Two-photon diffraction and quantum lithography

Beyond diffraction limit in optical lithography via quantum entanglement

Quantum interferometric lithography: exploiting entanglement to beat the diffraction limit

Aerial image formation of quantum lithography for diffraction limit

Aerial image formation of quantum lithography for diffraction limit

Double electromagnetically induced transparency medium for quantum lithography beyond diffraction limit

Nonclassical, two-photon interferometry and lithography with high-gain optical parametric amplifiers