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Gain bandwidth of NbN Heterodyne Hot Electron Bolometer Superconducting Mixers made on thin SiO2/Si3N4 membrane

Vladimir Drakinskiy, Jean Baubert, Serguei Cherednichenko

Published May 1, 2006• 0 citations
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Abstract

We present results of the gain bandwidth investigation\nof NbN HEB mixers made on 1.4 µm thick SiO2/Si3N4\nstress-less membrane, and bulk-Si/SiO2/Si3N4. We have found\nthat the gain bandwidth of the devices made on these substrates is 0.6-0.9 GHz while on bare-Si it is 3.5 GHz. The final objective of this work is to process membrane based NbN HEB mixers for a 4x4 pixel heterodyne camera for 2.5 and 4.7 THz. SHAHIRA (Submm Heterodyne Array for HIgh speed Radio Astronomy) is a project supported by ESA.

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The performance of a NbN based phonon-cooled Hot Electron Bolometric (HEB) quasioptical mixer is investigated in the 0.65-3.12 THz frequency range. The device is made from a 3 nm thick NbN film on high resistivity Si and integrated with a planar spiral antenna on the same substrate. The in-plane dimensions of the bolometer strip are 0.2/spl times/2 /spl mu/m. The best results of the DSB noise temperature at 1.5 GHz IF frequency obtained with one device are: 1300 K at 650 GHz, 4700 K at 2.5 THz and 10000 K at 3.12 THz. The measurements were performed at 4.5 K ambient temperature. The amount of local oscillator (LO) power absorbed in the bolometer is about 100 nW. The mixer is linear to within 1 dB compression up to the signal level 10 dB below that of the LO. The intrinsic single sideband conversion gain measured at 650 GHz is -9 dB, the total conversion gain is -14 dB.

IEEE Transactions on Applied Superconductivity•Jun 1, 1999•6 citations
We present results of the gain bandwidth investigation\nof NbN HEB mixers made on 1.4 µm thick SiO2/Si3N4\nstress-less membrane, and bulk-Si/SiO2/Si3N4. We have found\nthat the gain bandwidth of the devices made on these substrates is 0.6-0.9 GHz while on bare-Si it is 3.5 GHz. The final objective of this work is to process membrane based NbN HEB mixers for a 4x4 pixel heterodyne camera for 2.5 and 4.7 THz. SHAHIRA (Submm Heterodyne Array for HIgh speed Radio Astronomy) is a project supported by ESA.
We report in this paper a new concept for 2.7 THz superconducting Niobium nitride (NbN) Hot-Electron Bolometer mixer (HEB). The membrane process was developped for space telecommnunication applications a few years ago and the HEB mixer concept is now considered as the best choice for low-noise submillimeter-wave frequency heterodyne receivers. The idea is then to join these two technologies. The novel fabrication scheme is to fabricate a NbN HEB mixer on a 1 μm thick stress-less Si3N4/SiO2 membrane. This seems to present numerous improvements concerning : use at higher RF frequencies, power coupling efficiency, HEB mixer sensitivity, noise temperature, and space applications. This work is to be continued within the framework of an ESA TRP project, a 2.7 THz heterodyne camera with numerous applications including a SOFIA airborne receiver. This paper presents the whole fabrication process, the validation tests and preliminary results. Membrane-based HEB mixer theory is currently being investigated and further tests such as heterodyne and Fourier transform spectrometry measurement are planed shortly.
A 16 pixel heterodyne receiver for 2.5 THz has been developed based on NbN superconducting hot-electron bolometer (HEB) mixers. The receiver uses a quasioptical RF coupling approach where HEB mixers are integrated into double dipole antennas on 1.5μm thick Si3N4/SiO2 membranes. Spherical mirrors (one per pixel) and backshort distance from the antenna have been used to design the output mixer beam profile. The camera design allows all 16 pixel IF readout in parallel. The gain bandwidth of the HEB mixers on Si3N4/SiO2 membranes was found to be 0.7÷0.9 GHz, which is much smaller than for similar devices on silicon. Application of buffer layers and use of alternative types of membranes (e.g. silicon-on-insulator) is under investigation.
A 16 pixel heterodyne receiver for 2.5 THz has been developed based on NbN superconducting hot-electron bolometer (HEB) mixers. The receiver uses a quasioptical RF coupling approach where HEB mixers are integrated into double dipole antennas on 1.5µm thick Si3N4/SiO2 membranes. Spherical mirrors (one per pixel) and backshort distance from the antenna have been used to design the output mixer beam profile. The camera design allows all 16 pixel IF readout in parallel. The gain bandwidth of the HEB mixers on Si3N4/SiO2 membranes was found to be 0.7÷0.9 GHz, which is much smaller than for similar devices on silicon. Application of buffer layers and use of alternative types of membrandes (e.g. silicon-on-insulator) is under investigation.
We present recently obtained values for gain bandwidth of NbN HEB mixers for different substrates and film thicknesses and for MgO buffer layer on Si at LO frequency of 0.85-1 THz. The maximal bandwidth, 5.2 GHz, was achieved for the device on MgO buffer layer on Si with a 2 nm thick NbN film. Functional devices based on NbN films of such thickness were fabricated for the first time due to an improvement of superconducting properties of NbN film deposited on MgO buffer layer on Si substrate. Introduction. In the last years, the development of HEB mixers has reached such a high level that these devices can be successfully utilized in heterodyne receivers of THz frequency range. Their high sensitivity and low LO power make them suitable for radioastronomic observations on space- and airbom platforms. An NbN HEB mixer seems to be a
Superconducting Hot Electron Bolometer mixers offer the highest sensitivity for heterodyne detections at frequencies above 1 THz. Important efforts have been made these recent years to further increase the HEB mixers' sensitivity and working frequency and also to design multi-pixel configuration. We present in this paper the developments of a non-standard quasi-optical membrane based HEB mixer where the commonly used focusing element, the silicon lens, is replaced by a micro-mirror and a membrane-based back-short. This configuration offers many advantages: easier processing for circuits at very high frequencies, better noise temperature brought by lower RF coupling loss and higher gain of the antenna. This design is also considered very attractive for multi-pixel receivers. The devices are made of phonon-cooled NbN HEB mixers processed on 1.4 μm thick stress-less Si3N4/Si02 membrane. Quasi-optical designs have been made for frequencies at 600 GHz and 2.5 THz. The design and the device fabrication process will be discussed and both DC and RF measurements at 600 GHz will be presented.
The performance of a NbN based phonon-cooled Hot Electron Bolometric (HEB) quasioptical mixer is investigated in the 0.65-3.12 THz frequency range. The device is made from a 3 nm thick NbN film on high resistivity Si and integrated with a planar spiral antenna on the same substrate. The in-plane dimensions of the bolometer strip are 0.2/spl times/2 /spl mu/m. The best results of the DSB noise temperature at 1.5 GHz IF frequency obtained with one device are: 1300 K at 650 GHz, 4700 K at 2.5 THz and 10000 K at 3.12 THz. The measurements were performed at 4.5 K ambient temperature. The amount of local oscillator (LO) power absorbed in the bolometer is about 100 nW. The mixer is linear to within 1 dB compression up to the signal level 10 dB below that of the LO. The intrinsic single sideband conversion gain measured at 650 GHz is -9 dB, the total conversion gain is -14 dB.