The Superconductivity Research Laboratory has successfully fabricated large quantities of single flux quantum (SFQ) large scale integrated circuits, including several thousands of Josephson junctions (JJs). Using a Jc = 2.5 kA cm−2 process in which the number of Nb layers was four and the minimum JJ size was 2 µm square. We developed a new advanced fabrication process that produced a Jc = 10 kA cm−2, nine Nb layers and a minimum JJ size of 1 µm square. The increase in the number of Nb layers was achieved by using a planarization technique. The target of our next generation process is a Jc = 40 kA cm−2 with a 0.5 µm square for the minimum junction size. This specification will be achieved by using advanced semiconductor technologies. This process will enable SFQ circuits to be produced with one million JJs on a chip and achieve a clock frequency greater than 100 GHz.
The Superconductivity Research Laboratory has successfully fabricated large quantities of single flux quantum (SFQ) large scale integrated circuits, including several thousands of Josephson junctions (JJs). Using a Jc = 2.5 kA cm−2 process in which the number of Nb layers was four and the minimum JJ size was 2 µm square. We developed a new advanced fabrication process that produced a Jc = 10 kA cm−2, nine Nb layers and a minimum JJ size of 1 µm square. The increase in the number of Nb layers was achieved by using a planarization technique. The target of our next generation process is a Jc = 40 kA cm−2 with a 0.5 µm square for the minimum junction size. This specification will be achieved by using advanced semiconductor technologies. This process will enable SFQ circuits to be produced with one million JJs on a chip and achieve a clock frequency greater than 100 GHz.
We developed an Nb-based fabrication process for single flux quantum (SFQ) circuits in a Japanese government project that began in September 2002 and ended in March 2007. Our conventional process, called the Standard Process (SDP), was improved by overhauling all the process steps and routine process checks for all wafers. Wafer yield with the improved SDP dramatically increased from 50% to over 90%. We also developed a new fabrication process for SFQ circuits, called the Advanced Process (ADP). The specifications for ADP are nine planarized Nb layers, a minimum Josephson junction (JJ) size of 1×1μm, a line width of 0.8μm, a JJ critical current density of 10kA/cm2, a 2.4Ω Mo sheet resistance, and vertically stacked superconductive contact holes. We fabricated an eight-bit SFQ shift register, a one million SQUID array and a 16-kbit RAM by using the ADP. The shift register was operated up to 120GHz and no short or open circuits were detected in the one million SQUID array. We confirmed correct memory operations by the 16-kbit RAM and a 5.7 times greater integration level compared to that possible with the SDP.
Abstract We review the existing fabrication processes for superconductor digital electronics and describe approaches to increasing the scale of integration of superconducting digital circuits from the current level of about one million Josephson junctions (JJs) on a 1-cm 2 chip toward ten million JJs per chip. We present designs of ac-clocked Single Flux Quantum (SFQ) shift registers, convenient benchmarking circuits, in a 250-nm-linewidth superconductor electronics fabrication process developed recently at MIT Lincoln Laboratory (MIT LL). For shift registers using resistively shunted JJs with Josephson critical current density, J c of 100 μA/μm 2 , we achieved a record-high circuit density of 4.2·10 6 JJs per cm 2 , a factor of three higher than the previous record obtained in the MIT LL 350-nm-linewidth SFQ5ee process. Using self-shunted JJs with J c of 600 μA/μm 2 , we increased this record circuit density to 7.4·10 6 JJs per cm 2 .
To improve the operating speed and density of Nb single-flux-quantum integrated circuits, we developed an advanced fabrication process based on NEC's standard process. We fabricated planarized six-Nb-layer circuit structures using this advanced process. This new structure has four Nb wiring layers for greater design flexibility. To shield the magnetic field produced by the DC bias current, the DC bias power supply layer was placed under the groundplane. The critical current density of the Josephson junction was 10 kA/cm/sup 2/. We fabricated and tested more than 10 wafers and demonstrated that the six-layer circuits were successfully planarized. We also confirmed insulation between each Nb layer and the reliability of superconducting contacts. This planarization did not significantly degrade the junction characteristics. We measured small spreads in the critical current of less than 2%. These results demonstrated the effectiveness of this advanced process based on mechanical-polishing planarization.
Single flux quantum (SFQ) electronics is extremely fast and has very low on-chip power dissipation. SFQ VLSI is an excellent candidate for high-performance computing and other applications requiring extremely high-speed signal processing. Despite this, SFQ technology has generally not been accepted for system implementation. We argue that this is due, at least in part, to the use of outdated tools to produce SFQ circuits and chips. Assuming the use of tools equivalent to those employed in the semiconductor industry, we estimate the density of Josephson junctions, circuit speed, and power dissipation that could be achieved with SFQ technology. Today, CMOS lithography is at 90?65?nm with about 20 layers. Assuming equivalent technology, aggressively increasing the current density above 100?kA?cm?2 to achieve junction speeds approximately 1000?GHz, and reducing device footprints by converting device profiles from planar to vertical, one could expect to integrate about 250?M Josephson junctions cm?2 into SFQ digital circuits. This should enable circuit operation with clock frequencies above 200?GHz and place approximately 20?K gates within a radius of one clock period. As a result, complete microprocessors, including integrated memory registers, could be fabricated on a single chip.
Recent progress in single flux quantum (SFQ) device technologies in Japan is described, mainly focusing on those developed in the NEDO "Superconductors Network Device Project" which includes developments of both LTS and HTS devices. The advanced Nb process which consists of a planarized structure with nine Nb layers and 10 kA/cm2Josephson junctions (JJs) has been developed. This enables fabrication of chips including 100,000 JJs and operating frequency up to 80 GHz. We have also developed the CAD tool by which one can generate SFQ circuit layouts including about 400,000 JJs from logic descriptions. For demonstration of a small-scale switch system, a 4 times 4 switch chip, a 117 Gbps multi-chip-module (MCM) technology, and a packaging technology with 32-ch 10 Gbps I/Os to an MCM have been developed. By using the multilayer process with three HTS epitaxial layers and interface-engineered ramp-edge JJs, we demonstrated operation of SFQ circuits with up to 200 JJs. A variety of elementary SFQ circuits such as a T-FF and a 1:2 switch required for an A/D converter front-end circuit have been designed based on a new layout method, and their operation at 30-50 K has been confirmed. A prototype sampler system is being developed for demonstration of bandwidth over 100 GHz for optical input signals.
20 kA/cm2 Process Development for Superconducting Integrated Circuits With 80 GHz Clock Frequency
Results of the development of an advanced fabrication process for superconductor integrated circuits (ICs) with 20 kA/cm2Nb/AlOx/Nb Josephson junctions is presented. The process has 4 niobium superconducting layers, one MoNxresistor layer with 4.0 Ohm per square sheet resistance for the junction shunting and circuit biasing, and employs circular Josephson junctions with the minimum diameter of 1 mum; total 11 photolithography levels. The goal of this process development is the demonstration of the feasibility of 80 GHz clock speeds in superconducting ICs for digital signal processing (DSP) and high performance computing. Basic components of rapid single flux quantum (RSFQ) logic such as DC/SFQ, SFQ/DC converters, Josephson transmission lines (JTLs), and simple digital circuits such as T-flip-flops and 4-bit digital counters have been fabricated and tested. The T-flip-flops were shown to operate up to 400 GHz with the widest margin of operation of plusmn13% at 325 GHz. Digital testing results on the 4-bit counters as well as the junctions, resistors, and other process parameters are also presented. Prospects for yet higher speeds and very large scale integration are discussed.