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Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Membrane-based HEB mixer for THz applications

Jean Baubert, Morvan C. Salez, Y. Delorme, P. Pons, Gregory N Gol'tsman, Harald Merkel, B. Leconte

Published Apr 25, 2003• 2 citations
Publisher

Abstract

We report in this paper a new concept for 2.7 THz superconducting Niobium nitride (NbN) Hot-Electron Bolometer mixer (HEB). The membrane process was developped for space telecommnunication applications a few years ago and the HEB mixer concept is now considered as the best choice for low-noise submillimeter-wave frequency heterodyne receivers. The idea is then to join these two technologies. The novel fabrication scheme is to fabricate a NbN HEB mixer on a 1 μm thick stress-less Si3N4/SiO2 membrane. This seems to present numerous improvements concerning : use at higher RF frequencies, power coupling efficiency, HEB mixer sensitivity, noise temperature, and space applications. This work is to be continued within the framework of an ESA TRP project, a 2.7 THz heterodyne camera with numerous applications including a SOFIA airborne receiver. This paper presents the whole fabrication process, the validation tests and preliminary results. Membrane-based HEB mixer theory is currently being investigated and further tests such as heterodyne and Fourier transform spectrometry measurement are planed shortly.

DOI
10.1117/12.499158

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•Jan 1, 2001•4 citations
We report in this paper a new concept for 2.7 THz superconducting Niobium nitride (NbN) Hot-Electron Bolometer mixer (HEB). The membrane process was developped for space telecommnunication applications a few years ago and the HEB mixer concept is now considered as the best choice for low-noise submillimeter-wave frequency heterodyne receivers. The idea is then to join these two technologies. The novel fabrication scheme is to fabricate a NbN HEB mixer on a 1 μm thick stress-less Si3N4/SiO2 membrane. This seems to present numerous improvements concerning : use at higher RF frequencies, power coupling efficiency, HEB mixer sensitivity, noise temperature, and space applications. This work is to be continued within the framework of an ESA TRP project, a 2.7 THz heterodyne camera with numerous applications including a SOFIA airborne receiver. This paper presents the whole fabrication process, the validation tests and preliminary results. Membrane-based HEB mixer theory is currently being investigated and further tests such as heterodyne and Fourier transform spectrometry measurement are planed shortly.
Superconducting Hot Electron Bolometer mixers offer the highest sensitivity for heterodyne detections at frequencies above 1 THz. Important efforts have been made these recent years to further increase the HEB mixers' sensitivity and working frequency and also to design multi-pixel configuration. We present in this paper the developments of a non-standard quasi-optical membrane based HEB mixer where the commonly used focusing element, the silicon lens, is replaced by a micro-mirror and a membrane-based back-short. This configuration offers many advantages: easier processing for circuits at very high frequencies, better noise temperature brought by lower RF coupling loss and higher gain of the antenna. This design is also considered very attractive for multi-pixel receivers. The devices are made of phonon-cooled NbN HEB mixers processed on 1.4 μm thick stress-less Si3N4/Si02 membrane. Quasi-optical designs have been made for frequencies at 600 GHz and 2.5 THz. The design and the device fabrication process will be discussed and both DC and RF measurements at 600 GHz will be presented.
Superconductive hot-electron bolometer (HEB) mixers have been built and tested in the frequency range 1.1-2.5 THz. The mixer device is a 0.15-03 /spl mu/m microbridge made from a 10 nm thick Nb film. This device employs diffusion as a cooling mechanism for hot electrons. The double sideband noise temperature was measured to be /spl les/3000 K at 2.5 THz and the mixer IF bandwidth is /spl ap/9-10 GHz for a 0.1 /spl mu/m long device. The local oscillator (LO) power dissipated in the HEB microbridge was 20-100 nW. Further improvement of the mixer characteristics can be potentially achieved by using Al microbridges. The advantages and parameters of such devices are evaluated The HEB mixer Is a primary candidate for ground based, airborne and spaceborne heterodyne instruments at THz frequencies. HEB receivers are planned for use on the NASA Stratospheric Observatory for Infrared Astronomy (SOFIA) and the ESA Far Infrared and Submillimeter Space Telescope (FIRST). The prospects of a submicron-size YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// (YBCO) HEB are also discussed. The expected LO power of 1-10 /spl mu/W and SSB noise temperature of /spl ap/2000 K may make this mixer attractive for various remote sensing applications.
We present results of the gain bandwidth investigation\nof NbN HEB mixers made on 1.4 µm thick SiO2/Si3N4\nstress-less membrane, and bulk-Si/SiO2/Si3N4. We have found\nthat the gain bandwidth of the devices made on these substrates is 0.6-0.9 GHz while on bare-Si it is 3.5 GHz. The final objective of this work is to process membrane based NbN HEB mixers for a 4x4 pixel heterodyne camera for 2.5 and 4.7 THz. SHAHIRA (Submm Heterodyne Array for HIgh speed Radio Astronomy) is a project supported by ESA.
To put space-based and airborne heterodyne instruments into operation at frequencies above 1 THz the superconducting NbN hot-electron bolometer (HEB) will be incorporated into heterodyne receiver as a mixer. At frequencies above 1.3 THz the sensitivity of the NbN HEB mixers outperform the one of the Schottky diodes and SIS-mixers, and the receiver noise temperature of the NbN HEB mixers increase with frequency. In this paper we present the results of the noise temperature measurements within one batch of NbN HEB mixers based on 3.5 mn thick superconducting NbN film grown on Si substrate with MgO buffer layer at the LO frequencies 2.5 THz and 3.8 THz.
Superconductive hot-electron bolometer (HEB) mixers have been built and tested in the frequency range from 1.1 THz to 2.5 THz. The mixer device is a 0.15 - 0.3 micrometer microbridge made from a 10 nm thick Nb film. This device employs diffusion as a cooling mechanism for hot electrons. The double sideband noise temperature was measured to be less than or equal to 3000 K at 2.5 THz and the mixer IF bandwidth is expected to be at least 10 GHz for a 0.1 micrometer long device. The local oscillator (LO) power dissipated in the HEB microbridge was 20 - 100 nW. Further improvement of the mixer characteristics can be potentially achieved by using Al microbridges. The advantages and parameters of such devices are evaluated. The HEB mixer is a primary candidate for ground based, airborne and spaceborne heterodyne instruments at THz frequencies. HEB receivers are planned for use on the NASA Stratospheric Observatory for Infrared Astronomy (SOFIA) and the ESA Far Infrared and Submillimeter Space Telescope (FIRST). The prospects of a submicron-size YBa2Cu3O7-(delta ) (YBCO) HEB are discussed. The expected LO power of 1 - 10 (mu) W and SSB noise temperature of approximately equals 2000 K may make this mixer attractive for various remote sensing applications.
Experimental work on the development of a quasi-optical heterodyne receiver for the THz frequency range is reported. The mixing device is a superconducting hot electron bolometer (HEB) made from ultrathin, d = 3 - 5 nm, niobium nitride (NbN) films. Work described in this thesis comprises: The design of a prototype receiver using quasi-optical coupling. Device fabrication involving reactive magnetron sputtering of NbN films and lithographic definition of the antenna integrated mixer. An investigation of the receiver performance at frequencies between 0.6 THz and 2.5 THz. The best performance is obtained with HEB mixers made from NbN films with a thickness d = 3-3.5 nm and a critical temperature T c = 9 - 9.5 K. Double-side band receiver noise temperatures are 530 K at 0.6 THz, 650 K at 1.6 THz and 1100 K at 2.5 THz. Corrected for losses in the receiver input optics, these values amount to only 10 times the theoretical quantum limit. MgO as the substrate material has been shown to provide improved acoustic coupling between NbN film and the substrate compared to other materials such as Si or sapphire. A maximum IF gain bandwidth of 4.5 GHz has been measured under the same operating conditions which yield lowest noise temperature. The local oscilltor power requirement is ~250 nW absorbed in the bolometer. Quasi-optically coupled HEB mixers have become the device-of-choice for radio astronomical applications in the frequency regime at and above 1 THz.