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Journal of Physics Conference Series

Investigation of NanoSQUIDs Fabricated with a Range of Focused Ion Beam Sources

Elias Polychroniou, John C. Gallop, Tom Godfrey, David Cox, George Long, J Chen, Edward J. Romans, L Hao

Published Jun 1, 2020• 8 citations
Publisher

Abstract

Abstract SQUIDs (Superconducting Quantum Interference Devices) are macroscopic quantum devices capable of detecting and measuring a wide variety of physical parameters with unprecedented sensitivity. SQUIDs based on nanobridge weak links have shown increasing promise for quantum information and quantum sensing applications such as single spin detection. Focussed ion beam etched nanobridges have properties which can enhance nanoSQUID device performance but are often limited in terms of their non-hysteretic operating temperature range. Here we describe measurements of FIB-milled nanobridges, as single weak links or in nanoSQUIDs, made using either Ga, Xe or Ne ion beam sources. Their properties as a function of temperature, bias current, magnetic field and microwave power are measured and modelled according to a range of superconductivity models, as a means for improved understanding of the associated nanobridge parameters. We further propose techniques to extend the non-hysteretic operating temperature range of the devices.

DOI
10.1088/1742-6596/1559/1/012015

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Abstract SQUIDs (Superconducting Quantum Interference Devices) are macroscopic quantum devices capable of detecting and measuring a wide variety of physical parameters with unprecedented sensitivity. SQUIDs based on nanobridge weak links have shown increasing promise for quantum information and quantum sensing applications such as single spin detection. Focussed ion beam etched nanobridges have properties which can enhance nanoSQUID device performance but are often limited in terms of their non-hysteretic operating temperature range. Here we describe measurements of FIB-milled nanobridges, as single weak links or in nanoSQUIDs, made using either Ga, Xe or Ne ion beam sources. Their properties as a function of temperature, bias current, magnetic field and microwave power are measured and modelled according to a range of superconductivity models, as a means for improved understanding of the associated nanobridge parameters. We further propose techniques to extend the non-hysteretic operating temperature range of the devices.
Superconducting QUantum Interference Devices (SQUIDs) based on nanobridge junctions have shown increasing promise for single particle detection. This paper describes the development of the fabrication of improved and reproducible nanobridge junctions fabricated by focused ion beam (FIB) milling from niobium thin films. Although the very low noise properties of nanobridge SQUIDs are well known, the nature of the milling process is little understood at the level of local superconducting properties. In this paper, we report the results for nanobridge Josephson devices and SQUIDs, which we believe are the first to be made by Xenon (Xe) FIB milling. Temperature-dependent current-voltage behavior, microwave-induced Shapiro steps, and SQUID response to magnetic fields have been measured. We make preliminary comparisons with nominally identical devices milled from Nb thin films using either Xe or Ga ions.
The requirements of quantum metrology and nanoscience are driving the need for single-particle detection capability across a wide variety of physics areas, including quantum information processing, single-photon detection, nanoelectromechanical systems, nanomagnetism and spintronics. The single particles to be detected include atoms, molecules, photons, spins and even phonons, in the future. Nanoscale superconducting quantum interference devices (nanoSQUIDs) represent a new manifestation of an old but exciting superconducting technology which addresses some of these requirements. In this paper we describe a straightforward approach to fabricating Nb microbridge weak links using combined optical lithography and focused ion beams which may be used to fabricate nanoSQUIDs. The devices show non-hysteretic current?voltage characteristics and demonstrate very low noise, even at operating temperatures above 4.2?K. To improve our understanding of the superconducting properties of the Josephson microbridge/nanobridge junctions which have proved very successful in realizing low noise nanoSQUIDs we have carried out a combination of investigations. These include cryogenic resistance versus temperature (R(T)) and current?voltage characteristic measurements, atomic force microscope scans, controlled gallium (Ga) ion milling and implantation, and ion beam track modelling of these Josephson devices and Nb thin films.
The increasing demands of quantum metrology and nanoscience are driving the requirements for single particle detection capability across a wide variety of physics applications, including QIP, single photon detection, NEMS, nanomagnetism and spintronics. NanoSQUIDs represent a new manifestation of an old but exciting superconducting technology which addresses some of these requirements. We will describe a straightforward approach to fabricating Nb microbridge weak-links which may be used in nanoscale SQUIDs. These devices have demonstrated very low noise, even at operating temperatures above 4.2 K. We will also describe the performance of prototype devices made using this technique for energy resolving single photon detection, nanoparticle spin detection and NEMS resonator readout.
Nanoscale Superconducting QUantum Interference Devices (SQUIDs) have spin sensitivities approaching that required to detect the flip of a single spin in close proximity. There is considerable interest in developing them for measuring the properties of small spin populations in magnetic systems. It is desirable that such measurements can be realised at sub-kelvin temperatures thereby allowing the study of magnetic systems that undergo phase changes at such temperatures. However, most nanoscale SQUIDs use nanobridges as the Josephson elements which limits the operating range to temperatures close to the transition temperature of the device. Well below this, the current-phase relation can become non-sinusoidal, and hot spots arising from the large critical current lead to hysteretic I-V characteristics. To extend the temperature range downwards, we have developed a range of nanoSQUIDs fabricated from alternative materials with lower transition temperatures including Ti/Au and Al/Ag bilayers patterned using lift-off and e-beam lithography (EBL). We report on their I-V characteristics, noise performance and behaviour in applied magnetic fields at temperatures down to 60 mK. We discuss theoretical analysis and computer modelling of the heat flow in the nanobridge structure, and consider the effects of bank geometry and kinetic inductance on the overall device performance. Finally, we present measurements of several magnetic systems: control lines, superconducting islands and ground planes and discuss the feasibility of magnetic measurements of novel materials of interest, including the heterointerface between lanthanium aluminate and strontium titanate.
Science and industry demand ever more sensitive measurements on ever smaller systems, as exemplified by spintronics, nanoelectromechanical system, and spin-based quantum information processing, where single electronic spin detection poses a grand challenge. Superconducting quantum interference devices (SQUIDs) have yet to be effectively applied to nanoscale measurements. Here, we show that a simple bilayer deposition route, combining photolithography with focused ion beam patterning, produces high performance nanoscale SQUIDs. We present results of noise measurements on these nanoSQUIDs which correspond to a magnetic flux sensitivity of around 0.2μΦ0∕Hz1∕2. This represents one of the lowest noise values achieved for a SQUID device operating above 1K.
Superconducting quantum interference devices (SQUIDs) incorporating thin film nanobridges as weak links have sensitivities approaching that required for single spin detection at 4.2 K. However, due to thermal hysteresis they are difficult to operate at much lower temperatures which hinder their application to many quantum measurements. To overcome this, we have developed nanoscale SQUIDs made from titanium-gold proximity bilayers. We show that their electrical properties are consistent with a theoretical model developed for heat flow in bilayers and demonstrate that they enable magnetic measurements to be made on a sample at system temperatures down to 60 mK.