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Superconductor Science and Technology

Fabrication of high-temperature superconductor single-flux-quantum circuits using a multilayer structure with a smooth surface

H. Wakana, Seiji Adachi, Koji Tsubone, Y. Tarutani, Ai Kamitani, Ken‐ichi Nakayama, Yoshihiro Ishimaru, K. Tanabe

Published Mar 16, 2006• 12 citations
Publisher

Abstract

We have developed a multilayer structure with a smooth surface and fabrication processes for HTS single-flux-quantum (SFQ) circuits. The multilayer structure with surface roughness Ra less than 2 nm, composed of a La0.2–Y0.9Ba1.9Cu3Ox ground plane and base electrode layer, and SrSnO3 insulating layers, was deposited by off-axis magnetron sputtering. We have fabricated interface-engineered junctions based on the multilayer structure using an La0.2–Yb0.9Ba1.9Cu3Ox counter-electrode layer prepared by pulsed laser deposition. The fabricated junctions exhibited excellent Josephson characteristics with a 1-σ spread in Ic as low as 8% for 1000 junctions. The sheet inductance values below 50 K were 0.8–1.0 pH per square. Operation of several elementary SFQ circuits including a toggle flip-flop, a confluence buffer, a set–reset flip-flop and other SFQ elements has been successfully demonstrated at 30–60 K.

DOI
10.1088/0953-2048/19/5/s31

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We have developed a multilayer structure with a smooth surface and fabrication processes for HTS single-flux-quantum (SFQ) circuits. The multilayer structure with surface roughness Ra less than 2 nm, composed of a La0.2–Y0.9Ba1.9Cu3Ox ground plane and base electrode layer, and SrSnO3 insulating layers, was deposited by off-axis magnetron sputtering. We have fabricated interface-engineered junctions based on the multilayer structure using an La0.2–Yb0.9Ba1.9Cu3Ox counter-electrode layer prepared by pulsed laser deposition. The fabricated junctions exhibited excellent Josephson characteristics with a 1-σ spread in Ic as low as 8% for 1000 junctions. The sheet inductance values below 50 K were 0.8–1.0 pH per square. Operation of several elementary SFQ circuits including a toggle flip-flop, a confluence buffer, a set–reset flip-flop and other SFQ elements has been successfully demonstrated at 30–60 K.
YBa2Cu3O7-x(YBCO) ramp-edge junction technologies have been developed for fabricating high-operating-temperature SFQ(Single Flux Quantum) circuits. The Ic(critical current) spread that is the key parameter for integrating junctions could be decreased to 8% for a 1000-junction array that was formed on a groundplane. The background technologies that enabled this uniform junction characteristic are precise control of the counter-electrode deposition-conditions and deposition of the extremely smooth multiplayer that showed the roughness as small as 2 nm. Based upon these ramp-edge junction technologies, oxide SFQ-circuit-elements were fabricated and their logic operations were investigated. SFQ circuit elements such as a confluence buffer, a set-reset flipflop, and a toggle flipflop have been fabricated and their logic operations were measured by using an SFQ-dc converter. Both toggle flipflops that have one output and two outputs have been fabricated. These circuits could be operated up to the temperature of near 60 K under finite operating margins. These experimental results enable us to further develop fuctional and much more integrated SFQ circuits.
We have developed the fabrication process, the circuit design technology, and the cryopackaging technology for high-Tc single flux quantum (SFQ) devices with the aim of application to an analog-to-digital (A/D) converter circuit for future wireless communication and a sampler system for high-speed measurements. Reproducibility of fabricating rampedge Josephson junctions with IcRn products above 1mV at 40K and small Ic spreads on a superconducting groundplane was much improved by employing smooth multilayer structures and optimizing the junction fabrication process. The separated base-electrode layout (SBL) method that suppresses the Jc spread for interface-modified junctions in circuits was developed. This method enabled low-frequency logic operations of various elementary SFQ circuits with relatively wide bias current margins and operation of a toggle-flip-flop (T-FF) above 200GHz at 40K. Operation of a 1:2 demultiplexer, one of main elements of a hybrid-type Σ-Δ A/D converter circuit, was also demonstrated. We developed a sampler system in which a sampler circuit with a potential bandwidth over 100GHz was cooled by a compact stirling cooler, and waveform observation experiments confirmed the actual system bandwidth well over 50GHz.
We have fabricated and measured high T/sub c/ superconductor single flux quantum 1-bit flux-counting analog-to-digital converters (ADCs). The ADCs were made with a multilayer all-epitaxial process which incorporates 10 edge SNS (superconductor-normal-superconductor) or step-edge grain boundary (SEGB) Josephson junctions with a YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// groundplane. The ADC consists of a quantizer connected to a Toggle flip-flop through a buffer-like stage. Direct readout of the flux state of the T flip-flop was made with a Read SQUID inductively coupled through a hole in the groundplane. The circuits were operated at 65 K and low speeds. The SNS circuits outperformed the SEGB circuits because of their higher readout voltages and tighter critical current spreads.
Single flux quantum (SFQ) circuit elements have been designed and fabricated using the YBa 2 Cu 3 O 7-δ ramp-edge junction technology. Logic operations of SFQ circuit elements, such as a toggle flip-flop (T-FF), a set-reset flip-flop (RS-FF), and a 96-junction Josephson transmission line (JTL), were successfully demonstrated, and dc supply current margins were confirmed up to temperatures higher than 30 K. The circuit layout was improved in order to suppress the critical current (I c ) spread that appears during the junction fabrication procedure. By employing the new circuit layout rule, correct operations at temperatures from 27 K to 34 K with dc supply current margins wider than ±7% were confirmed for the T-FF with a single output. Moreover, the maximum operating frequencies of T-FFs were measured to be 360GHz at 4.2K and 210GHz at 41K, which are substantially higher than the values for the circuits with the conventional layout. According to the simulation result, the maximum operating frequency at 40 K was expected to be approximately 50% of the characteristic frequency at a bit error rate (BER) less than 10 -6 .
We have developed a novel multilayer process for HTS-SFQ circuits adopting a NBCO groundplane and tin-oxide isolation layers, and fabricated an HTS-SFQ ring oscillator circuit including 21 Josephson junctions. The junctions on the buried groundplane exhibited excellent Josephson characteristics with a magnetic modulation of I/sub c/ exceeding 90%, and an I/sub c/R/sub n/ product of 0.75 mV at 30 K. The sheet inductance of the wiring layer at 30 K was evaluated to be 1.1 pH for the counter-electrode layer, and 1.3 pH for the base-electrode layer. We confirmed the correct operation of the 10-stage ring oscillator at 20-30 K. The maximum dc output voltage of the ring oscillator was 0.06 mV at 30 K and 0.12 mV at 20 K, indicating the signal delay per stage of 3.4 ps and 1.8 ps, respectively.
We report a developed single-flux-quantum (SFQ) circuit fabrication process for vertically-stacked interface-treated Josephson junctions by using high-temperature superconductor (HTS) and also report the 500 GHz operation of a toggle flip-flop (TFF). As the first trial of the circuit operation, we fabricated TFF circuits, because TFF is used as a benchmark circuit to indicate potential of the circuit operating speed. To develop the circuit fabrication process, we utilized the counter YBCO layer as a wiring layer. We obtained resistively-shunted-junction behavior of single junction fabricated by new process. In addition, we observed current-voltage characteristics at the input port and the output port of the TFF, and confirmed that the input voltage coincided with twice the output voltage up to 1.1 mV at 4.2 K, which corresponds to the correct operation up to 500 GHz. This frequency is the highest value in HTS circuits ever observed, which suggests the high potential of the vertically-stacked JJs for the circuit operation.