The Japan Society of Applied Physics
Development of superconducting through-silicon vias (TSVs) for scalable superconducting qubits
Masahiro Ukibe, Go Fujii, Kazumasa Makise, Naoya Watanabe, Katsuya Kikuchi
The Japan Society of Applied Physics
Masahiro Ukibe, Go Fujii, Kazumasa Makise, Naoya Watanabe, Katsuya Kikuchi