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International Conference on Solid State Devices and Materials (SSDM)

Josephson Full Adder Circuit Using Four-Junction Logic(4JL) Gate

Hiroshi Nakagawa, Eiichi Sogawa, S. Takada, Hisao Hayakawa

Published Aug 25, 1982• 1 citation
Publisher
DOI
10.7567/ssdm.1982.c-2-7

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In this study, we designed, fabricated, and experimentally tested a Josephson latching driver (JLD), a superconductor-to-semiconductor interface circuit for use in Josephson-CMOS hybrid memory, utilizing a 10-kA/cm2Nb process. The JLD is composed of a voltage driver known as a Suzuki stack and a Josephson four-junction logic (4JL) gate that serves as a preamplifier. The basic structure is based on our previous design using the 2.5-kA/cm2Nb process. In this study, we optimized the critical current and the load resistance of the 4JL gate, taking into account the parameters of the Josephson junctions in the 10-kA/cm2process. In experiments with the fabricated test circuit, we confirmed the correct operation of the JLD (bit error rate−11) at a target frequency of 5 GHz. We also confirmed the correct function of multichannel JLDs, which were used as interface circuits in Josephson-CMOS hybrid memory, in a low-frequency test.
For enhancing operating speed of a superconducting integrated circuit (IC), the device size must be reduced into the submicron level. For this purpose, we have introduced electron beam (EB) direct writing technique into the fabrication process of a Nb/AlOx/Nb Josephson IC. A two-layer (PMMA/(alpha) M-CMS) resist method called the portable conformable mask (PCM) method was utilized for having a high aspect ratio. The electron cyclotron resonance (ECR) plasma etching technique was utilized. We have fabricated micron or submicron-size Nb/AlOx/Nb Josephson junctions, where the size of the junction was varied from 2 micrometer to 0.5 micrometer at 0.1 micrometer intervals. These junctions were designed for evaluating the spread of the junction critical current. We achieved minimum-to-maximum Ic spread of plus or minus 13% for 0.81-micrometer-square (plus or minus 16% for 0.67-micrometer-square) 100 junctions spreading in 130- micrometer-square area. The size deviation of 0.05 micrometer was estimated from the spread values. We have successfully demonstrated a small-scale logic IC with 0.9-micrometer-square junctions having a 50 4JL OR-gate chain, where 4JL means four junctions logic family. The circuit was designed for measuring the gate delay. We obtained a preliminary result of the OR- gate logic delay, where the minimum delay was 8.6 ps/gate.