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IEEE Transactions on Applied Superconductivity

Investigation of Dayem Bridge NanoSQUIDs Made by Xe Focused Ion Beam

Tom Godfrey, John C. Gallop, David Cox, Edward J. Romans, Jie Chen, Ling Hao

Published Jul 19, 2018• 7 citations
Publisher

Abstract

Superconducting QUantum Interference Devices (SQUIDs) based on nanobridge junctions have shown increasing promise for single particle detection. This paper describes the development of the fabrication of improved and reproducible nanobridge junctions fabricated by focused ion beam (FIB) milling from niobium thin films. Although the very low noise properties of nanobridge SQUIDs are well known, the nature of the milling process is little understood at the level of local superconducting properties. In this paper, we report the results for nanobridge Josephson devices and SQUIDs, which we believe are the first to be made by Xenon (Xe) FIB milling. Temperature-dependent current-voltage behavior, microwave-induced Shapiro steps, and SQUID response to magnetic fields have been measured. We make preliminary comparisons with nominally identical devices milled from Nb thin films using either Xe or Ga ions.

DOI
10.1109/tasc.2018.2854624

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Superconducting QUantum Interference Devices (SQUIDs) based on nanobridge junctions have shown increasing promise for single particle detection. This paper describes the development of the fabrication of improved and reproducible nanobridge junctions fabricated by focused ion beam (FIB) milling from niobium thin films. Although the very low noise properties of nanobridge SQUIDs are well known, the nature of the milling process is little understood at the level of local superconducting properties. In this paper, we report the results for nanobridge Josephson devices and SQUIDs, which we believe are the first to be made by Xenon (Xe) FIB milling. Temperature-dependent current-voltage behavior, microwave-induced Shapiro steps, and SQUID response to magnetic fields have been measured. We make preliminary comparisons with nominally identical devices milled from Nb thin films using either Xe or Ga ions.
Abstract SQUIDs (Superconducting Quantum Interference Devices) are macroscopic quantum devices capable of detecting and measuring a wide variety of physical parameters with unprecedented sensitivity. SQUIDs based on nanobridge weak links have shown increasing promise for quantum information and quantum sensing applications such as single spin detection. Focussed ion beam etched nanobridges have properties which can enhance nanoSQUID device performance but are often limited in terms of their non-hysteretic operating temperature range. Here we describe measurements of FIB-milled nanobridges, as single weak links or in nanoSQUIDs, made using either Ga, Xe or Ne ion beam sources. Their properties as a function of temperature, bias current, magnetic field and microwave power are measured and modelled according to a range of superconductivity models, as a means for improved understanding of the associated nanobridge parameters. We further propose techniques to extend the non-hysteretic operating temperature range of the devices.
The requirements of quantum metrology and nanoscience are driving the need for single-particle detection capability across a wide variety of physics areas, including quantum information processing, single-photon detection, nanoelectromechanical systems, nanomagnetism and spintronics. The single particles to be detected include atoms, molecules, photons, spins and even phonons, in the future. Nanoscale superconducting quantum interference devices (nanoSQUIDs) represent a new manifestation of an old but exciting superconducting technology which addresses some of these requirements. In this paper we describe a straightforward approach to fabricating Nb microbridge weak links using combined optical lithography and focused ion beams which may be used to fabricate nanoSQUIDs. The devices show non-hysteretic current?voltage characteristics and demonstrate very low noise, even at operating temperatures above 4.2?K. To improve our understanding of the superconducting properties of the Josephson microbridge/nanobridge junctions which have proved very successful in realizing low noise nanoSQUIDs we have carried out a combination of investigations. These include cryogenic resistance versus temperature (R(T)) and current?voltage characteristic measurements, atomic force microscope scans, controlled gallium (Ga) ion milling and implantation, and ion beam track modelling of these Josephson devices and Nb thin films.
DC SQUIDs with outer loop size ∼10 μmx 10 μm have been fabricated with nanobridge Josephson junctions in thin Niobium films (25, 100 and 200 nm) using either electron beam or focused ion beam techniques. Such SQUIDs are ideally suited to incorporate into the centre strip of a superconducting coplanar waveguide. The current-voltage characteristics and magnetic field modulation of the SQUIDs are compared for the two methods. The temperature dependence of the critical current is quite linear for the e-beam devices whilst the focused ion beam devices fit an exponential. Here we also investigate trimming methods to reduce the critical currents of the nanojunctions fabricated in the thicker films, in order to improve the SQUID parameters at lower temperatures.
We report here recent work at the U.K. National Physical Laboratory on developing nanoscale SQUIDs using Dayem bridge Josephson junctions. The advantages are simplicity of fabrication, exceptional low-noise performance, toward the quantum limit, and a range of novel applications. Focused ion beam patterned Nb SQUID, possessing exceptionally low noise (~200 nΦ0/Hz1/2above 1 kHz), and operating above 4.2 K can be applied to measurement of nanoscale magnetic objects or coupled to nanoelectromechanical resonators, as well as single particle detection of photons, protons, and ions. The limited operating temperature range may be extended by exposing the Dayem bridges to carefully controlled ion beam implantation, leading to nonreversible changes in junction transition temperature.
We have studied low-temperature electrical transport properties of nanoscale Nb∕(Al–)Al2O3∕Nb and NbN∕AlN∕NbN Josephson junctions (JJs) fabricated by focused-ion-beam (FIB) milling. This FIB fabrication process yields high-quality JJs whose superconducting gap energy agrees with the bulk value. In this paper, we report the improvement in the precision of the fabrication technology by employing a weaker ion beam current and by introducing a step of XeF2-gas-assisted milling, which allowed us to reduce the anodization voltage. For Nb JJs, we measured the current-voltage (I-V) characteristics of single-electron transistors (SETs) and examined the current observed within the superconducting energy gap. At finite voltages, we observed current peaks due to the Josephson-quasiparticle (JQP) cycle. Based on the JQP-peak positions, we estimated the charging energy Ec of the SETs. For all SETs, Ec∕kB is larger than 1K, which is consistent with 0.1×0.1μm2 junctions. We also analyzed the superconducting critical current at zero voltage. The ratio Ic∕Ic0 depended on the junction size, where Ic is the measured critical current and Ic0 is the theoretical one. The I-V curves of NbN single Josephson junctions also depended on the junction size, and they were qualitatively different, especially around the energy gap. We will discuss the possible origins for the junction-size dependence.
Nano-SQUIDs which can be the readout for inductive superconducting transition edge detectors (ISTED) were fabricated on monolayer niobium (Nb) film by focus ion beam (FIB) milling. The dimension of the nanobridges which formed the junctions was less than 60 nm and the diameter of the loop was 20 μm, The properties of this nano-SQUID were investigated. The design of ISTED was introduced and the transition temperature (Tc) of the absorbing layer was adjusted by both the thickness and the proportion Si doping of Nb.