Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Fabrication and characterization of superconducting coplanar waveguide resonators

Bongkeon Kim, Minkyung Jung, Jihwan Kim, Junho Suh, Yong‐Joo Doh

Published Dec 1, 2020• 1 citation
OpenAlex

Abstract

High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Qi = 4,784 and Qc = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures.

Related papers

Development of high quality superconducting resonators for quantum device applications

Dong-Gwang Ha, Seon Hoo Kim, So-Yeon Jun +5 more

We report our development on design, fabrication and characterization of various superconducting resonators for quantum device applications. The resonators are developed mainly for superconducting qubit implementation in circuit QED structure, but future application will include photon detectors such as microwave kinetic inductance detectors. First we designed and fabricated half-wavelength coplanar waveguide resonators with niobium thin film on a high resistive silicon wafer, with the fundamental frequencies in the range of 1 to 8 GHz. The loaded quality factors are controlled by the coupling capacitors, and the lower bound of the intrinsic quality factor was measured down to 7 mK in the dilution refrigerator. We have also designed quarter-wavelength resonators and lumped LC resonators coupled to a transmission line, and characterized multiple resonators in a single transmission line. For the 3D transmon qubit application, we designed and fabricated a rectangular box resonator with superconducting aluminum. The intrinsic quality factor of the box resonator exceeds three million at 7 mK. We will also present basic results on the integration of a transmon qubit in the superconducting resonator.

IEEE International Superconductive Electronics Conference (ISEC)•Jul 1, 2013•0 citations

Experimental demonstrations of high-Q superconducting coplanar waveguide resonators

HaiJie Li, YiWen Wang, LianFu Wei +6 more

We successfully designed and fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is fabricated as a meandered quarter-wavelength transmission line (one end is short to the ground and another end is capacitively coupled to a through feedline). With a vector network analyzer we measured the transmissions of the applied microwave through the resonators at ultra-low temperature. The obtained loaded quality factors are significantly high, i.e. up to ∼10 6 . When the temperature increases slowly from the base temperature (20 mK), the resonance frequencies of the resonators are blue shifted and the quality factors are lowered slightly. In principle, this type of device can integrate a series of CPW resonators with a common feedline, making it a promising candidate as the data bus for coupling distant solid-state qubits and the sensitive detector of single photons.

arXiv:1304.3254•Chinese Science Bulletin•Jul 1, 2013•29 citations

Two-level system loss characterization of NbTi superconducting resonators on Si/SiO2 substrates

Bongkeon Kim, Yong‐Joo Doh

Superconducting coplanar waveguide (SCPW) resonators, key components for quantum computing and sensing applications, require a high internal quality factor ( Q i ) for effective qubit readout and quantum sensing applications. Minimizing two-level system (TLS) losses, particularly at material interfaces, is critical for gatemon and topological qubits operating at low temperatures and in high magnetic fields. NbTi, a superconducting alloy with a high upper critical field, enables SCPW resonators resilient to such conditions. We fabricated NbTi SCPW resonators on Si/SiO 2 substrates and systematically characterized their TLS-limited quality factors as functions of temperature and microwave photon number. Our results demonstrate that NbTi-based SCPWs on Si/SiO 2 substrates provide a promising platform for developing next-generation quantum circuits. • Successfully fabricated NbTi SCPW resonators on Si/SiO 2 substrates. • Characterized NbTi SCPW across temperature and photon ranges for quantum apps. • Achieved record TLS-limited quality factor Q TLS,0 = 9.21 × 10 4 for SCPW on Si/SiO 2 . • NbTi SCPW on Si/SiO 2 is promising for gatemon and topological qubits.

arXiv:2509.01447•Current Applied Physics•Oct 18, 2025•1 citation

Fabrication and Characterization of Superconductive Coplanar Waveguide Resonators : Fabrication and Characterization of Superconductive Coplanar Waveguide Resonators

Adem Ergül

The objective of this thesis is to evaluate a generic process for fabrication and characterization of the Superconductive coplanar waveguide (CPW) resonators. Superconductive CPW resonators with various lengths and shapes are designed to investigate their electrical and magnetic properties as well as resonance properties and sensitivities. In the first part of thesis, two different models are introduced in order to estimate the nonlinear kinetic inductance of a superconducting CPW resonator. The first model is based on Bean critical-state model and the second one is based on current dependence of London penetration depth. The existence of a shift in resonant frequency of Superconductive CPW resonator caused by a non-linear kinetic inductance is also shown experimentally. Simulations were carried out to estimate the nonlinear kinetic inductance due to the self- induced magnetic field penetration. The rest of the thesis is concerned with development of very smooth Aluminum (Al) thin films with RMS (Root Mean Square) roughness 1~nm and CAD (Computer Aid Design) of superconductive CPW resonators. Experimental investigation of a generic fabrication technique for superconductive CPW resonator is carried out. Many resonators are fabricated with different design parameters, such as centerline or gap width, film thickness and gap capacitors length. The fabrication process is described in detail. Electron Beam Lithography is used to fabricate Nb and Al CPW resonators which are coupled to outer conductors via gap capacitors. We have fabricated GHz frequency CPW resonators with quality factors, Q up 5X10^5.

•Jan 1, 2009•0 citations

Temperature and power characteristics of quarter-wavelength superconducting coplanar waveguide resonator

Huilong Yu, Lingxiao Jing, Tao Hua +1 more

Abstract A quarter wavelength superconducting aluminum film coplanar waveguide resonator with a high-quality factor was designed and fabricated. Furthermore, its resonant frequency and quality as a function of temperatures and exciting powers were investigated. The experimental results showed that the resonance frequency decreases about 1% with the increase of temperature from 50 mk to 1 K, and the load quality factor of the resonator also decreases. The resonant frequency decreases with power from − 120 to − 70 dBm. The quality factor increases with increased excitation power due to the loss decreases and nonlinearity. The results are consistent with the theoretical analysis of the surface impedance model.

SN Applied Sciences•Feb 2, 2022•2 citations

Study of loss in superconducting coplanar waveguide resonators

Jeremy Sage, Vladimir Bolkhovsky, William D. Oliver +2 more

Superconducting coplanar waveguide (SCPW) resonators have a wide range of applications due to the combination of their planar geometry and high quality factors relative to normal metals. However, their performance is sensitive to both the details of their geometry and the materials and processes that are used in their fabrication. In this paper, we study the dependence of SCPW resonator performance on materials and geometry as a function of temperature and excitation power. We measure quality factors greater than 2 × 106 at high excitation power and 6 × 105 at a power comparable to that generated by a single microwave photon circulating in the resonator. We examine the limits to the high excitation power performance of the resonators and find it to be consistent with a model of radiation loss. We further observe that while in all cases the quality factors are degraded as the temperature and power are reduced due to dielectric loss, the size of this effect is dependent on resonator materials and geometry. Finally, we demonstrate that the dielectric loss can be controlled in principle using a separate excitation near the resonance frequencies of the resonator.

arXiv:1010.6063•Journal of Applied Physics•Mar 15, 2011•213 citations
High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Qi = 4,784 and Qc = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures.
We report our development on design, fabrication and characterization of various superconducting resonators for quantum device applications. The resonators are developed mainly for superconducting qubit implementation in circuit QED structure, but future application will include photon detectors such as microwave kinetic inductance detectors. First we designed and fabricated half-wavelength coplanar waveguide resonators with niobium thin film on a high resistive silicon wafer, with the fundamental frequencies in the range of 1 to 8 GHz. The loaded quality factors are controlled by the coupling capacitors, and the lower bound of the intrinsic quality factor was measured down to 7 mK in the dilution refrigerator. We have also designed quarter-wavelength resonators and lumped LC resonators coupled to a transmission line, and characterized multiple resonators in a single transmission line. For the 3D transmon qubit application, we designed and fabricated a rectangular box resonator with superconducting aluminum. The intrinsic quality factor of the box resonator exceeds three million at 7 mK. We will also present basic results on the integration of a transmon qubit in the superconducting resonator.
We successfully designed and fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is fabricated as a meandered quarter-wavelength transmission line (one end is short to the ground and another end is capacitively coupled to a through feedline). With a vector network analyzer we measured the transmissions of the applied microwave through the resonators at ultra-low temperature. The obtained loaded quality factors are significantly high, i.e. up to ∼10 6 . When the temperature increases slowly from the base temperature (20 mK), the resonance frequencies of the resonators are blue shifted and the quality factors are lowered slightly. In principle, this type of device can integrate a series of CPW resonators with a common feedline, making it a promising candidate as the data bus for coupling distant solid-state qubits and the sensitive detector of single photons.
Superconducting coplanar waveguide (SCPW) resonators, key components for quantum computing and sensing applications, require a high internal quality factor ( Q i ) for effective qubit readout and quantum sensing applications. Minimizing two-level system (TLS) losses, particularly at material interfaces, is critical for gatemon and topological qubits operating at low temperatures and in high magnetic fields. NbTi, a superconducting alloy with a high upper critical field, enables SCPW resonators resilient to such conditions. We fabricated NbTi SCPW resonators on Si/SiO 2 substrates and systematically characterized their TLS-limited quality factors as functions of temperature and microwave photon number. Our results demonstrate that NbTi-based SCPWs on Si/SiO 2 substrates provide a promising platform for developing next-generation quantum circuits. • Successfully fabricated NbTi SCPW resonators on Si/SiO 2 substrates. • Characterized NbTi SCPW across temperature and photon ranges for quantum apps. • Achieved record TLS-limited quality factor Q TLS,0 = 9.21 × 10 4 for SCPW on Si/SiO 2 . • NbTi SCPW on Si/SiO 2 is promising for gatemon and topological qubits.
The objective of this thesis is to evaluate a generic process for fabrication and characterization of the Superconductive coplanar waveguide (CPW) resonators. Superconductive CPW resonators with various lengths and shapes are designed to investigate their electrical and magnetic properties as well as resonance properties and sensitivities. In the first part of thesis, two different models are introduced in order to estimate the nonlinear kinetic inductance of a superconducting CPW resonator. The first model is based on Bean critical-state model and the second one is based on current dependence of London penetration depth. The existence of a shift in resonant frequency of Superconductive CPW resonator caused by a non-linear kinetic inductance is also shown experimentally. Simulations were carried out to estimate the nonlinear kinetic inductance due to the self- induced magnetic field penetration. The rest of the thesis is concerned with development of very smooth Aluminum (Al) thin films with RMS (Root Mean Square) roughness 1~nm and CAD (Computer Aid Design) of superconductive CPW resonators. Experimental investigation of a generic fabrication technique for superconductive CPW resonator is carried out. Many resonators are fabricated with different design parameters, such as centerline or gap width, film thickness and gap capacitors length. The fabrication process is described in detail. Electron Beam Lithography is used to fabricate Nb and Al CPW resonators which are coupled to outer conductors via gap capacitors. We have fabricated GHz frequency CPW resonators with quality factors, Q up 5X10^5.
Abstract A quarter wavelength superconducting aluminum film coplanar waveguide resonator with a high-quality factor was designed and fabricated. Furthermore, its resonant frequency and quality as a function of temperatures and exciting powers were investigated. The experimental results showed that the resonance frequency decreases about 1% with the increase of temperature from 50 mk to 1 K, and the load quality factor of the resonator also decreases. The resonant frequency decreases with power from − 120 to − 70 dBm. The quality factor increases with increased excitation power due to the loss decreases and nonlinearity. The results are consistent with the theoretical analysis of the surface impedance model.
Superconducting coplanar waveguide (SCPW) resonators have a wide range of applications due to the combination of their planar geometry and high quality factors relative to normal metals. However, their performance is sensitive to both the details of their geometry and the materials and processes that are used in their fabrication. In this paper, we study the dependence of SCPW resonator performance on materials and geometry as a function of temperature and excitation power. We measure quality factors greater than 2 × 106 at high excitation power and 6 × 105 at a power comparable to that generated by a single microwave photon circulating in the resonator. We examine the limits to the high excitation power performance of the resonators and find it to be consistent with a model of radiation loss. We further observe that while in all cases the quality factors are degraded as the temperature and power are reduced due to dielectric loss, the size of this effect is dependent on resonator materials and geometry. Finally, we demonstrate that the dielectric loss can be controlled in principle using a separate excitation near the resonance frequencies of the resonator.