High quality on-chip microwave resonators have recently found prominent new applications in quantum optics and quantum information processing experiments with superconducting electronic circuits, a field now known as circuit quantum electrodynamics (QED). They are also used as single photon detectors and parametric amplifiers. Here we analyze the physical properties of coplanar waveguide resonators and their relation to the materials properties for use in circuit QED. We have designed and fabricated resonators with fundamental frequencies from 2 to 9 GHz and quality factors ranging from a few hundreds to a several hundred thousands controlled by appropriately designed input and output coupling capacitors. The microwave transmission spectra measured at temperatures of 20 mK are shown to be in good agreement with theoretical lumped element and distributed element transmission matrix models. In particular, the experimentally determined resonance frequencies, quality factors, and insertion losses are fully and consistently explained by the two models for all measured devices. The high level of control and flexibility in design renders these resonators ideal for storing and manipulating quantum electromagnetic fields in integrated superconducting electronic circuits.
High quality on-chip microwave resonators have recently found prominent new applications in quantum optics and quantum information processing experiments with superconducting electronic circuits, a field now known as circuit quantum electrodynamics (QED). They are also used as single photon detectors and parametric amplifiers. Here we analyze the physical properties of coplanar waveguide resonators and their relation to the materials properties for use in circuit QED. We have designed and fabricated resonators with fundamental frequencies from 2 to 9 GHz and quality factors ranging from a few hundreds to a several hundred thousands controlled by appropriately designed input and output coupling capacitors. The microwave transmission spectra measured at temperatures of 20 mK are shown to be in good agreement with theoretical lumped element and distributed element transmission matrix models. In particular, the experimentally determined resonance frequencies, quality factors, and insertion losses are fully and consistently explained by the two models for all measured devices. The high level of control and flexibility in design renders these resonators ideal for storing and manipulating quantum electromagnetic fields in integrated superconducting electronic circuits.
We report our development on design, fabrication and characterization of various superconducting resonators for quantum device applications. The resonators are developed mainly for superconducting qubit implementation in circuit QED structure, but future application will include photon detectors such as microwave kinetic inductance detectors. First we designed and fabricated half-wavelength coplanar waveguide resonators with niobium thin film on a high resistive silicon wafer, with the fundamental frequencies in the range of 1 to 8 GHz. The loaded quality factors are controlled by the coupling capacitors, and the lower bound of the intrinsic quality factor was measured down to 7 mK in the dilution refrigerator. We have also designed quarter-wavelength resonators and lumped LC resonators coupled to a transmission line, and characterized multiple resonators in a single transmission line. For the 3D transmon qubit application, we designed and fabricated a rectangular box resonator with superconducting aluminum. The intrinsic quality factor of the box resonator exceeds three million at 7 mK. We will also present basic results on the integration of a transmon qubit in the superconducting resonator.
In this paper, we present a novel design of a compact, double-fold half-wave superconducting coplanar waveguide resonator, specifically optimized for quantum readout. The geometry offers advantages in terms of scalability and allows for a more compact integration of qubits per unit area. The superconducting resonators are designed to operate within a fundamental frequency range of 1.9 GHz$-1.95GHz,utilizingbothgapandfingercouplingschemes.Thedevicesarefabricatedusingthinaluminumfilmsdepositedonhigh−resistivitysapphiresubstrates.Theproposedresonatorsexhibitqualityfactor(Q_{L})of2.9× 10^{5}$and 1.58 ×103for gap coupled and finger coupled, respectively, during experimental measurements. The simulated QLof single-folded meander line resonators are found to be 4.65 ×105and 258.42, for gap coupled and finger coupled, respectively, for comparison purpose at similar operating frequency. A comprehensive analysis of the microwave transmission spectra was conducted at cryogenic temperatures near 10 mK, across very high input drive powers ($-30dBmto-10dBm).Experimentalresultsshowagoodagreementwithsimulationsandtheequivalentlumpedcircuitmodel.Notably,theproposeddesignreducesthephysicalfootprintoftheresonatordevicesupto28.2\%comparedtoconventionalsingle−foldmeanderedstructures.TheresonatorsdemonstratestrongpotentialforintegratingqubitswithreadoutandcontrolbusesinquantuminformationprocessingwhichrequireaQ_{L}$between104−105. They also being well-suited for cryogenic detector applications that utilize microwave kinetic inductance detector (MKID) arrays in frequency multiplexing for different coupling schemes.
The high critical magnetic field and relatively high critical temperature of niobium nitride (NbN) make it a promising material for applications in superconducting quantum technology. However, NbN-based superconducting circuits are sensitive to decoherence sources such as two-level system (TLS) defects. Here, we numerically and experimentally investigate NbN superconducting microwave coplanar waveguide resonator arrays with a 100 nm thickness, capacitively coupled to a common coplanar waveguide on a silicon chip. We observe that the resonators' internal quality factor (Qi) decreases fromQi∼1.07×106in a high power regime toQi∼1.36×105in the single photon regime. Data from this study is consistent with the TLS theory, which describes the TLS interactions in resonator substrates and interfaces. Moreover, we study the temperature (T) dependence ofQiand resonance frequencyfrof coplanar waveguide resonators to characterize the quasiparticle density. We observe that the increase in kinetic inductance at higher temperatures is the main reason for the frequency shift. Finally, we measurefrandQiin response to in-plane magnetic fields (B∣∣). We verify thatQistays well above104up toB∣∣= 240 mT in the photon number<nph>= 1.8 atT= 100 mK. Our results could enable the development of robust microwave superconducting circuits for circuit quantum electrodynamics at high magnetic fields required for hybrid superconducting-semiconducting quantum circuits.
The high critical magnetic field and relatively high critical temperature of niobium nitride (NbN) make it a promising material candidate for applications in superconducting quantum technology. However, NbN-based devices and circuits are sensitive to decoherence sources such as two-level system (TLS) defects. Here, we numerically and experimentally investigate NbN superconducting microwave coplanar waveguide resonator arrays, with a 100 nm thickness, capacitively coupled to a common coplanar waveguide on a silicon chip. We observe that the resonators' internal quality factor (Qi) decreases from Qi ~ 1.07*10^6 in a high power regime (< nph > = 27000) to Qi ~ 1.36 *10^5 in single photon regime at temperature T = 100 mK. Data from this study is consistent with the TLS theory, which describes the TLS interactions in resonator substrates and interfaces. Moreover, we study the temperature dependence internal quality factor and frequency tuning of the coplanar waveguide resonators to characterise the quasiparticle density of NbN. We observe that the increase in kinetic inductance at higher temperatures is the main reason for the frequency shift. Finally, we measure the resonators' resonance frequency and internal quality factor at single photon regime in response to in-plane magnetic fields B||. We verify that Qi stays well above 10^4 up to B|| = 240 mT in the photon number < nph > = 1.8 at T = 100 mK. Our results may pave the way for realising robust microwave superconducting circuits for circuit quantum electrodynamics (cQED) at high magnetic fields necessary for fault-tolerant quantum computing, and ultrasensitive quantum sensing.
We successfully designed and fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is fabricated as a meandered quarter-wavelength transmission line (one end is short to the ground and another end is capacitively coupled to a through feedline). With a vector network analyzer we measured the transmissions of the applied microwave through the resonators at ultra-low temperature. The obtained loaded quality factors are significantly high, i.e. up to ∼10 6 . When the temperature increases slowly from the base temperature (20 mK), the resonance frequencies of the resonators are blue shifted and the quality factors are lowered slightly. In principle, this type of device can integrate a series of CPW resonators with a common feedline, making it a promising candidate as the data bus for coupling distant solid-state qubits and the sensitive detector of single photons.
Superconducting resonators are powerful tools widely used in circuit Quantum Electrodynamics [1]. High-quality factors, tunability, and several implemented layouts make them ideal circuital elements for various applications from quantum metrology [2], to quantum computation [3] and quantum information [4]. Here, we report on the simulation and design of superconducting Coplanar Waveguide (CPW) resonators whose resonance frequencies are in the range of 4–8 GHz. Typical properties of superconducting resonators employed in standard transmon qubits can be achieved by designing a λ/4 resonator made by Niobium (Nb) and modeling the capacitive coupling to provide a high-quality factor useful for its future employments in more advanced quantum circuits [5]. Nb gives the advantage of better stability of the superconducting properties of the material against the application of a magnetic field, compared those achievable by Aluminum (Al), thus guaranteeing an additional degree of freedom in the implementation of complex quantum architectures [5]–[7].