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arXiv:2206.14784 · Review of Scientific Instruments

Fast and high-yield fabrication of axially symmetric ion-trap needle electrodes via two step electrochemical etching

Nikhil Kotibhaskar, Noah Greenberg, Sainath Motlakunta, Chung-You Shih, Rajibul Islam

Published Mar 1, 2023• 0 citations
arXivHTMLPDF

Abstract

Despite the progress in building sophisticated microfabricated ion traps, Paul traps employing needle electrodes retain their significance due to the simplicity of fabrication while producing high-quality systems suitable for quantum information processing, atomic clocks, etc. For low noise operations such as minimizing "excess micromotion," needles should be geometrically straight and aligned precisely with respect to each other. Self-terminated electrochemical etching, previously employed for fabricating ion-trap needle electrodes, employs a sensitive and time-consuming technique, resulting in a low success rate of usable electrodes. Here, we demonstrate an etching technique for the quick fabrication of straight and symmetric needles with a high success rate and a simple apparatus with reduced sensitivity to alignment imperfections. The novelty of our technique comes from using a two-step approach employing turbulent etching for fast shaping and slow etching/polishing for subsequent surface finish and tip cleaning. Using this technique, needle electrodes for an ion trap can be fabricated within a day, significantly reducing the setup time for a new apparatus. The needles fabricated via this technique have been used in our ion trap to achieve trapping lifetimes of several months.

DOI
10.1063/5.0108425

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Despite the progress in building sophisticated microfabricated ion traps, Paul traps employing needle electrodes retain their significance due to the simplicity of fabrication while producing high-quality systems suitable for quantum information processing, atomic clocks, etc. For low noise operations such as minimizing "excess micromotion," needles should be geometrically straight and aligned precisely with respect to each other. Self-terminated electrochemical etching, previously employed for fabricating ion-trap needle electrodes, employs a sensitive and time-consuming technique, resulting in a low success rate of usable electrodes. Here, we demonstrate an etching technique for the quick fabrication of straight and symmetric needles with a high success rate and a simple apparatus with reduced sensitivity to alignment imperfections. The novelty of our technique comes from using a two-step approach employing turbulent etching for fast shaping and slow etching/polishing for subsequent surface finish and tip cleaning. Using this technique, needle electrodes for an ion trap can be fabricated within a day, significantly reducing the setup time for a new apparatus. The needles fabricated via this technique have been used in our ion trap to achieve trapping lifetimes of several months.
We present the design, fabrication, and characterization of a monolithic, segmented, three-dimensional linear Paul ion trap for quantum science applications. The trap is fabricated from a single fused-silica block using selective laser-induced etching (SLE) and is subsequently metallized, forming electrodes isolated by self-shadowing trench structures without the need for layer alignment or external shadow masks. The segmented electrodes allow for shaping of the axial potential, enabling the creation of anharmonic potential wells, such as those required for equidistant ion strings. In addition, they enable shuttling and splitting of ion chains. We discuss key design choices and SLE-imposed constraints on achievable feature sizes, and evaluate electron-beam evaporation and magnetron sputtering as metallization approaches. Across two independent experimental setups, we demonstrate stable trapping and control of linear chains of up to 33 40^{40}40Ca+^++ ions, including approximately equally spaced configurations. The measured secular frequencies in both traps agree with boundary-element simulations at the percent level, with residual deviations attributed to stray electric fields in the presence of anharmonic axial potentials, rather than fabrication imperfections. We measure axial micromotion field strengths on the order of 100 V/m along the trap axis, in approximate agreement with simulations. For radial mode frequencies near 2 MHz and an ion-electrode distance of 300 um, we measure heating rates of the order of 10 quanta/s in all but one motional mode, which is elevated by a technical noise source. The presented trap design is thus suitable for a wide range of quantum science applications and demonstrates the viability of SLE for the fabrication of finely segmented, monolithic, three-dimensional ion traps.
Trapped ions in Paul traps (radio frequency ion traps) are a promising candidate for the realization of a quantum computer. To date, experimental demonstrations of quantum computing and information processing with trapped ions have been limited to small numbers of quantum bits (qubits). The most prominent challenge to realise ion-trap quantum computation is to scale the system and control a large number of trapped ions coherently. Surface-electrode ion trap designs which are amenable to various microfabrication techniques offer a path to achieve this. In this work, design, fabrication and key operations of two types of surface-electrode ion traps, i.e. a Y-junction trap and a two-dimensional (2D) hexagonal lattice trap developed towards scaling ion-trap architectures, are presented. The steps involved in the fabrication of the ion-trap devices included photolithography, wet etch (hydrofluoric acid etch) and dry etch (deep reactive ion and inductively coupled plasma etching), and metal evaporation. The devices were fabricated on SOI substrates with different buried oxide thicknesses (i.e. 5 µm and 10 µm) and different metals for the trap electrodes (i.e. gold and aluminium). An extremely high-breakdown voltage up to 1 kV was measured in vacuum for the SOI-built test devices with a 10 µm-thick buried oxide formed by oxide film-to-oxide film bonding process. This is attributed to the deep V-shaped undercut profile of the buried oxide layer which resulted in a large breakdown path length, and so mitigating surface breakdown effects. Owing to the V-shaped undercut profile, the surface breakdown voltage was improved by 15% for the devices fabricated on SOI substrates with a 10 µm-thick buried oxide. In the first experiment, the demonstration of ytterbium (174Yb+) ion trapping in the 2D hexagonal lattice trap is achieved with a relatively long lifetime of a laser-cooled ion up to 90 minutes and ≤ 5 minutes without cooling in ultra-high vacuum system. The 2D lattice trap design allows for reliable trapping of 2D ion lattices, rudimentary shuttling between lattice sites and deterministic introducing of defects into the ion lattice. Based on all these abilities, such a 2D lattice trap with the predicted reduction of lattice spacing down to 32 µm can be configured as a versatile architecture for 2D quantum simulations with trapped ions. In the second experiment, microparticle trapping in the 2D lattice trap, performed in air, is achieved with the longest trapping lifetime of 60 minutes. Both gold and aluminium-coated electrodes also lead to comparable trapping performances. Furthermore, the in situ levitation of microparticles is successfully demonstrated at the maximum levitation height of 30 µm. This ability provides additional control on the trapping height which increases the overall functionality of the 2D lattice trap.
An electroformed, three-dimensional stylus Paul trap was designed to confine a single atomic ion for use as a sensor to probe the electric-field noise of proximate surfaces. The trap was microfabricated with the UV-LIGA technique to reduce the distance of the ion from the surface of interest. We detail the fabrication process used to produce a 150 μm tall stylus trap with feature sizes of 40 μm. We confined single, laser-cooled, (25)Mg(+) ions with lifetimes greater than 2 h above the stylus trap in an ultra-high-vacuum environment. After cooling a motional mode of the ion at 4 MHz close to its ground state (<n> = 0.34 ± 0.07), the heating rate of the trap was measured with Raman sideband spectroscopy to be 387 ± 15 quanta/s at an ion height of 62 μm above the stylus electrodes.
We report the design, fabrication and characterization of a microfabricated surface-electrode ion trap that supports controlled transport through the two-dimensional intersection of linear trapping zones arranged in a 90° cross. The trap is fabricated with very large scalable integration techniques which are compatible with scaling to a large quantum information processor. The shape of the radio-frequency electrodes is optimized with a genetic algorithm to reduce axial pseudopotential barriers and minimize ion heating during transport. Seventy-eight independent dc control electrodes enable fine control of the trapping potentials. We demonstrate reliable ion transport between junction legs and determine the rate of ion loss due to transport. Doppler-cooled ions survive more than 10 5 round-trip transits between junction legs without loss and more than 65 consecutive round trips without laser cooling.
Abstract Scaling trapped-ion quantum computing will require robust trapping of at least hundreds of ions over long periods, while increasing the complexity and functionality of the trap itself. Symmetric three-dimensional (3D) structures enable high trap depth, but microfabrication techniques are generally better suited to planar structures that produce less ideal conditions for trapping. We present an ion trap fabricated on stacked eight-inch wafers in a large-scale micro-electro-mechanical system microfabrication process that provides reproducible traps at a large volume. Electrodes are patterned on the surfaces of two opposing wafers bonded to a spacer, forming a 3D structure with 2.5 μm standard deviation in alignment across the stack. We implement a design achieving a trap depth of 1 eV for a 40Ca+ ion held at 200 μm from either electrode plane. We characterize traps, achieving measurement agreement with simulations to within ±5% for mode frequencies spanning 0.6–3.8 MHz, and evaluate stray electric field across multiple trapping sites. We measure motional heating rates over an extensive range of trap frequencies, and temperatures, observing 40 phonons/s at 1 MHz and 185 K. This fabrication method provides a highly scalable approach for producing a new generation of 3D ion traps.