Bulletin of the American Physical Society
Superconducting Through Silicon Vias (TSVs) for 3D Integration in Quantum Computing
Justin Mallek, D. Yost, Danna Rosenberg, Greg Calusine, Matthew Cook, Rabindra Nath Das, Evan B. Golden, David K. Kim, Alexander J. Melville, Corey Stull, Wayne H. Woods, Jonilyn Yoder, William D. Oliver