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Design, simulation, fabrication and measurement of a superconducting microwave resonator allowing the application of a DC bias through a symmetry point

P. M. L. Gimbel

Published Jan 1, 2020• 0 citations
OpenAlex

Abstract

Superconducting microwave resonators based on coplanar waveguides (CPWs), which allow for on-chip implementation, have a wide variety of uses, from the coupling of qubits to the detection of photons from interstellar clouds. With the integration of a bias circuitry, the already versatile resonator will become even more so. However, applying a DC voltage or current bias to the resonator without significantly degrading its quality factor Q is no trivial task. One of the first superconducting microwave resonators with the ability to allow for the application of a DC bias, made use of symmetry points. In order to not rely on those symmetry points, our group came up with a different design that used a shunted capacitor instead. However, this design needs a more extensive and in particular more complicated fabrication process. As the groups focus is now completely away from the original design, we go back in this thesis, to honestly evaluate such a resonator by applying a bias to its center. We present a design with the cavity length l to be a full wavelength (l = λ) terminated on both ends to ground, fed in by a capacitively coupled AC-feedline at λ/4 and a DC-bias line at its center (λ/2). After the first fabrication trial we were unable to successfully judge the performance of the microwave resonator as it suffered from bad internal loss, leading to a low internal Q ~ 300 at 4 K. The only thing that this showed us, is that its design is perhaps not as straightforward. On the other hand, interesting results specific to the design were obtained from QUCS simulations (using a combination of lumped and distributed elements). These simulations showed that the quality of the resonator is highly sensitive to the position of its galvanically connected bias line, with respect to the center of the cavity (voltage node). Where Qint drops down to 10 % of its maximum for < 0.1 mm (= l/320) away from the center. Furthermore, we saw that asymmetry in the ports causes the maximum Qint (voltage node) to be off-center by 9 μm, and that adding an extra feedline in symmetry to the existing one puts it back on-center. Demonstrating the voltage node susceptibility to asymmetries of the cavity mode. Despite the unpromising signs the results show, suggestions have been put forward about better isolation of the bias line that have the potential to still make the design attractive. While these isolations still baring the traits of a faster and less complex fabrication.

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Superconducting microwave resonators based on coplanar waveguides (CPWs), which allow for on-chip implementation, have a wide variety of uses, from the coupling of qubits to the detection of photons from interstellar clouds. With the integration of a bias circuitry, the already versatile resonator will become even more so. However, applying a DC voltage or current bias to the resonator without significantly degrading its quality factor Q is no trivial task. One of the first superconducting microwave resonators with the ability to allow for the application of a DC bias, made use of symmetry points. In order to not rely on those symmetry points, our group came up with a different design that used a shunted capacitor instead. However, this design needs a more extensive and in particular more complicated fabrication process. As the groups focus is now completely away from the original design, we go back in this thesis, to honestly evaluate such a resonator by applying a bias to its center. We present a design with the cavity length l to be a full wavelength (l = λ) terminated on both ends to ground, fed in by a capacitively coupled AC-feedline at λ/4 and a DC-bias line at its center (λ/2). After the first fabrication trial we were unable to successfully judge the performance of the microwave resonator as it suffered from bad internal loss, leading to a low internal Q ~ 300 at 4 K. The only thing that this showed us, is that its design is perhaps not as straightforward. On the other hand, interesting results specific to the design were obtained from QUCS simulations (using a combination of lumped and distributed elements). These simulations showed that the quality of the resonator is highly sensitive to the position of its galvanically connected bias line, with respect to the center of the cavity (voltage node). Where Qint drops down to 10 % of its maximum for < 0.1 mm (= l/320) away from the center. Furthermore, we saw that asymmetry in the ports causes the maximum Qint (voltage node) to be off-center by 9 μm, and that adding an extra feedline in symmetry to the existing one puts it back on-center. Demonstrating the voltage node susceptibility to asymmetries of the cavity mode. Despite the unpromising signs the results show, suggestions have been put forward about better isolation of the bias line that have the potential to still make the design attractive. While these isolations still baring the traits of a faster and less complex fabrication.
In many hybrid quantum systems, a superconducting circuit is required, which combines DC-control with a coplanar waveguide (CPW) microwave resonator. The strategy thus far for applying a DC voltage or current bias to microwave resonators has been to apply the bias through a symmetry point in such a way that it appears as an open circuit for certain frequencies. Here, we introduce a microwave coupler for superconducting CPW cavities in the form of a large shunt capacitance to ground. Such a coupler acts as a broadband mirror for microwaves while providing galvanic connection to the center conductor of the resonator. We demonstrate this approach with a two-port λ/4-transmission resonator with linewidths in the MHz regime (Q∼103) that shows no spurious resonances and apply a voltage bias up to 80 V without affecting the quality factor of the resonator. This resonator coupling architecture, which is simple to engineer, fabricate, and analyse, could have many potential applications in experiments involving superconducting hybrid circuits.
We successfully designed and fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is fabricated as a meandered quarter-wavelength transmission line (one end is short to the ground and another end is capacitively coupled to a through feedline). With a vector network analyzer we measured the transmissions of the applied microwave through the resonators at ultra-low temperature. The obtained loaded quality factors are significantly high, i.e. up to ∼10 6 . When the temperature increases slowly from the base temperature (20 mK), the resonance frequencies of the resonators are blue shifted and the quality factors are lowered slightly. In principle, this type of device can integrate a series of CPW resonators with a common feedline, making it a promising candidate as the data bus for coupling distant solid-state qubits and the sensitive detector of single photons.
We present the design of a reflective stop-band filter based on quasi-lumped elements that can be utilized to introduce large dc and low-frequency voltage biases into a low-loss superconducting coplanar waveguide (CPW) cavity. Transmission measurements of the filter are seen to be in good agreement with simulations and demonstrate insertion losses greater than 20 dB20\,{\rm dB}20dB in the range of 3 to 10 GHz{\rm 3\,to\,10\,GHz}3to10GHz. Moreover, transmission measurements of the CPW's fundamental mode demonstrate that loaded quality factors exceeding 10510^5105 can be achieved with this design for dc voltages as large as 20 V{\rm 20\,V}20V and for the cavity operated in the single-photon regime. This makes the design suitable for use in a number of applications including qubit-coupled mechanical systems and circuit QED.
The objective of this thesis is to evaluate a generic process for fabrication and characterization of the Superconductive coplanar waveguide (CPW) resonators. Superconductive CPW resonators with various lengths and shapes are designed to investigate their electrical and magnetic properties as well as resonance properties and sensitivities. In the first part of thesis, two different models are introduced in order to estimate the nonlinear kinetic inductance of a superconducting CPW resonator. The first model is based on Bean criticalstate model and the second one is based on current dependence of London penetration depth, λL(I). The existence of a shift in resonant frequency, f0, of Superconductive CPW resonator caused by a non-linear kinetic inductance is also shown experimentally. Simulations were carried out to estimate the nonlinear kinetic inductance due to the selfinduced magnetic field penetration. The rest of the thesis is concerned with development of very smooth Aluminum (Al) thin films with RMS (Root Mean Square) roughness ∼ 1 nm and CAD (Computer Aid Design) of superconductive CPW resonators. Experimental investigation of a generic fabrication technique for superconductive CPW resonator is carried out. Many resonators are fabricated with different design parameters, such as centerline or gap width, film thickness and gap capacitors length. The fabrication process is described in detail. Electron Beam Lithography is used to fabricate Nb and Al CPW resonators which are coupled to outer conductors via gap capacitors. We have fabricated GHz frequency CPW resonators with quality factors, Q up to 5× 10.
We report a technique for applying a dc voltage or current bias to the center conductor of a high-quality factor superconducting microwave cavity without significantly disturbing selected cavity modes. This is accomplished by incorporating dc bias lines into the cavity at specific locations. The measured S-matrix parameters of the system are in good agreement with theoretical predictions and simulations. We find that at 4 K the quality factor of the cavity degrades by less than 1% under the application of a dc bias.