Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

IEEE Transactions on Applied Superconductivity

Fabrication and Characterization of Miniaturized NbN Superconducting Quantum Interference Devices With Nanobridge Junctions

Hao Wang, Lei Chen, Xiaoyu Liu, Long Wu, X. L. Wu, Lixing You, Zhen Wang

Published Jan 18, 2017• 10 citations
Publisher

Abstract

Reduction of the size of the superconducting quantum interference device (SQUID) ring structure improves its sensitivity to magnetic moments. Nanobridge junctions are advantageous for SQUID miniaturization. However, many planar SQUIDs with nanobridge junctions have shallow flux modulation depths because of their nonideal Josephson current-phase relationships. Here, we fabricated a three-dimensional niobium nitride (NbN) miniaturized SQUID in which the nanobridge junction structures are much thinner than the superconducting ring. We grew a thick superconducting NbN film on a silicon wafer and embedded an insulating slit in the middle of the film. By setting two thin nanobridge junctions across this insulating slit, we were able to manufacture NbN miniaturized SQUIDs that, in principle, can become nano-SQUIDs. The flux modulation depths of these devices reached 36% at 4.2 K. In addition, the fabricated devices show reversible current-voltage characteristics in the absence of any shunting resistance.

DOI
10.1109/tasc.2017.2655051

Related papers

A High-Performance Nb Nano-Superconducting Quantum Interference Device with a Three-Dimensional Structure

Lei Chen, Hao Wang, Xiaoyu Liu +2 more

A superconducting quantum interference device (SQUID) miniaturized into the nanoscale is promising in the inductive detection of a single electron spin. A nano-SQUID with a strong spin coupling coefficient, a low flux noise, and a wide working magnetic field range is highly desired in a single spin resonance measurement. Nano-SQUIDs with Dayem bridge junctions excel in a high working field range and in the direct coupling from spins to the bridge. However, the common planar structure of nano-SQUIDs is known for problems such as a shallow flux modulation depth and a troublesome hysteresis in current–voltage curves. Here, we developed a fabrication process for creating three-dimensional (3-D) niobium (Nb) nano-SQUIDs with nanobridge junctions that can be tuned independently. Characterization of the device shows up to 45.9% modulation depth with a reversible current–voltage curve. Owning to the large modulation depth, the measured flux noise is as low as 0.34 μΦ 0 /Hz 1/2 . The working field range of the SQUID is greater than 0.5 T parallel to the SQUID plane. We believe that 3-D Nb nano-SQUIDs provide a promising step toward effective single-spin inductive detection.

arXiv:1612.08149•Nano Letters•Nov 7, 2016•33 citations

Inductance analysis of superconducting quantum interference devices with 3D nano-bridge junctions

Hao Wang, Ruoting Yang, Guanqun Li +5 more

Abstract Superconducting quantum interference devices (SQUIDs) with 3D nano-bridge junctions can be miniaturized into nano-SQUIDs that are able to sense a few spins in a large magnetic field. Among all device parameters, the inductance is key to the performance of SQUIDs with 3D nano-bridge junctions. Here, we measured the critical-current magnetic flux modulation curves of 12 devices with three design types using a current strip-line directly coupled to the SQUID loop. A best flux modulation depth of 71% was achieved for our 3D Nb SQUID. From the modulation curves, we extracted the inductance values of the current stripe-line in each design and compared them with the corresponding simulation results of InductEX. In this way, London penetration depths of 110 and 420 nm were determined for our Nb (niobium) and NbN (niobium nitride) films, respectively. Furthermore, we showed that inductances of 11 and 119 pH for Nb and NbN 3D nano-bridge junctions, respectively, dominated the total inductance of our SQUID loops which are 23 pH for Nb and 255 pH for NbN. A screening parameter being equal to one suggests optimal critical currents of 89.6 and 8.1 μ A for Nb and NbN SQUIDs, respectively. Additionally, intrinsic flux noise of 110 ± 40 n Φ 0 /(Hz) 1/2 is calculated for the Nb SQUIDs with 3D nano-bridge junctions by Langevin simulation.

Superconductor Science and Technology•Mar 28, 2018•9 citations

Fabrication and Noise Properties of NbN Nanobridge dc Superconducting QUantum Interference Devices (SQUIDs)

Akinobu Irie, Hiroya Abe, M. Hátle +1 more

We have fabricated two types of NbN nanobridge dc Superconducting QUantum Interference Devices (SQUIDs). From the analyses of the response to magnetic field, it is found that the current-phase relationship for the planar-type nanobridge and the nanobridge fabricated by field evaporation is close to sinusoidal. For V\gtrsim720 µV, The spectral densities of the voltage noise show linear dependence on the voltage for the SQUIDs with nanobridges whose length is about the superconducting coherence length of NbN. The SQUIDs with nanobridges with lengths of several times the NbN coherence length exhibit parabolic voltage dependence.

Japanese Journal of Applied Physics•Dec 1, 1991•1 citation

Nano-superconducting quantum interference devices with suspended junctions

Dibyendu Hazra, John R. Kirtley, K. Hasselbach

Nano-Superconducting Quantum Interference Devices (nano-SQUIDs) are usually fabricated from a single layer of either Nb or Al. We describe here a simple method for fabricating suspended nano-bridges in Nb/Al thin-film bilayers. We use these suspended bridges, which act as Josephson weak links, to fabricate nano-SQUIDs which show critical current oscillations at temperatures up to 1.5 K and magnetic flux densities up to over 20 mT. These nano-SQUIDs exhibit flux modulation depths intermediate between all-Al and all-Nb devices, with some of the desirable characteristics of both. The suspended geometry is attractive for magnetic single nanoparticle measurements.

Applied Physics Letters•Apr 14, 2014•25 citations

Niobium dc SQUIDs with Nanobridge Junctions

E.E. Mitchell, S. K. H. Lam

DC SQUIDs with outer loop size ∼10 μmx 10 μm have been fabricated with nanobridge Josephson junctions in thin Niobium films (25, 100 and 200 nm) using either electron beam or focused ion beam techniques. Such SQUIDs are ideally suited to incorporate into the centre strip of a superconducting coplanar waveguide. The current-voltage characteristics and magnetic field modulation of the SQUIDs are compared for the two methods. The temperature dependence of the critical current is quite linear for the e-beam devices whilst the focused ion beam devices fit an exponential. Here we also investigate trimming methods to reduce the critical currents of the nanojunctions fabricated in the thicker films, in order to improve the SQUID parameters at lower temperatures.

Physics Procedia•Jan 1, 2012•10 citations

Fabrication and Characteristics of SQIF Based on NbN/AlN/NbN Josephson Junctions

Huiwu Wang, Xin Tang, Wei Peng +1 more

Superconducting quantum interference filter (SQIF) is an array of superconducting quantum interference devices (SQUIDs) with different loop sizes. Such a device is capable of providing a much higher transfer factor and much higher magnetic field sensitivity with respect to those of single SQUID. Series niobium nitride (NbN) SQIF containing 400 SQUIDs with randomly varied loop areas and epitaxial NbN/AlN/NbN Josephson junctions have been developed, fabricated, and measured at helium temperature. The device shows a nonperiodic voltage response with a single sharp peak at zero magnetic field. The measured magnetic flux to voltage trans fer factor reaches 37.8 mV/Φ0at 4.2 K.

IEEE Transactions on Applied Superconductivity•Jun 22, 2020•1 citation
Reduction of the size of the superconducting quantum interference device (SQUID) ring structure improves its sensitivity to magnetic moments. Nanobridge junctions are advantageous for SQUID miniaturization. However, many planar SQUIDs with nanobridge junctions have shallow flux modulation depths because of their nonideal Josephson current-phase relationships. Here, we fabricated a three-dimensional niobium nitride (NbN) miniaturized SQUID in which the nanobridge junction structures are much thinner than the superconducting ring. We grew a thick superconducting NbN film on a silicon wafer and embedded an insulating slit in the middle of the film. By setting two thin nanobridge junctions across this insulating slit, we were able to manufacture NbN miniaturized SQUIDs that, in principle, can become nano-SQUIDs. The flux modulation depths of these devices reached 36% at 4.2 K. In addition, the fabricated devices show reversible current-voltage characteristics in the absence of any shunting resistance.
A superconducting quantum interference device (SQUID) miniaturized into the nanoscale is promising in the inductive detection of a single electron spin. A nano-SQUID with a strong spin coupling coefficient, a low flux noise, and a wide working magnetic field range is highly desired in a single spin resonance measurement. Nano-SQUIDs with Dayem bridge junctions excel in a high working field range and in the direct coupling from spins to the bridge. However, the common planar structure of nano-SQUIDs is known for problems such as a shallow flux modulation depth and a troublesome hysteresis in current–voltage curves. Here, we developed a fabrication process for creating three-dimensional (3-D) niobium (Nb) nano-SQUIDs with nanobridge junctions that can be tuned independently. Characterization of the device shows up to 45.9% modulation depth with a reversible current–voltage curve. Owning to the large modulation depth, the measured flux noise is as low as 0.34 μΦ 0 /Hz 1/2 . The working field range of the SQUID is greater than 0.5 T parallel to the SQUID plane. We believe that 3-D Nb nano-SQUIDs provide a promising step toward effective single-spin inductive detection.
Abstract Superconducting quantum interference devices (SQUIDs) with 3D nano-bridge junctions can be miniaturized into nano-SQUIDs that are able to sense a few spins in a large magnetic field. Among all device parameters, the inductance is key to the performance of SQUIDs with 3D nano-bridge junctions. Here, we measured the critical-current magnetic flux modulation curves of 12 devices with three design types using a current strip-line directly coupled to the SQUID loop. A best flux modulation depth of 71% was achieved for our 3D Nb SQUID. From the modulation curves, we extracted the inductance values of the current stripe-line in each design and compared them with the corresponding simulation results of InductEX. In this way, London penetration depths of 110 and 420 nm were determined for our Nb (niobium) and NbN (niobium nitride) films, respectively. Furthermore, we showed that inductances of 11 and 119 pH for Nb and NbN 3D nano-bridge junctions, respectively, dominated the total inductance of our SQUID loops which are 23 pH for Nb and 255 pH for NbN. A screening parameter being equal to one suggests optimal critical currents of 89.6 and 8.1 μ A for Nb and NbN SQUIDs, respectively. Additionally, intrinsic flux noise of 110 ± 40 n Φ 0 /(Hz) 1/2 is calculated for the Nb SQUIDs with 3D nano-bridge junctions by Langevin simulation.
We have fabricated two types of NbN nanobridge dc Superconducting QUantum Interference Devices (SQUIDs). From the analyses of the response to magnetic field, it is found that the current-phase relationship for the planar-type nanobridge and the nanobridge fabricated by field evaporation is close to sinusoidal. For V\gtrsim720 µV, The spectral densities of the voltage noise show linear dependence on the voltage for the SQUIDs with nanobridges whose length is about the superconducting coherence length of NbN. The SQUIDs with nanobridges with lengths of several times the NbN coherence length exhibit parabolic voltage dependence.
Nano-Superconducting Quantum Interference Devices (nano-SQUIDs) are usually fabricated from a single layer of either Nb or Al. We describe here a simple method for fabricating suspended nano-bridges in Nb/Al thin-film bilayers. We use these suspended bridges, which act as Josephson weak links, to fabricate nano-SQUIDs which show critical current oscillations at temperatures up to 1.5 K and magnetic flux densities up to over 20 mT. These nano-SQUIDs exhibit flux modulation depths intermediate between all-Al and all-Nb devices, with some of the desirable characteristics of both. The suspended geometry is attractive for magnetic single nanoparticle measurements.
DC SQUIDs with outer loop size ∼10 μmx 10 μm have been fabricated with nanobridge Josephson junctions in thin Niobium films (25, 100 and 200 nm) using either electron beam or focused ion beam techniques. Such SQUIDs are ideally suited to incorporate into the centre strip of a superconducting coplanar waveguide. The current-voltage characteristics and magnetic field modulation of the SQUIDs are compared for the two methods. The temperature dependence of the critical current is quite linear for the e-beam devices whilst the focused ion beam devices fit an exponential. Here we also investigate trimming methods to reduce the critical currents of the nanojunctions fabricated in the thicker films, in order to improve the SQUID parameters at lower temperatures.
Superconducting quantum interference filter (SQIF) is an array of superconducting quantum interference devices (SQUIDs) with different loop sizes. Such a device is capable of providing a much higher transfer factor and much higher magnetic field sensitivity with respect to those of single SQUID. Series niobium nitride (NbN) SQIF containing 400 SQUIDs with randomly varied loop areas and epitaxial NbN/AlN/NbN Josephson junctions have been developed, fabricated, and measured at helium temperature. The device shows a nonperiodic voltage response with a single sharp peak at zero magnetic field. The measured magnetic flux to voltage trans fer factor reaches 37.8 mV/Φ0at 4.2 K.