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RF-SQUID prepared on MgB2 variable-thickness bridge by AFM scratching

M. Gregor, T. Pleceník, M. Praščák, R. Mičunek, M. Kubinec, Vladimír Gašparík, M. Grajcar, Peter Kúš, Andrej Plecenik

Published May 29, 2007• 0 citations
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Abstract

We present the preparation of radio-frequency superconducting quantum interface devices (SQUID) on MgB2 thin film with Tc=32 K. Variable-thickness bridge was prepared by combination of optical lithography and AFM scratching technique. The critical current of nanobridge was 0.35 uA at 4.2 K. Non-contact measurements of current-phase characteristics and critical current vs. temperature have been investigated on our SQUID structures.

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Mg B 2 radio-frequency superconducting quantum interference device prepared by atomic force microscope lithography

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A new method of preparation of radio-frequency superconducting quantum interference devices on MgB2 thin films is presented. The variable-thickness bridge was prepared by a combination of optical lithography and of the scratching by an atomic force microscope. The critical current of the nanobridge was 0.35μA at 4.2K. Noncontact measurements of the current-phase characteristics and of the critical current versus temperature have been investigated on the authors’ structures.

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Superconducting QUantum Interference Devices (SQUIDs) based on nanobridge junctions have shown increasing promise for single particle detection. This paper describes the development of the fabrication of improved and reproducible nanobridge junctions fabricated by focused ion beam (FIB) milling from niobium thin films. Although the very low noise properties of nanobridge SQUIDs are well known, the nature of the milling process is little understood at the level of local superconducting properties. In this paper, we report the results for nanobridge Josephson devices and SQUIDs, which we believe are the first to be made by Xenon (Xe) FIB milling. Temperature-dependent current-voltage behavior, microwave-induced Shapiro steps, and SQUID response to magnetic fields have been measured. We make preliminary comparisons with nominally identical devices milled from Nb thin films using either Xe or Ga ions.

IEEE Transactions on Applied Superconductivity•Jul 19, 2018•7 citations
We present the preparation of radio-frequency superconducting quantum interface devices (SQUID) on MgB2 thin film with Tc=32 K. Variable-thickness bridge was prepared by combination of optical lithography and AFM scratching technique. The critical current of nanobridge was 0.35 uA at 4.2 K. Non-contact measurements of current-phase characteristics and critical current vs. temperature have been investigated on our SQUID structures.
Reduction of the size of the superconducting quantum interference device (SQUID) ring structure improves its sensitivity to magnetic moments. Nanobridge junctions are advantageous for SQUID miniaturization. However, many planar SQUIDs with nanobridge junctions have shallow flux modulation depths because of their nonideal Josephson current-phase relationships. Here, we fabricated a three-dimensional niobium nitride (NbN) miniaturized SQUID in which the nanobridge junction structures are much thinner than the superconducting ring. We grew a thick superconducting NbN film on a silicon wafer and embedded an insulating slit in the middle of the film. By setting two thin nanobridge junctions across this insulating slit, we were able to manufacture NbN miniaturized SQUIDs that, in principle, can become nano-SQUIDs. The flux modulation depths of these devices reached 36% at 4.2 K. In addition, the fabricated devices show reversible current-voltage characteristics in the absence of any shunting resistance.
DC SQUIDs with outer loop size ∼10 μmx 10 μm have been fabricated with nanobridge Josephson junctions in thin Niobium films (25, 100 and 200 nm) using either electron beam or focused ion beam techniques. Such SQUIDs are ideally suited to incorporate into the centre strip of a superconducting coplanar waveguide. The current-voltage characteristics and magnetic field modulation of the SQUIDs are compared for the two methods. The temperature dependence of the critical current is quite linear for the e-beam devices whilst the focused ion beam devices fit an exponential. Here we also investigate trimming methods to reduce the critical currents of the nanojunctions fabricated in the thicker films, in order to improve the SQUID parameters at lower temperatures.
To realize antenna-coupled Josephson detectors for microwave and millimeter-wave radiation, planar-type Nb nanobridge Josephson junctions were fabricated. Nb thin films whose thickness, the root mean square roughness and the critical temperature were 20.0 nm, 0.109 nm and 8.4 K, respectively were deposited using a DC magnetron sputtering at a substrate temperature of 700°C. Nanobridges were obtained from the film using 80-kV electron beam lithography and reactive ion-beam etching in CF 4 (90%) + O2 (10%) gases. The minimum bridge area was 65 nm wide and 60 nm long. For the nanobridge whose width and length were less than 110 nm, an I-V characteristic showed resistively-shunted-junction behaviour near the critical temperature. Moreover, Shapiro steps were observed in the nanobridge with microwave irradiation at a frequency of 6 – 30 GHz. The Nb nanobridges can be used as detectors in the antenna-coupled devices.
Nano-Superconducting Quantum Interference Devices (nano-SQUIDs) are usually fabricated from a single layer of either Nb or Al. We describe here a simple method for fabricating suspended nano-bridges in Nb/Al thin-film bilayers. We use these suspended bridges, which act as Josephson weak links, to fabricate nano-SQUIDs which show critical current oscillations at temperatures up to 1.5 K and magnetic flux densities up to over 20 mT. These nano-SQUIDs exhibit flux modulation depths intermediate between all-Al and all-Nb devices, with some of the desirable characteristics of both. The suspended geometry is attractive for magnetic single nanoparticle measurements.
Superconducting QUantum Interference Devices (SQUIDs) based on nanobridge junctions have shown increasing promise for single particle detection. This paper describes the development of the fabrication of improved and reproducible nanobridge junctions fabricated by focused ion beam (FIB) milling from niobium thin films. Although the very low noise properties of nanobridge SQUIDs are well known, the nature of the milling process is little understood at the level of local superconducting properties. In this paper, we report the results for nanobridge Josephson devices and SQUIDs, which we believe are the first to be made by Xenon (Xe) FIB milling. Temperature-dependent current-voltage behavior, microwave-induced Shapiro steps, and SQUID response to magnetic fields have been measured. We make preliminary comparisons with nominally identical devices milled from Nb thin films using either Xe or Ga ions.