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Fabrication and Noise Measurement of NbTiN Hot Electron Bolometer Heterodyne Mixers at THz Frequencies

P. Khosropanah, S. Bedorf, Serguei Cherednichenko, Vladimir Drakinskiy, Karl Jacobs, H. Merkel, E. Kollberg

Published Apr 1, 2003• 5 citations
OpenAlex

Abstract

The paper reports the latest development and the measured results of NbTiN hot electron bolometer mixers at THz frequencies. The devices are based on 4-7 nm thin NbTiN films, which were deposited by reactive magnetron sputtering of NbTi target in an Ar/N2 atmosphere, on heated high-resistivity Si substrates over a 20 nm thick AlN buffer layer. The quality parameters of the film are transition temperature and normal-state resistivity, which were optimized by varying the sputtering parameters. The resistivity and the critical temperature of the films are about 400 μΩcm and 9 K, respectively. Bolometers (4 μm wide and 0.7 μm long), integrated with logarithmic spiral antennas are fabricated. Mixer noise performance is tested in a quasi-optical receiver in 1.5-4 GHz IF band. The DSB receiver noise temperature of 700 K, 1100 K and 3000 K is obtained at 0.7, 1.6 and 2.6 THz LO frequencies, respectively.

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Superconductor Science and Technology•Nov 1, 1999•13 citations
The paper reports the latest development and the measured results of NbTiN hot electron bolometer mixers at THz frequencies. The devices are based on 4-7 nm thin NbTiN films, which were deposited by reactive magnetron sputtering of NbTi target in an Ar/N2 atmosphere, on heated high-resistivity Si substrates over a 20 nm thick AlN buffer layer. The quality parameters of the film are transition temperature and normal-state resistivity, which were optimized by varying the sputtering parameters. The resistivity and the critical temperature of the films are about 400 μΩcm and 9 K, respectively. Bolometers (4 μm wide and 0.7 μm long), integrated with logarithmic spiral antennas are fabricated. Mixer noise performance is tested in a quasi-optical receiver in 1.5-4 GHz IF band. The DSB receiver noise temperature of 700 K, 1100 K and 3000 K is obtained at 0.7, 1.6 and 2.6 THz LO frequencies, respectively.
Hot electron bolometer mixers (HEBM) are expected to be used as low-noise heterodyne mixers in the terahertz frequency range. We are developing quasi-optical HEBMs for applications such as atmospheric remote sensing and radio astronomy in the terahertz frequency range. Therefore, we developed a fabrication method using niobium nitride (NbN) ultrathin films deposited on a silicone (Si) substrate for terahertz applications. First, a magnesium oxide buffer layer 50 nm thick was deposited on a Si substrate at approximately 525 °C. After deposition of this layer, NbN ultrathin films were deposited at ambient temperature. Using the buffer layers, we found the transition temperature of the 3.5-nm-thick NbN thin films to be approximately 10 K. The same method was applied to fabricate NbN-HEBMs on a Si substrate. The fabricated quasi-optical mixers were designed to operate at 3.1 THz. The receiver noise temperature was found to be approximately 1930 K (DSB) at 3.1 THz.
We present the results of our studies of NbN phonon-cooled HEB mixers at terahertz frequencies. The mixers were fabricated from NbN film deposited on a high-resistivity Si substrate with an MgO buffer layer. The mixer element was integrated with a log-periodic spiral antenna. The noise temperature measurements were performed at 2.5 THz and at 3.8 THz local oscillator frequencies for the 3 x 0.2 μm2 active area devices. The best uncorrected receiver noise temperatures found for these frequencies are 1300 K and 3100 K, respectively. A water vapour discharge laser was used as the LO source. The largest gain bandwidth of 5.2 GHz was achieved for a mixer based on 2 nm thick NbN film deposited on MgO layer over Si substrate. The gain bandwidth of the mixer based on 3.5 nm NbN film deposited on Si with MgO is 4.2 GHz and the noise bandwidth for the same device amounts to 5 GHz. We also present the results of our research into decrease of the direct detection contribution to the measured Y-factor and a possible error of noise temperature calculation. The use of a square nickel cell mesh as an IR-filter enabled us to avoid the effect of direct detection and measure apparent value of the noise temperature which was 16% less than that obtained using conventional black polyethylene IR-filter.
Experimental work on the development of a quasi-optical heterodyne receiver for the THz frequency range is reported. The mixing device is a superconducting hot electron bolometer (HEB) made from ultrathin, d = 3 - 5 nm, niobium nitride (NbN) films. Work described in this thesis comprises: The design of a prototype receiver using quasi-optical coupling. Device fabrication involving reactive magnetron sputtering of NbN films and lithographic definition of the antenna integrated mixer. An investigation of the receiver performance at frequencies between 0.6 THz and 2.5 THz. The best performance is obtained with HEB mixers made from NbN films with a thickness d = 3-3.5 nm and a critical temperature T c = 9 - 9.5 K. Double-side band receiver noise temperatures are 530 K at 0.6 THz, 650 K at 1.6 THz and 1100 K at 2.5 THz. Corrected for losses in the receiver input optics, these values amount to only 10 times the theoretical quantum limit. MgO as the substrate material has been shown to provide improved acoustic coupling between NbN film and the substrate compared to other materials such as Si or sapphire. A maximum IF gain bandwidth of 4.5 GHz has been measured under the same operating conditions which yield lowest noise temperature. The local oscilltor power requirement is ~250 nW absorbed in the bolometer. Quasi-optically coupled HEB mixers have become the device-of-choice for radio astronomical applications in the frequency regime at and above 1 THz.
We present recent measurements of receiver noise temperature and intermediate frequency (IF) bandwidth in the frequency range 0.8-1.3 THz for waveguide NbTiN HEB mixers of various dimensions. These devices are fabricated from an NbTiN film deposited on crystalline quartz substrates with AlN buffer layer. The lengths of the mixer elements vary from 0.3 to 0.5 /spl mu/m and their widths vary from 3 to 10 /spl mu/m. Critical temperatures are typically at 8.5 K, and the measured normal state resistance of the devices is about 1000 ohms per square. All the device DC parameters demonstrate a high degree of uniformity. A double side band noise temperature at 0.8 THz as low as 550 K has been measured at an IF frequency of 1.8 GHz, with a conversion loss of around 14 dB. At an IF of 3 GHz, the noise temperature increases to 750 K. We have also made extensive measurements of the IF bandwidth as a function of bias voltages and currents. At the optimal low-noise operation point, a 3-dB IF bandwidth of 1.2 GHz is obtained for a wide variety of device dimensions and bath temperature.
The performance of a NbN based phonon-cooled Hot Electron Bolometric (HEB) quasioptical mixer is investigated in the 0.65-3.12 THz frequency range. The device is made from a 3 nm thick NbN film on high resistivity Si and integrated with a planar spiral antenna on the same substrate. The in-plane dimensions of the bolometer strip are 0.2/spl times/2 /spl mu/m. The best results of the DSB noise temperature at 1.5 GHz IF frequency obtained with one device are: 1300 K at 650 GHz, 4700 K at 2.5 THz and 10000 K at 3.12 THz. The measurements were performed at 4.5 K ambient temperature. The amount of local oscillator (LO) power absorbed in the bolometer is about 100 nW. The mixer is linear to within 1 dB compression up to the signal level 10 dB below that of the LO. The intrinsic single sideband conversion gain measured at 650 GHz is -9 dB, the total conversion gain is -14 dB.
The performance of NbN-based phonon-cooled hot electron bolometric (HEB) quasioptical mixers is investigated in the 0.7-3.1 THz frequency range. The devices are made from a 3.5-4 nm thick NbN film on high resistivity Si and integrated with a planar spiral antenna on the same substrate. The length of the bolometer microbridge is 0.1-0.2 µm; the width is 1-2 µm. The best results of the DSB receiver noise temperature measured at 1.5 GHz intermediate frequency are: 800 K at 0.7 THz, 1100 K at 1.6 THz, 2000 K at 2.5 THz and 4200 K at 3.1 THz. The measurements were performed with a far infrared laser as the local oscillator (LO) source. The estimated LO power requirement is less than 500 nW at the receiver input. First results on spiral antenna polarization measurements are reported.