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arXiv:2007.11734 · ACS Nano

Miniaturization of the Superconducting Memory Cell via a Three-Dimensional Nb Nano-superconducting Quantum Interference Device

Lei Chen, Lili Wu, Yue Wang, Yinping Pan, Denghui Zhang, Junwen Zeng, Xiaoyu Liu, Linxian Ma, Wei Peng, Yihua Wang, Jie Ren, Zhen Wang

Published Jul 22, 2020• 19 citations
arXivHTMLPDF

Abstract

Scalable memories that can match the speeds of superconducting logic circuits have long been desired to enable a superconducting computer. A superconducting loop that includes a Josephson junction can store a flux quantum state in picoseconds. However, the requirement for the loop inductance to create a bistate hysteresis sets a limit on the minimal area occupied by a single memory cell. Here, we present a miniaturized superconducting memory cell based on a three-dimensional (3D) Nb nano-superconducting quantum interference device (nano-SQUID). The major cell area here fits within an 8 × 9 μm 2 rectangle with a cross-selected function for memory implementation. The cell shows periodic tunable hysteresis between two neighboring flux quantum states produced by bias current sweeping because of the large modulation depth of the 3D nano-SQUID (∼66%). Furthermore, the measured current-phase relations (CPRs) of nano-SQUIDs are shown to be skewed from a sine function, as predicted by theoretical modeling. The skewness and the critical current of 3D nano-SQUIDs are linearly correlated. It is also found that the hysteresis loop size is in a linear scaling relationship with the CPR skewness using the statistics from characterization of 26 devices. We show that the CPR skewness range of π/4–3π/4 is equivalent to a large loop inductance in creating a stable bistate hysteresis for memory implementation. Therefore, the skewed CPR of 3D nano-SQUID enables further superconducting memory cell miniaturization by overcoming the inductance limitation of the loop area.

DOI
10.1021/acsnano.0c04405

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Scalable memories that can match the speeds of superconducting logic circuits have long been desired to enable a superconducting computer. A superconducting loop that includes a Josephson junction can store a flux quantum state in picoseconds. However, the requirement for the loop inductance to create a bistate hysteresis sets a limit on the minimal area occupied by a single memory cell. Here, we present a miniaturized superconducting memory cell based on a three-dimensional (3D) Nb nano-superconducting quantum interference device (nano-SQUID). The major cell area here fits within an 8 × 9 μm 2 rectangle with a cross-selected function for memory implementation. The cell shows periodic tunable hysteresis between two neighboring flux quantum states produced by bias current sweeping because of the large modulation depth of the 3D nano-SQUID (∼66%). Furthermore, the measured current-phase relations (CPRs) of nano-SQUIDs are shown to be skewed from a sine function, as predicted by theoretical modeling. The skewness and the critical current of 3D nano-SQUIDs are linearly correlated. It is also found that the hysteresis loop size is in a linear scaling relationship with the CPR skewness using the statistics from characterization of 26 devices. We show that the CPR skewness range of π/4–3π/4 is equivalent to a large loop inductance in creating a stable bistate hysteresis for memory implementation. Therefore, the skewed CPR of 3D nano-SQUID enables further superconducting memory cell miniaturization by overcoming the inductance limitation of the loop area.
A superconducting quantum interference device (SQUID) miniaturized into the nanoscale is promising in the inductive detection of a single electron spin. A nano-SQUID with a strong spin coupling coefficient, a low flux noise, and a wide working magnetic field range is highly desired in a single spin resonance measurement. Nano-SQUIDs with Dayem bridge junctions excel in a high working field range and in the direct coupling from spins to the bridge. However, the common planar structure of nano-SQUIDs is known for problems such as a shallow flux modulation depth and a troublesome hysteresis in current–voltage curves. Here, we developed a fabrication process for creating three-dimensional (3-D) niobium (Nb) nano-SQUIDs with nanobridge junctions that can be tuned independently. Characterization of the device shows up to 45.9% modulation depth with a reversible current–voltage curve. Owning to the large modulation depth, the measured flux noise is as low as 0.34 μΦ 0 /Hz 1/2 . The working field range of the SQUID is greater than 0.5 T parallel to the SQUID plane. We believe that 3-D Nb nano-SQUIDs provide a promising step toward effective single-spin inductive detection.
Abstract Superconducting quantum interference devices (SQUIDs) with 3D nano-bridge junctions can be miniaturized into nano-SQUIDs that are able to sense a few spins in a large magnetic field. Among all device parameters, the inductance is key to the performance of SQUIDs with 3D nano-bridge junctions. Here, we measured the critical-current magnetic flux modulation curves of 12 devices with three design types using a current strip-line directly coupled to the SQUID loop. A best flux modulation depth of 71% was achieved for our 3D Nb SQUID. From the modulation curves, we extracted the inductance values of the current stripe-line in each design and compared them with the corresponding simulation results of InductEX. In this way, London penetration depths of 110 and 420 nm were determined for our Nb (niobium) and NbN (niobium nitride) films, respectively. Furthermore, we showed that inductances of 11 and 119 pH for Nb and NbN 3D nano-bridge junctions, respectively, dominated the total inductance of our SQUID loops which are 23 pH for Nb and 255 pH for NbN. A screening parameter being equal to one suggests optimal critical currents of 89.6 and 8.1 μ A for Nb and NbN SQUIDs, respectively. Additionally, intrinsic flux noise of 110 ± 40 n Φ 0 /(Hz) 1/2 is calculated for the Nb SQUIDs with 3D nano-bridge junctions by Langevin simulation.
Abstract Storage of a single magnetic flux quantum in a superconducting loop containing a Josephson junction represents a promising unit cell configuration for construction of a cryogenic memory of superconducting digital circuits. However, application of a DC bias current is required for operation of such a memory cell to maintain trapping of the flux quantum in the storage loop. In this work, we present a superconducting memory cell that uses a superconducting-magnetic π junction. The cell characteristics show flux quantum hysteresis centering at the zero-bias current. We develop a fabrication process that combines superconductor–ferromagnet–superconductor (SFS) junctions with superconductor–normal metal–superconductor (SNS) junctions. The critical current density of the SFS junctions shows a 0–π oscillation as a function of the ferromagnetic layer thickness. The formation of the π junction is confirmed further by the flux modulation curves of a superconducting quantum interference device made from SNS junctions with an additional SFS junction.
Abstract Superconducting flux memory devices fabricated with nanoscale junctions and high-inductance materials can maintain high-speed access performance while significantly reducing the area required for superconducting loops. In this work, we present a method for preparing nanoscale NbN-based superconductor/normal-metal/superconductor (SNS) Josephson junctions that combines electron beam lithography with chemical mechanical planarization process. Scanning electron microscope images reveal that the junction has a very round shape, while cross-sectional transmission electron microscopy shows that it has a truncated cone structure, characterized by a narrow top and a wide bottom. The minimum diameter of the junction is 51 nm, with the diameter at the interface between the wiring layer and the top electrode being just 27 nm. These nanoscale junctions exhibit excellent Josephson properties with a critical current density J c of 673 ± 64 kA cm −2 and a characteristic voltage V c of 1.63 ± 0.45 mV at 4.2 K. Furthermore, we designed the superconducting memory cell based on the simulated inductance values of the NbN loop and the nanoscale NbN-based SNS junctions. The cell has a total area of 12.6 μ m × 6.5 μ m and contains a radio-frequency superconducting quantum interference device with one junction in the storage loop and a direct-current superconducting quantum interference device with two junctions in the readout loop. Using the flux-locked and feedback measurement method, a clear flux hysteresis curve can be obtained to verify the read-write functions of the device.
Reduction of the size of the superconducting quantum interference device (SQUID) ring structure improves its sensitivity to magnetic moments. Nanobridge junctions are advantageous for SQUID miniaturization. However, many planar SQUIDs with nanobridge junctions have shallow flux modulation depths because of their nonideal Josephson current-phase relationships. Here, we fabricated a three-dimensional niobium nitride (NbN) miniaturized SQUID in which the nanobridge junction structures are much thinner than the superconducting ring. We grew a thick superconducting NbN film on a silicon wafer and embedded an insulating slit in the middle of the film. By setting two thin nanobridge junctions across this insulating slit, we were able to manufacture NbN miniaturized SQUIDs that, in principle, can become nano-SQUIDs. The flux modulation depths of these devices reached 36% at 4.2 K. In addition, the fabricated devices show reversible current-voltage characteristics in the absence of any shunting resistance.
We report the performance of a reliable three-dimensional nanometer-sized Superconducting QUantum Interference Device (SQUID). The use of superconductor-isolator-superconductor Nb/Al-AlOx/Nb Josephson tunnel junctions together with small SQUID loop dimensions permits a high modulation depth of the SQUID's critical current and thus leads to very low intrinsic flux noise of the device. In particular, we present electrical characterization including detailed noise investigations. At 4.2 K, two-stage noise measurements with a SQUID as a low noise preamplifier result in a white flux noise of 51 nΦ0/Hz1/2, which is equivalent to an energy resolution of 1.3 h, with h being Planck's constant. Simulation of spin sensitivities results in about 1 μB/Hz1/2 for an electron spin positioned directly above the SQUID ring.