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Diwen wuli xuebao

SUPERCONDUCTING COPLANAR WAVEGUIDE RESONATOR AND ITSKINETIC INDUCTANCE ONTHE HIGH RESISTIVITY SILICON SUBSTRATE

Zhan Yu Kang

Published Jan 1, 2013• 0 citations
OpenAlex

Abstract

A Superconducting coplanar waveguide(SCPW) resonator on the high resistivity silicon substrate which works at the microwave frequency is presented.We introduce the design,fabrication,measurement and data analysis.SCPW resonators with the material of NbN and Nb are measured to be compared.Since theKinetic inductance has a great influence on the resonator,we fabricate SCPW resonators with different thickness.The experimental results are compared with the theoretical ones.

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Fabrication and Characterization of Superconductive Coplanar Waveguide Resonators : Fabrication and Characterization of Superconductive Coplanar Waveguide Resonators

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Chinese Physics Letters•Aug 1, 2013•2 citations
A Superconducting coplanar waveguide(SCPW) resonator on the high resistivity silicon substrate which works at the microwave frequency is presented.We introduce the design,fabrication,measurement and data analysis.SCPW resonators with the material of NbN and Nb are measured to be compared.Since theKinetic inductance has a great influence on the resonator,we fabricate SCPW resonators with different thickness.The experimental results are compared with the theoretical ones.
High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Qi = 4,784 and Qc = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures.
We successfully designed and fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is fabricated as a meandered quarter-wavelength transmission line (one end is short to the ground and another end is capacitively coupled to a through feedline). With a vector network analyzer we measured the transmissions of the applied microwave through the resonators at ultra-low temperature. The obtained loaded quality factors are significantly high, i.e. up to ∼10 6 . When the temperature increases slowly from the base temperature (20 mK), the resonance frequencies of the resonators are blue shifted and the quality factors are lowered slightly. In principle, this type of device can integrate a series of CPW resonators with a common feedline, making it a promising candidate as the data bus for coupling distant solid-state qubits and the sensitive detector of single photons.
Superconducting coplanar waveguide (SCPW) resonators have a wide range of applications due to the combination of their planar geometry and high quality factors relative to normal metals. However, their performance is sensitive to both the details of their geometry and the materials and processes that are used in their fabrication. In this paper, we study the dependence of SCPW resonator performance on materials and geometry as a function of temperature and excitation power. We measure quality factors greater than 2 × 106 at high excitation power and 6 × 105 at a power comparable to that generated by a single microwave photon circulating in the resonator. We examine the limits to the high excitation power performance of the resonators and find it to be consistent with a model of radiation loss. We further observe that while in all cases the quality factors are degraded as the temperature and power are reduced due to dielectric loss, the size of this effect is dependent on resonator materials and geometry. Finally, we demonstrate that the dielectric loss can be controlled in principle using a separate excitation near the resonance frequencies of the resonator.
The objective of this thesis is to evaluate a generic process for fabrication and characterization of the Superconductive coplanar waveguide (CPW) resonators. Superconductive CPW resonators with various lengths and shapes are designed to investigate their electrical and magnetic properties as well as resonance properties and sensitivities. In the first part of thesis, two different models are introduced in order to estimate the nonlinear kinetic inductance of a superconducting CPW resonator. The first model is based on Bean critical-state model and the second one is based on current dependence of London penetration depth. The existence of a shift in resonant frequency of Superconductive CPW resonator caused by a non-linear kinetic inductance is also shown experimentally. Simulations were carried out to estimate the nonlinear kinetic inductance due to the self- induced magnetic field penetration. The rest of the thesis is concerned with development of very smooth Aluminum (Al) thin films with RMS (Root Mean Square) roughness 1~nm and CAD (Computer Aid Design) of superconductive CPW resonators. Experimental investigation of a generic fabrication technique for superconductive CPW resonator is carried out. Many resonators are fabricated with different design parameters, such as centerline or gap width, film thickness and gap capacitors length. The fabrication process is described in detail. Electron Beam Lithography is used to fabricate Nb and Al CPW resonators which are coupled to outer conductors via gap capacitors. We have fabricated GHz frequency CPW resonators with quality factors, Q up 5X10^5.
We design and fabricate two types of superconducting niobium coplanar waveguide microwave resonators with different coupling capacitors on high purity Si substrates. Their microwave transmissions are measured at the temperatures of 20 mK. It is found that these two types of resonators possess significantly-different loaded quality factors; one is 5.6×1035.6\times{10}^{3}5.6×103, and the other is 4.0×1044.0\times{10}^{4}4.0×104. The measured data are fitted well by classical ABCD matrix approach. We found that the transmission peak deviates from the standard Lorentizian with a frequency broadening.
We design and fabricate two types of superconducting niobium coplanar waveguide microwave resonators with different coupling capacitors on high purity Si substrates. Their microwave transmissions are measured at 20 mK. It is found that these two types of resonators possess significantly different loaded quality factors; one is 5.6 × 10 3 and the other is 4.0 × 10 4 . The measured data are fitted well by classical ABCD matrix approach and consequently the coupling capacitances are determined. It is found that the transmission peak deviates from the standard Lorentizian with a frequency broadening.