Solid-state qubits integrated with superconducting through-silicon vias
Yost, DRW, Mollie E. Schwartz, Justin Mallek, Danna Rosenberg, Corey Stull, Yoder, JL, Greg Calusine, Cook, M, Rabindra Nath Das, Day, AL, Golden, EB, Kim, DK, Alexander J. Melville, Bethany M. Niedzielski, Wayne H. Woods, Kerman, AJ, Oliver, WD