heterodyne Receivers

Anders J. Skalare, William R. McGrath, Bruce Bumble, Henry George LeDuc

Published Mar 26, 2002• 1 citation
OpenAlex

Abstract

We describe superconducting diffusion-cooled hot-electron bolometers that were fabricated fromtantalum films grown on a thin niobium seed layer. The seed layer promotes single-phase growth of the Ta films, resulting in high-quality bolometers with transition temperatures up to 2.35 K and transition widths of less than 0.2 K. An S-parameter measurement set-up in a He-3 cryostat was used to measure device impedance versus frequency of a 400 nm long device at a temperature of 400 mK. It is shown that a 3 dB roll-off frequency of about 1 GHz can be achieved when the device resistance matches the impedance of the embedding network (no electrothermal feedback). This would lead to a prediction of 16 GHz for a 100 nm device, and indicates that a heterodyne mixer using a Ta HEB should be able to operate at several GHz even with a significant amount of electrothermal feedback.

Related papers

Speed measurements of diffusion-cooled tantalum bolometers

Anders J. Skalare, William R. McGrath, B. Bumble +1 more

Thin tantalum films were deposited on silicon wafers using a niobium seed layer to promote alpha-phase growth. These films were patterned into submicrometer size diffusion-cooled bolometers with superconducting transition temperatures of up to 2.35 K and a transition width of about 200 mK. The thermal relaxation times of the devices were determined by measuring the device impedance as a function of frequency and by fitting a theoretical model to the data. Measured relaxation times at low bias voltages range from 0.75 GHz for a 400-nm long device to 6 GHz for a 100-nm device, excluding electrothermal feedback. This should allow sufficiently high instantaneous bandwidths for most low-noise mixer applications in astrophysics.

IEEE Transactions on Applied Superconductivity•Jun 1, 2003•3 citations

Heterodyne mixing in diffusion-cooled superconducting aluminum hot-electron bolometers

Irfan A. Siddiqi, A. Verevkin, D. E. Prober +4 more

We present microwave (30 GHz) measurements on aluminum superconducting hot-electron bolometer (HEB) mixers. Aluminum HEB mixers have a lower superconducting transition temperature than niobium and niobium nitride devices, and are predicted to have improved sensitivity and require less local oscillator power. The devices studied consist of a narrow superconducting aluminum microbridge with contacts comprised of thick aluminum, titanium, and gold. A perpendicular magnetic field is used to suppress superconductivity in the contacts. The device length is much shorter than the electron–phonon inelastic length [L≪(Dτe–ph)1/2] and thus the intermediate frequency (IF) bandwidth is set by the diffusion time of hot electrons from the microbridge into the contacts. We discuss limitations on the IF bandwidth in very short HEB mixers with fully normal contacts. Overall, the microwave heterodyne mixing results show good performance with a mixer noise temperature inferred from the conversion efficiency and output noise of TM⩾4 K, double side band (DSB). Measurements at 618 GHz yield a conversion efficiency approximately 10 dB lower than observed at 30 GHz. Output saturation by background radiation is postulated to contribute significantly to this difference. A similar decrease in conversion efficiency in the microwave mixing measurements is observed when broadband noise is added to the rf input signal. We discuss the tradeoff between increased sensitivity and the occurrence of saturation effects in low transition temperature HEBs.

Journal of Applied Physics•Apr 1, 2002•13 citations

Diffusion-cooled superconducting hot electron bolometer heterodyne mixer between 630 and 820 GHz

Klaus Fiegle, D. Diehl, Karl Jacobs

We report on heterodyne mixing experiments between 630-820 GHz using a diffusion-cooled superconducting hot electron bolometer at intermediate frequencies from 1-2 GHz. The niobium bolometer which is cooled by diffusion of the hot electrons into a normal conductor has dimensions of 0.3 /spl mu/m/spl times/0.15 /spl mu/m and was fabricated at KOSMA with a two-step electron beam lithography process. The film thickness of the device is 30 nm with T/sub c/ of 6.1 K and /spl Delta/T/sub c/ of 0.7 K. The mixing experiments are performed with a tunerless waveguide mixer block previously used for very low-noise SIS receivers. At a physical temperature of 2.2 K, receiver noise temperatures at 666 GHz are 1500 K at 1.0 GHz intermediate frequency, increasing rapidly above 1.5 GHz. The dissipated local oscillator power is evaluated to be 65-90 nW.

IEEE Transactions on Applied Superconductivity•Jun 1, 1997•13 citations

Fabrication and Receiver Measurements of a Diffusion-cooled Hot-electron Bolometer at 800 GHz

J. Stodolka, Kristof J. P. Jacobs

We present a fabrication process for diffusion-cooled niobium hot-electron bolometers using a self-aligned process with gold as an initial protection layer and aluminum as an etch mask that is removed by a wet etch. This process proves to be reproducible and has a yield of ~70 % per batch. Great care has been taken to avoid processing temperatures above 120 °C to minimize degradation of the Nb film. We have performed heterodyne measurements of an HEB in a fixed tuned waveguide mixer at 804 GHz and at an IF-range from 1-2 GHz. The approximate dimensions of the bridge are 240 x 200 x 14 nm3. The Niobium bridge has a critical temperature of 6.0 K and a normal state resistance of 16.5 Ω. A standard Y-factor measurement leads to a minimum noise temperature of 1200 K at 1 GHz IF. The coupled LO-power is estimated by the isothermal method to be 21 nW. Introduction Superconducting Hot-Electron-Bolometers (HEB) utilizing thin superconducting films have become established as sensitive mixers in the THz region. The thermal response time τ can be very small if the superconductor is thin enough that only the electron gas is heated and the cooling is fast enough. The bolometers described in this paper are cooled by out-diffusion of the hot electrons in normal conducting heat sinks (diffusion-cooled HEB) rather than interactions with phonons of the lattice (phononcooled HEB) [1]. To meet the requirements for astronomical applications such as SOFIA, thermal response times down to several picoseconds are needed to get intermediate frequencies up to 10 GHz. Because of τ ~ L [1] the dimensions of the bolometer bridge have to be very small. We have fabricated diffusion-cooled HEBs with short (L<300 nm) and narrow (<200 nm) bridges consisting of thin (10-14 nm) Niobium (Nb) on z-cut quartz substrates. The normal conducting heat sinks consist of 70 nm Gold (Au). In the following paragraph 1 e-mail: stodolka@ph1.uni-koeln.de we discuss problems and merits of several approaches for the fabrication of diffusioncooled HEBs. Device Fabrication Aside from a good reproducibility, the essential requirement for the fabrication of a diffusion-cooled HEB is a good transparency of the interface between the heat sinks and the material of the bolometer bridge. A thermal resistance results in a slower out-diffusion of the hot electrons and thus increases the effective bridge length and thermal response time. Defining the bolometer bridge by lift-off with subsequent deposition of the heat sinks (Fig. 1) [2] has the major disadvantage of high requirements for the overlap accuracy of the Electron-Beam-Lithography (EBL) system to position the heat sinks on the contact areas of the bridge. A solution is offered by the self-aligned process (Fig. 2). Here, the substrate is covered with a blanket layer of Nb. The heat sinks and a metal strip of the width of the bolometer bridge are deposited in succession. The bridge is now etched out of the blanket layer by using reactive ion etching (RIE) where the heat sinks and the metal strip serve as etch masks: the spacing between the heat sinks determines the bridge length while the metal strip defines the width. The overlap between Nb and Au heat sinks is large. Fig. 1: Outline of HEB fabrication by lift off (top view) a) Bolometer bridge defined by liftoff. b) Deposition of the heat sinks. The contact area (shaded) to the heat sinks is small. bolometer bridge

•Dec 1, 2001•2 citations

Hot-electron bolometer mixers for terahertz radiation

K. Ilin, Alexei D. Semenov, Heinz‐Wilhelm Hübers +1 more

Hot-electron bolometer (HEB) mixers are used in many low noise heterodyne radio astronomical receivers. Their noise temperature is at the level of 10–15 times the quantum limit, and their gain bandwidth is from 2 GHz to slightly more than 5 GHz depending on the type of substrate material used for a device fabrication. The HEB mixers presented in this Letter are a complex multilayer thin-film structure containing an ultra-thin superconducting film of NbN as a detecting element, and a thick normal metal layer as an antenna structure. The overall performance of the device has been improved by optimisation of the HEB mixer fabrication steps starting with ultra-thin NbN films, followed by NbN/Au bi-layers for antenna structures. Patterning was achieved using electron-beam lithography and lift-off processes. The noise temperature of the HEB mixer fabricated with the improved technology is about 800 K, as measured in a cryogenic-free system with a quantum cascade laser as a local oscillator.

Electronics Letters•Dec 23, 2010•1 citation

A heterodyne receiver at 533 GHz using a diffusion-cooled superconducting hot electron bolometer mixer

Anders J. Skalare, William R. McGrath, B. Bumble +4 more

This paper describes heterodyne measurements at 533 GHz using a novel superconducting hot electron bolometer in a waveguide mixer block. The bolometer is a thin (10 nm) and narrow (0.1 /spl mu/m) strip of niobium with a length of less than half a micron and a critical temperature of approximately 5.5 K. The short length ensures that diffusion dominates over electron-phonon interaction as a cooling mechanism for the hot electrons, thus allowing heterodyne detection with intermediate frequencies of several GHz. A Y-factor response of 1.15 dB has been obtained at an intermediate frequency of 1.4 GHz with hot/cold load temperatures of approximately 295/77 K, indicating a receiver noise temperature around 650 K DSB. The IF response extends up to at least 2 GHz and possibly higher.>

IEEE Transactions on Applied Superconductivity•Jun 1, 1995•32 citations
We describe superconducting diffusion-cooled hot-electron bolometers that were fabricated fromtantalum films grown on a thin niobium seed layer. The seed layer promotes single-phase growth of the Ta films, resulting in high-quality bolometers with transition temperatures up to 2.35 K and transition widths of less than 0.2 K. An S-parameter measurement set-up in a He-3 cryostat was used to measure device impedance versus frequency of a 400 nm long device at a temperature of 400 mK. It is shown that a 3 dB roll-off frequency of about 1 GHz can be achieved when the device resistance matches the impedance of the embedding network (no electrothermal feedback). This would lead to a prediction of 16 GHz for a 100 nm device, and indicates that a heterodyne mixer using a Ta HEB should be able to operate at several GHz even with a significant amount of electrothermal feedback.
Thin tantalum films were deposited on silicon wafers using a niobium seed layer to promote alpha-phase growth. These films were patterned into submicrometer size diffusion-cooled bolometers with superconducting transition temperatures of up to 2.35 K and a transition width of about 200 mK. The thermal relaxation times of the devices were determined by measuring the device impedance as a function of frequency and by fitting a theoretical model to the data. Measured relaxation times at low bias voltages range from 0.75 GHz for a 400-nm long device to 6 GHz for a 100-nm device, excluding electrothermal feedback. This should allow sufficiently high instantaneous bandwidths for most low-noise mixer applications in astrophysics.
We present microwave (30 GHz) measurements on aluminum superconducting hot-electron bolometer (HEB) mixers. Aluminum HEB mixers have a lower superconducting transition temperature than niobium and niobium nitride devices, and are predicted to have improved sensitivity and require less local oscillator power. The devices studied consist of a narrow superconducting aluminum microbridge with contacts comprised of thick aluminum, titanium, and gold. A perpendicular magnetic field is used to suppress superconductivity in the contacts. The device length is much shorter than the electron–phonon inelastic length [L≪(Dτe–ph)1/2] and thus the intermediate frequency (IF) bandwidth is set by the diffusion time of hot electrons from the microbridge into the contacts. We discuss limitations on the IF bandwidth in very short HEB mixers with fully normal contacts. Overall, the microwave heterodyne mixing results show good performance with a mixer noise temperature inferred from the conversion efficiency and output noise of TM⩾4 K, double side band (DSB). Measurements at 618 GHz yield a conversion efficiency approximately 10 dB lower than observed at 30 GHz. Output saturation by background radiation is postulated to contribute significantly to this difference. A similar decrease in conversion efficiency in the microwave mixing measurements is observed when broadband noise is added to the rf input signal. We discuss the tradeoff between increased sensitivity and the occurrence of saturation effects in low transition temperature HEBs.
We report on heterodyne mixing experiments between 630-820 GHz using a diffusion-cooled superconducting hot electron bolometer at intermediate frequencies from 1-2 GHz. The niobium bolometer which is cooled by diffusion of the hot electrons into a normal conductor has dimensions of 0.3 /spl mu/m/spl times/0.15 /spl mu/m and was fabricated at KOSMA with a two-step electron beam lithography process. The film thickness of the device is 30 nm with T/sub c/ of 6.1 K and /spl Delta/T/sub c/ of 0.7 K. The mixing experiments are performed with a tunerless waveguide mixer block previously used for very low-noise SIS receivers. At a physical temperature of 2.2 K, receiver noise temperatures at 666 GHz are 1500 K at 1.0 GHz intermediate frequency, increasing rapidly above 1.5 GHz. The dissipated local oscillator power is evaluated to be 65-90 nW.
We present a fabrication process for diffusion-cooled niobium hot-electron bolometers using a self-aligned process with gold as an initial protection layer and aluminum as an etch mask that is removed by a wet etch. This process proves to be reproducible and has a yield of ~70 % per batch. Great care has been taken to avoid processing temperatures above 120 °C to minimize degradation of the Nb film. We have performed heterodyne measurements of an HEB in a fixed tuned waveguide mixer at 804 GHz and at an IF-range from 1-2 GHz. The approximate dimensions of the bridge are 240 x 200 x 14 nm3. The Niobium bridge has a critical temperature of 6.0 K and a normal state resistance of 16.5 Ω. A standard Y-factor measurement leads to a minimum noise temperature of 1200 K at 1 GHz IF. The coupled LO-power is estimated by the isothermal method to be 21 nW. Introduction Superconducting Hot-Electron-Bolometers (HEB) utilizing thin superconducting films have become established as sensitive mixers in the THz region. The thermal response time τ can be very small if the superconductor is thin enough that only the electron gas is heated and the cooling is fast enough. The bolometers described in this paper are cooled by out-diffusion of the hot electrons in normal conducting heat sinks (diffusion-cooled HEB) rather than interactions with phonons of the lattice (phononcooled HEB) [1]. To meet the requirements for astronomical applications such as SOFIA, thermal response times down to several picoseconds are needed to get intermediate frequencies up to 10 GHz. Because of τ ~ L [1] the dimensions of the bolometer bridge have to be very small. We have fabricated diffusion-cooled HEBs with short (L<300 nm) and narrow (<200 nm) bridges consisting of thin (10-14 nm) Niobium (Nb) on z-cut quartz substrates. The normal conducting heat sinks consist of 70 nm Gold (Au). In the following paragraph 1 e-mail: stodolka@ph1.uni-koeln.de we discuss problems and merits of several approaches for the fabrication of diffusioncooled HEBs. Device Fabrication Aside from a good reproducibility, the essential requirement for the fabrication of a diffusion-cooled HEB is a good transparency of the interface between the heat sinks and the material of the bolometer bridge. A thermal resistance results in a slower out-diffusion of the hot electrons and thus increases the effective bridge length and thermal response time. Defining the bolometer bridge by lift-off with subsequent deposition of the heat sinks (Fig. 1) [2] has the major disadvantage of high requirements for the overlap accuracy of the Electron-Beam-Lithography (EBL) system to position the heat sinks on the contact areas of the bridge. A solution is offered by the self-aligned process (Fig. 2). Here, the substrate is covered with a blanket layer of Nb. The heat sinks and a metal strip of the width of the bolometer bridge are deposited in succession. The bridge is now etched out of the blanket layer by using reactive ion etching (RIE) where the heat sinks and the metal strip serve as etch masks: the spacing between the heat sinks determines the bridge length while the metal strip defines the width. The overlap between Nb and Au heat sinks is large. Fig. 1: Outline of HEB fabrication by lift off (top view) a) Bolometer bridge defined by liftoff. b) Deposition of the heat sinks. The contact area (shaded) to the heat sinks is small. bolometer bridge
Hot-electron bolometer (HEB) mixers are used in many low noise heterodyne radio astronomical receivers. Their noise temperature is at the level of 10–15 times the quantum limit, and their gain bandwidth is from 2 GHz to slightly more than 5 GHz depending on the type of substrate material used for a device fabrication. The HEB mixers presented in this Letter are a complex multilayer thin-film structure containing an ultra-thin superconducting film of NbN as a detecting element, and a thick normal metal layer as an antenna structure. The overall performance of the device has been improved by optimisation of the HEB mixer fabrication steps starting with ultra-thin NbN films, followed by NbN/Au bi-layers for antenna structures. Patterning was achieved using electron-beam lithography and lift-off processes. The noise temperature of the HEB mixer fabricated with the improved technology is about 800 K, as measured in a cryogenic-free system with a quantum cascade laser as a local oscillator.
This paper describes heterodyne measurements at 533 GHz using a novel superconducting hot electron bolometer in a waveguide mixer block. The bolometer is a thin (10 nm) and narrow (0.1 /spl mu/m) strip of niobium with a length of less than half a micron and a critical temperature of approximately 5.5 K. The short length ensures that diffusion dominates over electron-phonon interaction as a cooling mechanism for the hot electrons, thus allowing heterodyne detection with intermediate frequencies of several GHz. A Y-factor response of 1.15 dB has been obtained at an intermediate frequency of 1.4 GHz with hot/cold load temperatures of approximately 295/77 K, indicating a receiver noise temperature around 650 K DSB. The IF response extends up to at least 2 GHz and possibly higher.>