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Fabrication and Characterization of Superconductive Coplanar Waveguide Resonators

Adem Ergül

Published Jan 1, 2009• 0 citations
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Abstract

The objective of this thesis is to evaluate a generic process for fabrication and characterization of the Superconductive coplanar waveguide (CPW) resonators. Superconductive CPW resonators with various lengths and shapes are designed to investigate their electrical and magnetic properties as well as resonance properties and sensitivities. In the first part of thesis, two different models are introduced in order to estimate the nonlinear kinetic inductance of a superconducting CPW resonator. The first model is based on Bean criticalstate model and the second one is based on current dependence of London penetration depth, λL(I). The existence of a shift in resonant frequency, f0, of Superconductive CPW resonator caused by a non-linear kinetic inductance is also shown experimentally. Simulations were carried out to estimate the nonlinear kinetic inductance due to the selfinduced magnetic field penetration. The rest of the thesis is concerned with development of very smooth Aluminum (Al) thin films with RMS (Root Mean Square) roughness ∼ 1 nm and CAD (Computer Aid Design) of superconductive CPW resonators. Experimental investigation of a generic fabrication technique for superconductive CPW resonator is carried out. Many resonators are fabricated with different design parameters, such as centerline or gap width, film thickness and gap capacitors length. The fabrication process is described in detail. Electron Beam Lithography is used to fabricate Nb and Al CPW resonators which are coupled to outer conductors via gap capacitors. We have fabricated GHz frequency CPW resonators with quality factors, Q up to 5× 10.

Related papers

Fabrication and Characterization of Superconductive Coplanar Waveguide Resonators : Fabrication and Characterization of Superconductive Coplanar Waveguide Resonators

Adem Ergül

The objective of this thesis is to evaluate a generic process for fabrication and characterization of the Superconductive coplanar waveguide (CPW) resonators. Superconductive CPW resonators with various lengths and shapes are designed to investigate their electrical and magnetic properties as well as resonance properties and sensitivities. In the first part of thesis, two different models are introduced in order to estimate the nonlinear kinetic inductance of a superconducting CPW resonator. The first model is based on Bean critical-state model and the second one is based on current dependence of London penetration depth. The existence of a shift in resonant frequency of Superconductive CPW resonator caused by a non-linear kinetic inductance is also shown experimentally. Simulations were carried out to estimate the nonlinear kinetic inductance due to the self- induced magnetic field penetration. The rest of the thesis is concerned with development of very smooth Aluminum (Al) thin films with RMS (Root Mean Square) roughness 1~nm and CAD (Computer Aid Design) of superconductive CPW resonators. Experimental investigation of a generic fabrication technique for superconductive CPW resonator is carried out. Many resonators are fabricated with different design parameters, such as centerline or gap width, film thickness and gap capacitors length. The fabrication process is described in detail. Electron Beam Lithography is used to fabricate Nb and Al CPW resonators which are coupled to outer conductors via gap capacitors. We have fabricated GHz frequency CPW resonators with quality factors, Q up 5X10^5.

•Jan 1, 2009•0 citations

Nonlinear dynamics of Josephson Junction Chains and Superconducting Resonators

Adem Ergül

This thesis presents the results of the experimental studies on two kindof Superconducting circuits: one-dimensional Josephson junction chains andsuperconducting coplanar waveguide (CPW) resonators. One-dimensionalJosephson junction chains are constructed by connecting many Superconducting quantum interference devices (SQUIDs) in series. We have studied DC transport properties of the SQUID chains and model their nonlineardynamics with Thermally Activated Phase-Slips (TAPS). Experimental andsimulated results showed qualitative agreement revealing the existence of auniform phase-slipping and phase-sticking process which results in a voltage-independent current on the dissipative branch of the current-voltage char-acteristics (IVC). By modulating the effective Josephson coupling energy ofthe SQUIDs (EJ ) with an external magnetic field, we found that the ratio EJ /EC is a decisive factor in determining the qualitative shape of theIVC. A quantum phase transition between incoherent Quantum Phase Slip, QPS (supercurrent branch with a finite slope) to coherent QPS (IVC withwell-developed Coulomb blockade) via an intermediate state (supercurrentbranch with a remnant of Coulomb blockade) is observed as the EJ /EC ratio is tuned. This transition from incoherent QPS to the intermediate-statehappens around R0 ∼ RQ (RQ = h/4e^2 = 6.45kΩ). We also fabricated structured chains where a SQUID at the middle of the chain (central SQUID) has different junction size and loop area compared to other SQUIDs in the chain. Results showed that with these structured chains it is possible to localize andtune the amplitude of both TAPS and QPS at the central SQUID. The second part of the thesis describes the fabrication process and themeasurement results of superconducting CPW resonators. Resonators withdifferent design parameters were fabricated and measured. The transmissionspectra showed quality factors up to, Q ∼ 5 × 10^5 . We have observed bendingof the resonance curves to the lower frequencies due to existence of a nonlinear kinetic inductance. The origin of the nonlinear kinetic inductance isthe nonlinear relation between supercurrent density, Js, and superfluid veloc-ity, vs , of the charge carriers on the center line of the resonators. A simplemodel based on the Ginzburg-Landau theory is used in order to explain ob-served nonlinear kinetic inductance and estimates using this model showedgood agreement with the experimental results.

•Jan 1, 2013•3 citations

Experimental demonstrations of high-Q superconducting coplanar waveguide resonators

HaiJie Li, YiWen Wang, LianFu Wei +6 more

We successfully designed and fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is fabricated as a meandered quarter-wavelength transmission line (one end is short to the ground and another end is capacitively coupled to a through feedline). With a vector network analyzer we measured the transmissions of the applied microwave through the resonators at ultra-low temperature. The obtained loaded quality factors are significantly high, i.e. up to ∼10 6 . When the temperature increases slowly from the base temperature (20 mK), the resonance frequencies of the resonators are blue shifted and the quality factors are lowered slightly. In principle, this type of device can integrate a series of CPW resonators with a common feedline, making it a promising candidate as the data bus for coupling distant solid-state qubits and the sensitive detector of single photons.

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We present a specific method for fabrication of the original evaporation mask and characterisation of the superconduct- ing coplanar waveguide (CPW) resonators based on the shadow evaporation technique [1]. We show that silicon dioxide can be successfully removed by etching process in HF-based solutions. This treatment significantly increases the intrinsic quality factor Qi of the resonators and is also suitable for other superconducting structures operated at temperatures of the order of 20 mK. In this report we present a design of superconducting CPW resonators with a high quality factor to study fundamental problems of high kinetic inductance of aluminum ultra-thin films. Our kinetic inductance research was motivated by the necessity of ultra-short and high quality resonators which could be suitable for qubit systems. Also this kinetic inductance could be used in the development of parametric amplifiers [2] or new types of qubits based on quantum phase slip [3].

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Ultra high quality factor resonators for kinetic inductance detectors

G. Hammer, S. Wünsch, K. Ilin +1 more

The sensitivity of a kinetic inductance detector is determined by the performance of the cavity circuit and therefore a high quality factor and low phase noise are required. We developed superconducting niobium coplanar waveguide resonators for kinetic inductance detectors at a resonance frequency of 6 GHz. The length of the resonators is adjusted to a quarter of a wavelength which corresponds to ≈ 5.3 mm in our geometry. Different layouts with coplanar waveguide transmission line topology for the resonator were designed and simulated. Some parameters of the device fabrication process were varied. The niobium thin films were deposited by magnetron sputtering on sapphire substrates kept at ambient temperature. The resonators were patterned by photolithography and reactive ion etching and measured at helium temperatures. Because of the quarter wave geometry with one shorted end the reflection parameter was measured. We have studied the influence of the coupling capacitances on quality factor. The optimization includes microwave simulations and implementation in different resonator structures. The measurements of optimized devices showed a very high quality factor above one million (10 6 ). The obtained results and perspective on further development of resonators will be discussed.

Journal of Physics Conference Series•Feb 1, 2008•11 citations

Development of high quality superconducting resonators for quantum device applications

Dong-Gwang Ha, Seon Hoo Kim, So-Yeon Jun +5 more

We report our development on design, fabrication and characterization of various superconducting resonators for quantum device applications. The resonators are developed mainly for superconducting qubit implementation in circuit QED structure, but future application will include photon detectors such as microwave kinetic inductance detectors. First we designed and fabricated half-wavelength coplanar waveguide resonators with niobium thin film on a high resistive silicon wafer, with the fundamental frequencies in the range of 1 to 8 GHz. The loaded quality factors are controlled by the coupling capacitors, and the lower bound of the intrinsic quality factor was measured down to 7 mK in the dilution refrigerator. We have also designed quarter-wavelength resonators and lumped LC resonators coupled to a transmission line, and characterized multiple resonators in a single transmission line. For the 3D transmon qubit application, we designed and fabricated a rectangular box resonator with superconducting aluminum. The intrinsic quality factor of the box resonator exceeds three million at 7 mK. We will also present basic results on the integration of a transmon qubit in the superconducting resonator.

IEEE International Superconductive Electronics Conference (ISEC)•Jul 1, 2013•0 citations
The objective of this thesis is to evaluate a generic process for fabrication and characterization of the Superconductive coplanar waveguide (CPW) resonators. Superconductive CPW resonators with various lengths and shapes are designed to investigate their electrical and magnetic properties as well as resonance properties and sensitivities. In the first part of thesis, two different models are introduced in order to estimate the nonlinear kinetic inductance of a superconducting CPW resonator. The first model is based on Bean criticalstate model and the second one is based on current dependence of London penetration depth, λL(I). The existence of a shift in resonant frequency, f0, of Superconductive CPW resonator caused by a non-linear kinetic inductance is also shown experimentally. Simulations were carried out to estimate the nonlinear kinetic inductance due to the selfinduced magnetic field penetration. The rest of the thesis is concerned with development of very smooth Aluminum (Al) thin films with RMS (Root Mean Square) roughness ∼ 1 nm and CAD (Computer Aid Design) of superconductive CPW resonators. Experimental investigation of a generic fabrication technique for superconductive CPW resonator is carried out. Many resonators are fabricated with different design parameters, such as centerline or gap width, film thickness and gap capacitors length. The fabrication process is described in detail. Electron Beam Lithography is used to fabricate Nb and Al CPW resonators which are coupled to outer conductors via gap capacitors. We have fabricated GHz frequency CPW resonators with quality factors, Q up to 5× 10.
The objective of this thesis is to evaluate a generic process for fabrication and characterization of the Superconductive coplanar waveguide (CPW) resonators. Superconductive CPW resonators with various lengths and shapes are designed to investigate their electrical and magnetic properties as well as resonance properties and sensitivities. In the first part of thesis, two different models are introduced in order to estimate the nonlinear kinetic inductance of a superconducting CPW resonator. The first model is based on Bean critical-state model and the second one is based on current dependence of London penetration depth. The existence of a shift in resonant frequency of Superconductive CPW resonator caused by a non-linear kinetic inductance is also shown experimentally. Simulations were carried out to estimate the nonlinear kinetic inductance due to the self- induced magnetic field penetration. The rest of the thesis is concerned with development of very smooth Aluminum (Al) thin films with RMS (Root Mean Square) roughness 1~nm and CAD (Computer Aid Design) of superconductive CPW resonators. Experimental investigation of a generic fabrication technique for superconductive CPW resonator is carried out. Many resonators are fabricated with different design parameters, such as centerline or gap width, film thickness and gap capacitors length. The fabrication process is described in detail. Electron Beam Lithography is used to fabricate Nb and Al CPW resonators which are coupled to outer conductors via gap capacitors. We have fabricated GHz frequency CPW resonators with quality factors, Q up 5X10^5.
This thesis presents the results of the experimental studies on two kindof Superconducting circuits: one-dimensional Josephson junction chains andsuperconducting coplanar waveguide (CPW) resonators. One-dimensionalJosephson junction chains are constructed by connecting many Superconducting quantum interference devices (SQUIDs) in series. We have studied DC transport properties of the SQUID chains and model their nonlineardynamics with Thermally Activated Phase-Slips (TAPS). Experimental andsimulated results showed qualitative agreement revealing the existence of auniform phase-slipping and phase-sticking process which results in a voltage-independent current on the dissipative branch of the current-voltage char-acteristics (IVC). By modulating the effective Josephson coupling energy ofthe SQUIDs (EJ ) with an external magnetic field, we found that the ratio EJ /EC is a decisive factor in determining the qualitative shape of theIVC. A quantum phase transition between incoherent Quantum Phase Slip, QPS (supercurrent branch with a finite slope) to coherent QPS (IVC withwell-developed Coulomb blockade) via an intermediate state (supercurrentbranch with a remnant of Coulomb blockade) is observed as the EJ /EC ratio is tuned. This transition from incoherent QPS to the intermediate-statehappens around R0 ∼ RQ (RQ = h/4e^2 = 6.45kΩ). We also fabricated structured chains where a SQUID at the middle of the chain (central SQUID) has different junction size and loop area compared to other SQUIDs in the chain. Results showed that with these structured chains it is possible to localize andtune the amplitude of both TAPS and QPS at the central SQUID. The second part of the thesis describes the fabrication process and themeasurement results of superconducting CPW resonators. Resonators withdifferent design parameters were fabricated and measured. The transmissionspectra showed quality factors up to, Q ∼ 5 × 10^5 . We have observed bendingof the resonance curves to the lower frequencies due to existence of a nonlinear kinetic inductance. The origin of the nonlinear kinetic inductance isthe nonlinear relation between supercurrent density, Js, and superfluid veloc-ity, vs , of the charge carriers on the center line of the resonators. A simplemodel based on the Ginzburg-Landau theory is used in order to explain ob-served nonlinear kinetic inductance and estimates using this model showedgood agreement with the experimental results.
We successfully designed and fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is fabricated as a meandered quarter-wavelength transmission line (one end is short to the ground and another end is capacitively coupled to a through feedline). With a vector network analyzer we measured the transmissions of the applied microwave through the resonators at ultra-low temperature. The obtained loaded quality factors are significantly high, i.e. up to ∼10 6 . When the temperature increases slowly from the base temperature (20 mK), the resonance frequencies of the resonators are blue shifted and the quality factors are lowered slightly. In principle, this type of device can integrate a series of CPW resonators with a common feedline, making it a promising candidate as the data bus for coupling distant solid-state qubits and the sensitive detector of single photons.
We present a specific method for fabrication of the original evaporation mask and characterisation of the superconduct- ing coplanar waveguide (CPW) resonators based on the shadow evaporation technique [1]. We show that silicon dioxide can be successfully removed by etching process in HF-based solutions. This treatment significantly increases the intrinsic quality factor Qi of the resonators and is also suitable for other superconducting structures operated at temperatures of the order of 20 mK. In this report we present a design of superconducting CPW resonators with a high quality factor to study fundamental problems of high kinetic inductance of aluminum ultra-thin films. Our kinetic inductance research was motivated by the necessity of ultra-short and high quality resonators which could be suitable for qubit systems. Also this kinetic inductance could be used in the development of parametric amplifiers [2] or new types of qubits based on quantum phase slip [3].
The sensitivity of a kinetic inductance detector is determined by the performance of the cavity circuit and therefore a high quality factor and low phase noise are required. We developed superconducting niobium coplanar waveguide resonators for kinetic inductance detectors at a resonance frequency of 6 GHz. The length of the resonators is adjusted to a quarter of a wavelength which corresponds to ≈ 5.3 mm in our geometry. Different layouts with coplanar waveguide transmission line topology for the resonator were designed and simulated. Some parameters of the device fabrication process were varied. The niobium thin films were deposited by magnetron sputtering on sapphire substrates kept at ambient temperature. The resonators were patterned by photolithography and reactive ion etching and measured at helium temperatures. Because of the quarter wave geometry with one shorted end the reflection parameter was measured. We have studied the influence of the coupling capacitances on quality factor. The optimization includes microwave simulations and implementation in different resonator structures. The measurements of optimized devices showed a very high quality factor above one million (10 6 ). The obtained results and perspective on further development of resonators will be discussed.
We report our development on design, fabrication and characterization of various superconducting resonators for quantum device applications. The resonators are developed mainly for superconducting qubit implementation in circuit QED structure, but future application will include photon detectors such as microwave kinetic inductance detectors. First we designed and fabricated half-wavelength coplanar waveguide resonators with niobium thin film on a high resistive silicon wafer, with the fundamental frequencies in the range of 1 to 8 GHz. The loaded quality factors are controlled by the coupling capacitors, and the lower bound of the intrinsic quality factor was measured down to 7 mK in the dilution refrigerator. We have also designed quarter-wavelength resonators and lumped LC resonators coupled to a transmission line, and characterized multiple resonators in a single transmission line. For the 3D transmon qubit application, we designed and fabricated a rectangular box resonator with superconducting aluminum. The intrinsic quality factor of the box resonator exceeds three million at 7 mK. We will also present basic results on the integration of a transmon qubit in the superconducting resonator.