Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Advanced materials research

Crosstalk between Nb Superconducting Coplanar Waveguide Resonators

Na Zhao, Jianshe Liu, Hu Zhao, Hao Li, Tie Fu Li, Wei Chen

Published Jun 1, 2012• 1 citation
Publisher

Abstract

Nb based superconducting coplanar waveguide resonators on oxidized silicon wafer were fabricated and characterized at different temperatures. Crosstalk between two single resonators fabricated on the same chip was observed. When microwave signal is sent to the input of either resonator, output from both resonators show almost the same resonant frequency and similar quality factors.

DOI
10.4028/www.scientific.net/amr.542-543.653

Related papers

Fabrication and characterization of superconducting coplanar waveguide resonators

Bongkeon Kim, Minkyung Jung, Jihwan Kim +2 more

High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Qi = 4,784 and Qc = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures.

•Dec 1, 2020•1 citation

Characterizing Niobium Nitride-Based Superconducting Coplanar Waveguide Resonators for Microwave Hybrid Circuit Quantum Electrodynamics

Paniz Foshat, Paul Baity, Sergey Danilin +8 more

The high critical magnetic field and relatively high critical temperature of niobium nitride (NbN) make it a promising material for applications in superconducting quantum technology. However, NbN-based superconducting circuits are sensitive to decoherence sources such as two-level system (TLS) defects. Here, we numerically and experimentally investigate NbN superconducting microwave coplanar waveguide resonator arrays with a 100 nm thickness, capacitively coupled to a common coplanar waveguide on a silicon chip. We observe that the resonators' internal quality factor ($Q_{i}$) decreases from$Q_{i}\sim 1.07\times 10^{6}$in a high power regime to$Q_{i}\sim 1.36\times 10^{5}$in the single photon regime. Data from this study is consistent with the TLS theory, which describes the TLS interactions in resonator substrates and interfaces. Moreover, we study the temperature ($T$) dependence of$Q_{i}$and resonance frequency$f_{r}$of coplanar waveguide resonators to characterize the quasiparticle density. We observe that the increase in kinetic inductance at higher temperatures is the main reason for the frequency shift. Finally, we measure$f_{r}$and$Q_{i}$in response to in-plane magnetic fields ($B_{||}$). We verify that$Q_{i}$stays well above$10^{4}$up to$B_{||}$= 240 mT in the photon number$< \! n_{ph} \! >$= 1.8 at$T$= 100 mK. Our results could enable the development of robust microwave superconducting circuits for circuit quantum electrodynamics at high magnetic fields required for hybrid superconducting-semiconducting quantum circuits.

IEEE Transactions on Applied Superconductivity•Jan 22, 2025•10 citations

Coplanar waveguide resonators for circuit quantum electrodynamics

M. Göppl, A. Fragner, Matthias Baur +7 more

High quality on-chip microwave resonators have recently found prominent new applications in quantum optics and quantum information processing experiments with superconducting electronic circuits, a field now known as circuit quantum electrodynamics (QED). They are also used as single photon detectors and parametric amplifiers. Here we analyze the physical properties of coplanar waveguide resonators and their relation to the materials properties for use in circuit QED. We have designed and fabricated resonators with fundamental frequencies from 2 to 9 GHz and quality factors ranging from a few hundreds to a several hundred thousands controlled by appropriately designed input and output coupling capacitors. The microwave transmission spectra measured at temperatures of 20 mK are shown to be in good agreement with theoretical lumped element and distributed element transmission matrix models. In particular, the experimentally determined resonance frequencies, quality factors, and insertion losses are fully and consistently explained by the two models for all measured devices. The high level of control and flexibility in design renders these resonators ideal for storing and manipulating quantum electromagnetic fields in integrated superconducting electronic circuits.

arXiv:0807.4094•Journal of Applied Physics•Dec 1, 2008•370 citations

Microwave transmissions through superconducting coplanar waveguide resonators with different coupling configurations

Zhang Si-Lei, Li Hai-Jie, L. F. Wei +6 more

We design and fabricate two types of superconducting niobium coplanar waveguide microwave resonators with different coupling capacitors on high purity Si substrates. Their microwave transmissions are measured at the temperatures of 20 mK. It is found that these two types of resonators possess significantly-different loaded quality factors; one is $5.6\times{10}^{3}$, and the other is $4.0\times{10}^{4}$. The measured data are fitted well by classical ABCD matrix approach. We found that the transmission peak deviates from the standard Lorentizian with a frequency broadening.

arXiv:1304.2900•Apr 10, 2013•0 citations

SUPERCONDUCTING COPLANAR WAVEGUIDE RESONATOR AND ITSKINETIC INDUCTANCE ONTHE HIGH RESISTIVITY SILICON SUBSTRATE

Zhan Yu Kang

A Superconducting coplanar waveguide(SCPW) resonator on the high resistivity silicon substrate which works at the microwave frequency is presented.We introduce the design,fabrication,measurement and data analysis.SCPW resonators with the material of NbN and Nb are measured to be compared.Since theKinetic inductance has a great influence on the resonator,we fabricate SCPW resonators with different thickness.The experimental results are compared with the theoretical ones.

Diwen wuli xuebao•Jan 1, 2013•0 citations

Experiments to develop High Q and tunable superconducting coplanar resonators applicable for quantum bit technology

J E Healey

Measurements are made on superconducting Niobium on Sapphire and oxidized Silicon microwave coplanar resonators for quantum bit experiments. Device geometry and materials are investigated and quality factors in excess of a million have been observed. The resonant frequency as a function of temperature of a coplanar resonator is characterised in terms of the change in the number density of superconducting electrons. At lower temperatures, the resonant frequency no longer follows this function, and evidence is shown that this is associated with the resonant coupling of the resonant frequency with two level systems in the substrate. At T<2.2 K the resonant frequency scales logarithmically with the temperature, indicating that two level systems distributed in the volume of the Silicon Dioxide affect the electric permittivity. Applying higher input microwave power levels is shown to saturate these two level systems, essentially decoupling them from the CPR resonance. This is observed as an increase in resonant frequency and Q factor. The resonant frequency is also shown to have a high sensitivity to a magnetic field applied perpendicular to the plane of the coplanar resonator, with a quadratic dependence for the fundamental, second and third harmonics. Frequency shift of hundreds of linewidths are obtained. Coplanar resonator are fabricated and measured with current control lines built on chip, and these have shown to produce frequency shifts of tens of Kilohertz.

•Dec 16, 2010•1 citation
Nb based superconducting coplanar waveguide resonators on oxidized silicon wafer were fabricated and characterized at different temperatures. Crosstalk between two single resonators fabricated on the same chip was observed. When microwave signal is sent to the input of either resonator, output from both resonators show almost the same resonant frequency and similar quality factors.
High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Qi = 4,784 and Qc = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures.
The high critical magnetic field and relatively high critical temperature of niobium nitride (NbN) make it a promising material for applications in superconducting quantum technology. However, NbN-based superconducting circuits are sensitive to decoherence sources such as two-level system (TLS) defects. Here, we numerically and experimentally investigate NbN superconducting microwave coplanar waveguide resonator arrays with a 100 nm thickness, capacitively coupled to a common coplanar waveguide on a silicon chip. We observe that the resonators' internal quality factor (QiQ_{i}Qi​) decreases fromQi∼1.07×106Q_{i}\sim 1.07\times 10^{6}Qi​∼1.07×106in a high power regime toQi∼1.36×105Q_{i}\sim 1.36\times 10^{5}Qi​∼1.36×105in the single photon regime. Data from this study is consistent with the TLS theory, which describes the TLS interactions in resonator substrates and interfaces. Moreover, we study the temperature (TTT) dependence ofQiQ_{i}Qi​and resonance frequencyfrf_{r}fr​of coplanar waveguide resonators to characterize the quasiparticle density. We observe that the increase in kinetic inductance at higher temperatures is the main reason for the frequency shift. Finally, we measurefrf_{r}fr​andQiQ_{i}Qi​in response to in-plane magnetic fields (B∣∣B_{||}B∣∣​). We verify thatQiQ_{i}Qi​stays well above10410^{4}104up toB∣∣B_{||}B∣∣​= 240 mT in the photon number< ⁣nph ⁣>< \! n_{ph} \! ><nph​>= 1.8 atTTT= 100 mK. Our results could enable the development of robust microwave superconducting circuits for circuit quantum electrodynamics at high magnetic fields required for hybrid superconducting-semiconducting quantum circuits.
High quality on-chip microwave resonators have recently found prominent new applications in quantum optics and quantum information processing experiments with superconducting electronic circuits, a field now known as circuit quantum electrodynamics (QED). They are also used as single photon detectors and parametric amplifiers. Here we analyze the physical properties of coplanar waveguide resonators and their relation to the materials properties for use in circuit QED. We have designed and fabricated resonators with fundamental frequencies from 2 to 9 GHz and quality factors ranging from a few hundreds to a several hundred thousands controlled by appropriately designed input and output coupling capacitors. The microwave transmission spectra measured at temperatures of 20 mK are shown to be in good agreement with theoretical lumped element and distributed element transmission matrix models. In particular, the experimentally determined resonance frequencies, quality factors, and insertion losses are fully and consistently explained by the two models for all measured devices. The high level of control and flexibility in design renders these resonators ideal for storing and manipulating quantum electromagnetic fields in integrated superconducting electronic circuits.
We design and fabricate two types of superconducting niobium coplanar waveguide microwave resonators with different coupling capacitors on high purity Si substrates. Their microwave transmissions are measured at the temperatures of 20 mK. It is found that these two types of resonators possess significantly-different loaded quality factors; one is 5.6×1035.6\times{10}^{3}5.6×103, and the other is 4.0×1044.0\times{10}^{4}4.0×104. The measured data are fitted well by classical ABCD matrix approach. We found that the transmission peak deviates from the standard Lorentizian with a frequency broadening.
Measurements are made on superconducting Niobium on Sapphire and oxidized Silicon microwave coplanar resonators for quantum bit experiments. Device geometry and materials are investigated and quality factors in excess of a million have been observed. The resonant frequency as a function of temperature of a coplanar resonator is characterised in terms of the change in the number density of superconducting electrons. At lower temperatures, the resonant frequency no longer follows this function, and evidence is shown that this is associated with the resonant coupling of the resonant frequency with two level systems in the substrate. At T<2.2 K the resonant frequency scales logarithmically with the temperature, indicating that two level systems distributed in the volume of the Silicon Dioxide affect the electric permittivity. Applying higher input microwave power levels is shown to saturate these two level systems, essentially decoupling them from the CPR resonance. This is observed as an increase in resonant frequency and Q factor. The resonant frequency is also shown to have a high sensitivity to a magnetic field applied perpendicular to the plane of the coplanar resonator, with a quadratic dependence for the fundamental, second and third harmonics. Frequency shift of hundreds of linewidths are obtained. Coplanar resonator are fabricated and measured with current control lines built on chip, and these have shown to produce frequency shifts of tens of Kilohertz.