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arXiv:1612.08149 · Nano Letters

A High-Performance Nb Nano-Superconducting Quantum Interference Device with a Three-Dimensional Structure

Lei Chen, Hao Wang, Xiaoyu Liu, Long Wu, Zhen Wang

Published Nov 7, 2016• 33 citations
arXivHTMLPDF

Abstract

A superconducting quantum interference device (SQUID) miniaturized into the nanoscale is promising in the inductive detection of a single electron spin. A nano-SQUID with a strong spin coupling coefficient, a low flux noise, and a wide working magnetic field range is highly desired in a single spin resonance measurement. Nano-SQUIDs with Dayem bridge junctions excel in a high working field range and in the direct coupling from spins to the bridge. However, the common planar structure of nano-SQUIDs is known for problems such as a shallow flux modulation depth and a troublesome hysteresis in current–voltage curves. Here, we developed a fabrication process for creating three-dimensional (3-D) niobium (Nb) nano-SQUIDs with nanobridge junctions that can be tuned independently. Characterization of the device shows up to 45.9% modulation depth with a reversible current–voltage curve. Owning to the large modulation depth, the measured flux noise is as low as 0.34 μΦ 0 /Hz 1/2 . The working field range of the SQUID is greater than 0.5 T parallel to the SQUID plane. We believe that 3-D Nb nano-SQUIDs provide a promising step toward effective single-spin inductive detection.

DOI
10.1021/acs.nanolett.6b03826

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A superconducting quantum interference device (SQUID) miniaturized into the nanoscale is promising in the inductive detection of a single electron spin. A nano-SQUID with a strong spin coupling coefficient, a low flux noise, and a wide working magnetic field range is highly desired in a single spin resonance measurement. Nano-SQUIDs with Dayem bridge junctions excel in a high working field range and in the direct coupling from spins to the bridge. However, the common planar structure of nano-SQUIDs is known for problems such as a shallow flux modulation depth and a troublesome hysteresis in current–voltage curves. Here, we developed a fabrication process for creating three-dimensional (3-D) niobium (Nb) nano-SQUIDs with nanobridge junctions that can be tuned independently. Characterization of the device shows up to 45.9% modulation depth with a reversible current–voltage curve. Owning to the large modulation depth, the measured flux noise is as low as 0.34 μΦ 0 /Hz 1/2 . The working field range of the SQUID is greater than 0.5 T parallel to the SQUID plane. We believe that 3-D Nb nano-SQUIDs provide a promising step toward effective single-spin inductive detection.
Abstract Superconducting quantum interference devices (SQUIDs) with 3D nano-bridge junctions can be miniaturized into nano-SQUIDs that are able to sense a few spins in a large magnetic field. Among all device parameters, the inductance is key to the performance of SQUIDs with 3D nano-bridge junctions. Here, we measured the critical-current magnetic flux modulation curves of 12 devices with three design types using a current strip-line directly coupled to the SQUID loop. A best flux modulation depth of 71% was achieved for our 3D Nb SQUID. From the modulation curves, we extracted the inductance values of the current stripe-line in each design and compared them with the corresponding simulation results of InductEX. In this way, London penetration depths of 110 and 420 nm were determined for our Nb (niobium) and NbN (niobium nitride) films, respectively. Furthermore, we showed that inductances of 11 and 119 pH for Nb and NbN 3D nano-bridge junctions, respectively, dominated the total inductance of our SQUID loops which are 23 pH for Nb and 255 pH for NbN. A screening parameter being equal to one suggests optimal critical currents of 89.6 and 8.1 μ A for Nb and NbN SQUIDs, respectively. Additionally, intrinsic flux noise of 110 ± 40 n Φ 0 /(Hz) 1/2 is calculated for the Nb SQUIDs with 3D nano-bridge junctions by Langevin simulation.
Reduction of the size of the superconducting quantum interference device (SQUID) ring structure improves its sensitivity to magnetic moments. Nanobridge junctions are advantageous for SQUID miniaturization. However, many planar SQUIDs with nanobridge junctions have shallow flux modulation depths because of their nonideal Josephson current-phase relationships. Here, we fabricated a three-dimensional niobium nitride (NbN) miniaturized SQUID in which the nanobridge junction structures are much thinner than the superconducting ring. We grew a thick superconducting NbN film on a silicon wafer and embedded an insulating slit in the middle of the film. By setting two thin nanobridge junctions across this insulating slit, we were able to manufacture NbN miniaturized SQUIDs that, in principle, can become nano-SQUIDs. The flux modulation depths of these devices reached 36% at 4.2 K. In addition, the fabricated devices show reversible current-voltage characteristics in the absence of any shunting resistance.
We report on the design, the fabrication and the performance of an integrated magnetic nano-sensor based on niobium dc-SQUID (Superconducting QUantum Interference Device) for nanoscale applications is presented. The nano-sensors are based on nanometric niobium constrictions (Dayem bridges) inserted in a square loop having a side length of 200 nm. Measurements of voltage-flux characteristic, flux to voltage transfer factor and noise performances are reported. In small signal mode, the sensors have shown a magnetic flux noise spectral density of 1.5 μΦ 0 /Hz 1/2 corresponding to a spin sensitivity in unit of Bohr magneton of 60 spin/Hz 1/2 . Supercurrent decay measurements of these devices are also reported. Such measurements provide useful information for applications which employ the SQUID as a trigger where the sensor works on the zero voltage state. The experimental data, have shown an intrinsic current fluctuation less than 0.2% of the critical current at liquid helium temperature, corresponding to an intrinsic sensor magnetic flux resolution of a few mΦ 0 . In view of the nano-SQUID employments in the detection of small spin populations, the authors calculated the spin sensitivity and the magnetic response relative to the single spin, as a function of its position within the SQUID hole. The results show that the SQUID response depends strongly on the spin position.
An integrated magnetic nanosensor based on a niobium dc SQUID (superconducting quantum interference device) for nanoscale applications is presented. The sensor, having a washer shape with a hole of 200 nm and two Josephson-Dayem nanobridges of 80 nm × 100 nm, consists of a Nb(30 nm)/Al(30 nm) bilayer patterned by electron beam lithography (EBL) and shaped by lift-off and reactive ion etch (RIE) processes. The presence of the niobium coils, integrated on-chip and tightly coupled to the SQUID, allows us to easily excite the sensor in order to get the voltage-flux characteristics and to flux bias the SQUID at its optimal point. The measurements were performed at liquid helium temperature. A voltage swing of 75 µV and a maximum voltage-flux transfer coefficient (responsivity) as high as 1 mV/Φ(0) were directly measured from the voltage-flux characteristic. The noise measurements were performed in open loop mode, biasing the SQUID with a dc magnetic flux at its maximum responsivity point and using direct-coupled low-noise readout electronics. A white magnetic flux noise spectral density as low as 2.5 μΦ(0) Hz(-1/2) was achieved, corresponding to a magnetization or spin sensitivity in units of the Bohr magneton of 100 spin Hz(-1/2). Possible applications of this nanosensor can be envisaged in magnetic detection of nanoparticles and small clusters of atoms and molecules, in the measurement of nanoobject magnetization, and in quantum computing.
We report the performance of a reliable three-dimensional nanometer-sized Superconducting QUantum Interference Device (SQUID). The use of superconductor-isolator-superconductor Nb/Al-AlOx/Nb Josephson tunnel junctions together with small SQUID loop dimensions permits a high modulation depth of the SQUID's critical current and thus leads to very low intrinsic flux noise of the device. In particular, we present electrical characterization including detailed noise investigations. At 4.2 K, two-stage noise measurements with a SQUID as a low noise preamplifier result in a white flux noise of 51 nΦ0/Hz1/2, which is equivalent to an energy resolution of 1.3 h, with h being Planck's constant. Simulation of spin sensitivities results in about 1 μB/Hz1/2 for an electron spin positioned directly above the SQUID ring.
Scalable memories that can match the speeds of superconducting logic circuits have long been desired to enable a superconducting computer. A superconducting loop that includes a Josephson junction can store a flux quantum state in picoseconds. However, the requirement for the loop inductance to create a bistate hysteresis sets a limit on the minimal area occupied by a single memory cell. Here, we present a miniaturized superconducting memory cell based on a three-dimensional (3D) Nb nano-superconducting quantum interference device (nano-SQUID). The major cell area here fits within an 8 × 9 μm 2 rectangle with a cross-selected function for memory implementation. The cell shows periodic tunable hysteresis between two neighboring flux quantum states produced by bias current sweeping because of the large modulation depth of the 3D nano-SQUID (∼66%). Furthermore, the measured current-phase relations (CPRs) of nano-SQUIDs are shown to be skewed from a sine function, as predicted by theoretical modeling. The skewness and the critical current of 3D nano-SQUIDs are linearly correlated. It is also found that the hysteresis loop size is in a linear scaling relationship with the CPR skewness using the statistics from characterization of 26 devices. We show that the CPR skewness range of π/4–3π/4 is equivalent to a large loop inductance in creating a stable bistate hysteresis for memory implementation. Therefore, the skewed CPR of 3D nano-SQUID enables further superconducting memory cell miniaturization by overcoming the inductance limitation of the loop area.