Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Superconductor Science and Technology

Low-Tcramp-type superconductor–insulator–superconductor Josephson junctions

M. Podt, Jakob Flokstra, Horst Rogalla

Published Nov 5, 2003• 3 citations
Publisher

Abstract

Superconductor–insulator–superconductor Josephson junctions with an area smaller than 1 µm 2 are increasingly used for many applications because of their low capacitances and short switching times. The characteristics of analogue and digital SQUIDs, for example, can be improved using small-area Josephson junctions. We have developed Nb/Al, AlO x /Al/Nb junctions based on an edge geometry. These low- T c ramp-type junctions allow sub-µm 2 junction areas using micrometre resolution photolithography. The experimental I – V characteristics of the ramp-type junctions showed non-hysteretic behaviour. Using these ramp-type junctions, the first series of dc SQUIDs have been successfully developed. The characteristics of the ramp-type junctions and the dc SQUIDs have been investigated both experimentally and by using numerical simulations. The white flux noise level of a dc SQUID based on ramp-type junctions with an area of 0.2 µm × 12 µm was measured to be .

DOI
10.1088/0953-2048/16/12/016

Related papers

Investigation of all niobium nano-SQUIDs based on sub-micrometer cross-type Josephson junctions

Matthias Schmelz, Y Matsui, Ronny Stolz +6 more

We report on the development of highly sensitive SQUIDs featuring sub-micrometer loop dimensions. The integration of high quality and low capacitance SIS Nb/AlO x /Nb cross-type Josephson tunnel junctions results in white flux noise levels as low as 66 n Φ 0 Hz −1/2 , well below state-of-the-art values of their Nb-based counterparts based on constriction type junctions. Estimation of the spin sensitivity of the best SQUIDs yield S μ 1/2 < 7 μ B Hz −1/2 in the white noise region, suitable for the investigation of small spin systems. We discuss fabrication challenges, show results on the electrical characterization of devices with various pickup loops, and describe options for further improvement, which may push the sensitivity of such devices even to single spin resolution.

arXiv:1501.00958•Superconductor Science and Technology•Nov 26, 2014•27 citations

Wideband low-noise integrated SQUID systems

M. Podt

Cover: Optical micrographs of (from left to right): Ramp-type Nb/Al,AlOx/Al/Nb Josephson junctions, a single dc SQUID of the prototype coded SQUID arrays and the first dc SQUID based on ramp-type Nb/Al,AlOx/Al/Nb junctions. Background: Sensor SQUID of a two-stage SQUID system.

•Jan 17, 2003•6 citations

Low noise DC SQUIDs fabricated in Nb-Al/sub 2/O/sub 3/-Nb trilayer technology

M. B. Ketchen, Manjul Bhushan, Steven B. Kaplan +1 more

The authors have designed, fabricated and tested all-refractory DC SQUIDs in Nb-Al/sub 2/O/sub 3/-Nb trilayer technology that have noise performance comparable to the best previously reported for any technology. A variety of SQUID designs were incorporated as part of a trilayer process development test vehicle. SQUID inductance, junction area, and resistive shunt geometry were varied in matrix fashion to give SQUIDs with near-optimum parameter values for a factor of five range in Josephson current density and shunt sheet resistance. The devices were fabricated using a selective niobium anodization with a minimum feature size of 2 mu m. The base electrode and Nb wiring were patterned with dry etching, and the junction areas were defined by anodization: the Ti resistors were patterned with a lift-off process. Current density on different wafers was varied from 400 to 1000 A/cm/sup 2/ with typical junction V/sub m/'s of 60 mV. The shunt sheet resistance was varied in the 1-5- Omega / Square Operator range. The noise was measured with an RF SQUID direct small-signal readout scheme. A 50-pH SQUID with 3- mu m/sup 2/, 16- mu A junctions and 14- Omega shunt resistors was shown to have an ideally low white noise of 1*10/sup -13/ Phi /sub 0//sup 2//Hz, a white to 1/f crossover frequency at 7 Hz, and a noise level less than 6*10/sup -12/ Phi /sub 0//sup 2//Hz at 0.1 Hz.

IEEE Transactions on Magnetics•Mar 1, 1991•24 citations

Superconductor-normal metal-superconductor process development for the fabrication of small Josephson junctions in ramp type configuration

R. Pöpel, Daniel Hagedorn, Thomas Weimann +2 more

At PTB, a fabrication process has been developed in SNS Nb/PdAu/Nb technology for the verification of small Josephson junctions (JJs) in the deep sub-micron range to enable the implementation of JJs as active elements in highly integrated superconducting circuits. Two steps of this technological development are described with regard to appropriately designed circuit layouts of JJ series arrays (JJAs), the first one in a conventional window type junction (WTJ) configuration and the second one in a ramp type junction (RTJ) configuration. Test circuits of JJAs containing up to 10 000 JJs have been fabricated and experimentally tested. In WTJ configuration, the circuits proved to be sensitive to external perturbing effects affecting the stability of circuit operation. In contrast to that, in RTJ configuration, the circuits realized showed correct function and a high grade of reliability of operation. To produce RTJ circuits, the technology parameters have been set to realize JJs with contact areas of A = 0.25 µm × 1.3 µm. At a thickness of the PdAu normal metal layer of d = 40 nm, the values achieved for the critical current density and for the product of critical current and normal state resistance are about jc = 200 kA cm-2 and about Ic RN = 21 µV.

Superconductor Science and Technology•Jan 19, 2000•20 citations

Nearly quantum limited nanoSQUIDs based on cross-type Nb/AlO x /Nb junctions

Matthias Schmelz, V Zakosarenko, Thomas Schönau +4 more

Abstract We report on the development of nearly quantum limited SQUIDs with miniature pickup loop dimensions. The implemented high quality and low capacitance cross-type Nb/AlO x /Nb Josephson junctions offer large I C R N -products and therefore enable an exceptional low noise level of the SQUIDs. Devices with loop dimensions of 1 μ m exhibit white flux noise levels as low as 45 nΦ 0 Hz −1/2 corresponding to an energy resolution ε of about 1 h at 4.2 K, with h being Planck’s constant. Moreover, the large usable voltage swings of the devices of about 300 μ V allow highly sensitive and easy single-stage operation while exploring nearly the intrinsic noise of the SQUIDs, beneficial e.g. for sensor arrays in SQUID microscopy.

arXiv:1705.06166•Superconductor Science and Technology•Nov 2, 2016•22 citations

Fabrication And Characterization Of High-Quality Nb/Al-AlO$_x$/Nb Cross-Type Josephson Tunnel Junctions Utilising CMP-based Planarisation Techniques

Alexander Stoll, Andreas Reifenberger, Daniel Hengstler +2 more

Josephson tunnel junctions (JJs) are the fundamental building blocks of today's most advanced superconducting electronic components, such as qubits and superconducting quantum interference devices (SQUIDs). Given the ongoing demand for scalability of these devices on the wafer-scale, it is crucial to control the fabrication process as precisely as possible to ensure uniform quality and reproducibility. Today, window-type JJs are often used in the production of DC SQUIDs and while they are reliable and reproducible, they suffer from alignment inaccuracies caused by photolithography and unavoidable parasitic capacitances, thus limiting the energy sensitivity of DC SQUIDs. These problems can be circumvented by producing JJs with cross-type geometry, which allows for smaller junction areas and eliminates parasitic capacitances. Here we discuss the fabrication of Nb/Al-AlOx/Nb-based cross-type JJs, where the trilayer is embedded in sputter-deposited SiO$_2$ to allow for planarisation of the structures and to ensure the reliable insulation of the sidewalls of the bottom electrode. Instead of lift-off processes that require a lot of time and potentially leave unwanted wings along the edges of microstructures behind that might compromise subsequent layers, we use chemical-mechanical polishing (CMP) for the removal of excess SiO$_2$. This is not only much faster, but produces smooth and uniform surfaces, which in turn effectively improves the reliability of our JJ production process resulting in a high yield of over $90\,\%$ on wafer-scale. In addition, we discuss the influence of fabrication details on the quality and electrical properties of our JJs with different junction areas down to $1\,\mathrm{μm} \times 1\,\mathrm{μm}$ distributed across the wafer and extract the junction specific quality parameters from their IV-characteristics and their Fraunhofer patterns.

arXiv:2609.08569•Aug 26, 2026•0 citations
Superconductor–insulator–superconductor Josephson junctions with an area smaller than 1 µm 2 are increasingly used for many applications because of their low capacitances and short switching times. The characteristics of analogue and digital SQUIDs, for example, can be improved using small-area Josephson junctions. We have developed Nb/Al, AlO x /Al/Nb junctions based on an edge geometry. These low- T c ramp-type junctions allow sub-µm 2 junction areas using micrometre resolution photolithography. The experimental I – V characteristics of the ramp-type junctions showed non-hysteretic behaviour. Using these ramp-type junctions, the first series of dc SQUIDs have been successfully developed. The characteristics of the ramp-type junctions and the dc SQUIDs have been investigated both experimentally and by using numerical simulations. The white flux noise level of a dc SQUID based on ramp-type junctions with an area of 0.2 µm × 12 µm was measured to be .
We report on the development of highly sensitive SQUIDs featuring sub-micrometer loop dimensions. The integration of high quality and low capacitance SIS Nb/AlO x /Nb cross-type Josephson tunnel junctions results in white flux noise levels as low as 66 n Φ 0 Hz −1/2 , well below state-of-the-art values of their Nb-based counterparts based on constriction type junctions. Estimation of the spin sensitivity of the best SQUIDs yield S μ 1/2 < 7 μ B Hz −1/2 in the white noise region, suitable for the investigation of small spin systems. We discuss fabrication challenges, show results on the electrical characterization of devices with various pickup loops, and describe options for further improvement, which may push the sensitivity of such devices even to single spin resolution.
The authors have designed, fabricated and tested all-refractory DC SQUIDs in Nb-Al/sub 2/O/sub 3/-Nb trilayer technology that have noise performance comparable to the best previously reported for any technology. A variety of SQUID designs were incorporated as part of a trilayer process development test vehicle. SQUID inductance, junction area, and resistive shunt geometry were varied in matrix fashion to give SQUIDs with near-optimum parameter values for a factor of five range in Josephson current density and shunt sheet resistance. The devices were fabricated using a selective niobium anodization with a minimum feature size of 2 mu m. The base electrode and Nb wiring were patterned with dry etching, and the junction areas were defined by anodization: the Ti resistors were patterned with a lift-off process. Current density on different wafers was varied from 400 to 1000 A/cm/sup 2/ with typical junction V/sub m/'s of 60 mV. The shunt sheet resistance was varied in the 1-5- Omega / Square Operator range. The noise was measured with an RF SQUID direct small-signal readout scheme. A 50-pH SQUID with 3- mu m/sup 2/, 16- mu A junctions and 14- Omega shunt resistors was shown to have an ideally low white noise of 1*10/sup -13/ Phi /sub 0//sup 2//Hz, a white to 1/f crossover frequency at 7 Hz, and a noise level less than 6*10/sup -12/ Phi /sub 0//sup 2//Hz at 0.1 Hz.
At PTB, a fabrication process has been developed in SNS Nb/PdAu/Nb technology for the verification of small Josephson junctions (JJs) in the deep sub-micron range to enable the implementation of JJs as active elements in highly integrated superconducting circuits. Two steps of this technological development are described with regard to appropriately designed circuit layouts of JJ series arrays (JJAs), the first one in a conventional window type junction (WTJ) configuration and the second one in a ramp type junction (RTJ) configuration. Test circuits of JJAs containing up to 10 000 JJs have been fabricated and experimentally tested. In WTJ configuration, the circuits proved to be sensitive to external perturbing effects affecting the stability of circuit operation. In contrast to that, in RTJ configuration, the circuits realized showed correct function and a high grade of reliability of operation. To produce RTJ circuits, the technology parameters have been set to realize JJs with contact areas of A = 0.25 µm × 1.3 µm. At a thickness of the PdAu normal metal layer of d = 40 nm, the values achieved for the critical current density and for the product of critical current and normal state resistance are about jc = 200 kA cm-2 and about Ic RN = 21 µV.
Abstract We report on the development of nearly quantum limited SQUIDs with miniature pickup loop dimensions. The implemented high quality and low capacitance cross-type Nb/AlO x /Nb Josephson junctions offer large I C R N -products and therefore enable an exceptional low noise level of the SQUIDs. Devices with loop dimensions of 1 μ m exhibit white flux noise levels as low as 45 nΦ 0 Hz −1/2 corresponding to an energy resolution ε of about 1 h at 4.2 K, with h being Planck’s constant. Moreover, the large usable voltage swings of the devices of about 300 μ V allow highly sensitive and easy single-stage operation while exploring nearly the intrinsic noise of the SQUIDs, beneficial e.g. for sensor arrays in SQUID microscopy.
Fabrication And Characterization Of High-Quality Nb/Al-AlOx_xx​/Nb Cross-Type Josephson Tunnel Junctions Utilising CMP-based Planarisation Techniques
Josephson tunnel junctions (JJs) are the fundamental building blocks of today's most advanced superconducting electronic components, such as qubits and superconducting quantum interference devices (SQUIDs). Given the ongoing demand for scalability of these devices on the wafer-scale, it is crucial to control the fabrication process as precisely as possible to ensure uniform quality and reproducibility. Today, window-type JJs are often used in the production of DC SQUIDs and while they are reliable and reproducible, they suffer from alignment inaccuracies caused by photolithography and unavoidable parasitic capacitances, thus limiting the energy sensitivity of DC SQUIDs. These problems can be circumvented by producing JJs with cross-type geometry, which allows for smaller junction areas and eliminates parasitic capacitances. Here we discuss the fabrication of Nb/Al-AlOx/Nb-based cross-type JJs, where the trilayer is embedded in sputter-deposited SiO2_22​ to allow for planarisation of the structures and to ensure the reliable insulation of the sidewalls of the bottom electrode. Instead of lift-off processes that require a lot of time and potentially leave unwanted wings along the edges of microstructures behind that might compromise subsequent layers, we use chemical-mechanical polishing (CMP) for the removal of excess SiO2_22​. This is not only much faster, but produces smooth and uniform surfaces, which in turn effectively improves the reliability of our JJ production process resulting in a high yield of over 90 %90\,\%90% on wafer-scale. In addition, we discuss the influence of fabrication details on the quality and electrical properties of our JJs with different junction areas down to 1 μm×1 μm1\,\mathrm{μm} \times 1\,\mathrm{μm}1μm×1μm distributed across the wafer and extract the junction specific quality parameters from their IV-characteristics and their Fraunhofer patterns.