Industrially microfabricated ion trap with 1 eV trap depth
Silke Auchter, Christopher J. Axline, Chiara Decaroli, Marco Valentini, L. Purwin, R. Oswald, Roland Matt, E. Aschauer, Yves Colombe, Philip C. Holz, Thomas Monz, R. Blatt, Philipp Schindler, Clemens Rössler, Jonathan Home
Abstract Scaling trapped-ion quantum computing will require robust trapping of at least hundreds of ions over long periods, while increasing the complexity and functionality of the trap itself. Symmetric three-dimensional (3D) structures enable high trap depth, but microfabrication techniques are generally better suited to planar structures that produce less ideal conditions for trapping. We present an ion trap fabricated on stacked eight-inch wafers in a large-scale micro-electro-mechanical system microfabrication process that provides reproducible traps at a large volume. Electrodes are patterned on the surfaces of two opposing wafers bonded to a spacer, forming a 3D structure with 2.5 μm standard deviation in alignment across the stack. We implement a design achieving a trap depth of 1 eV for a 40Ca+ ion held at 200 μm from either electrode plane. We characterize traps, achieving measurement agreement with simulations to within ±5% for mode frequencies spanning 0.6–3.8 MHz, and evaluate stray electric field across multiple trapping sites. We measure motional heating rates over an extensive range of trap frequencies, and temperatures, observing 40 phonons/s at 1 MHz and 185 K. This fabrication method provides a highly scalable approach for producing a new generation of 3D ion traps.
Abstract Scaling trapped-ion quantum computing will require robust trapping of at least hundreds of ions over long periods, while increasing the complexity and functionality of the trap itself. Symmetric three-dimensional (3D) structures enable high trap depth, but microfabrication techniques are generally better suited to planar structures that produce less ideal conditions for trapping. We present an ion trap fabricated on stacked eight-inch wafers in a large-scale micro-electro-mechanical system microfabrication process that provides reproducible traps at a large volume. Electrodes are patterned on the surfaces of two opposing wafers bonded to a spacer, forming a 3D structure with 2.5 μm standard deviation in alignment across the stack. We implement a design achieving a trap depth of 1 eV for a 40Ca+ ion held at 200 μm from either electrode plane. We characterize traps, achieving measurement agreement with simulations to within ±5% for mode frequencies spanning 0.6–3.8 MHz, and evaluate stray electric field across multiple trapping sites. We measure motional heating rates over an extensive range of trap frequencies, and temperatures, observing 40 phonons/s at 1 MHz and 185 K. This fabrication method provides a highly scalable approach for producing a new generation of 3D ion traps.
The majority of microfabricated ion traps in use for quantum information processing are of the 2D 'surface-electrode' type or of the 3D 'wafer' type. Surface-electrode traps greatly simplify fabrication and hold the promise of allowing trapped-ion quantum computers to scale via standard semiconductor industry fabrication techniques. However, their geometry constrains them to having much lower trapping efficiency, depth, and harmonicity compared to 3D geometries. Conversely 3D geometries offer superior trap performance but fabrication is more complex, limiting potential to scale. We describe new 'trench' geometries that exist in the design space between these two paradigms. They still allow for a simple, planar electrode layer but with much more favourable trapping properties. We propose such traps could be 3D-printed over a 2D wafer with microfabricated components already integrated into it, thus retaining all the integration techniques and scaling advantages of surface-electrode traps. As a proof of principle we use 2-photon direct laser writing lithography to print the required electrode structures with the proposed geometry.
Trapped ions within Paul traps have shown to be a promising architecture in the realisation of a quantum information processor together with the ability of providing quantum simulations. Linear Paul traps have demonstrated long coherence times with ions being well isolated from the environment, single and multi-qubit gates and the high fidelity detection of states. The scalability to large number of qubits, incorporating all the previous achievements requires an array of linear ion traps. Microfabrication techniques allow for fabrication and micron level accuracy of the trap electrode dimensions through photolithography techniques. The first part of this thesis presents the experiential setup and trapping of Yb+ ions needed to test large ion trap arrays. This include vacuum systems that can host advanced symmetric and asymmetric ion traps with up to 90 static voltage control electrodes. Demonstration of a single trapped Yb+ ion within a two-layer macroscopic ion trap is presented. with an ion-electrode distance of 310(10) µm. The anomalous heating rate and spectral noise density of the trap was measured, a main form of decoherence within ion traps. The second half of this thesis presents the design and fabrication of multi-layer asymmetric ion traps. This allows for isolated electrodes that cannot be accessed via surface pathways, allowing for higher density of electrodes as well as creating novel trap designs that allow for the potential of quantum simulations to be demonstrated. These include two-dimensional lattices and ring trap designs in which the isolated electrodes provide more control in the ion position. For the microfabrication of these traps I present a novel high-aspect ratio electroplated electrode design that provides shielding of the dielectric layer. This provides a means to mitigate stray electric field due to charge build up on the dielectric surfaces. Electrical testing of the trap structures was performed to test bulk breakdown and surface flashover of the ion trap architectures. Results showed sufficient isolation between electrodes for both radio frequency and static breakdown. Surface flashover voltage measurements over the dielectric layer showed an improvement of more than double over previous results using a new fabrication technique. This will allow for more powerful ion trap chips needed for the next generation of microfabricated ion trap arrays for scalable quantum technologies.
An electroformed, three-dimensional stylus Paul trap was designed to confine a single atomic ion for use as a sensor to probe the electric-field noise of proximate surfaces. The trap was microfabricated with the UV-LIGA technique to reduce the distance of the ion from the surface of interest. We detail the fabrication process used to produce a 150 μm tall stylus trap with feature sizes of 40 μm. We confined single, laser-cooled, (25)Mg(+) ions with lifetimes greater than 2 h above the stylus trap in an ultra-high-vacuum environment. After cooling a motional mode of the ion at 4 MHz close to its ground state (<n> = 0.34 ± 0.07), the heating rate of the trap was measured with Raman sideband spectroscopy to be 387 ± 15 quanta/s at an ion height of 62 μm above the stylus electrodes.
Among the various physical systems for quantum bit (qubit) implementation, trapped ion has drawn significant attention due to its long coherence time (in the second range) and high gate fidelity (>99.99% for single qubit gate). After years of careful development, the ion trap, from mechanically assembled linear trap to lithography-defined surface electrode ion trap, is compatible with CMOS fabrication, which opens the door for the high-resolution, high-repeatability and large-scale ion trap manufacturing. To date, the number of fully connected ion qubits in state-of-the-art ion trapping devices is ~10. However, to scale close to or even beyond the noisy intermediate-scale quantum regime (NISQ, ~100 ions), some challenges remain. One such challenge is to maintain the delicate control of multiple components over individual ion with increasing ion number. In such context, this thesis is committed to boost the scalability of ion trap by integrating advanced 3D interconnects (e.g., through silicon via) and other functional modules (e.g., silicon photonics and multilayer metallization). 3D interconnects are integrated in the half space underneath surface electrode, to replace conventional wire bonding that extends out of the surface. Silicon photonics (grating coupler and waveguide) in place of bulk optics and lenses are used for on-chip light routing and emission. Multilayer metallization is used to maintain the overall RF performance and enable high-density interconnection where necessary. Firstly, surface electrode ion traps on different substrates (namely high resistivity silicon, silicon with grounding plane and glass) are designed and fabricated. Standard CMOS back-end-of-line fabrication process on 12-inch wafer platform is employed. The electrical performances of different traps are compared in terms of leakage current (I-V), parasitic capacitance (C-V), on-chip RF loss (S-parameter) and post-packaging resonance. Though the leakage (at the order of 10-8 A) between neighboring electrodes is relatively high, ion trap on glass substrate demonstrates extremely small capacitance (<1 pF) and low RF loss (insertion loss of <0.05 dB at RF frequency of 50 MHz), as compared to the silicon counterparts. This is mainly due to excellent insulation property of glass. Following that, ion trapping test is performed on the glass trap and ions are successfully confined with an averaged lifetime of ~30 minutes (compatible with the 10-11 mbar vacuum level (10-13 Pa)). To simultaneously leverage the dielectric property of glass and the microfabrication compatibility of silicon, the integration of silicon ion trap and glass interposer is performed, between which TSV is used to build the vertical interconnection. Due to the incorporation of TSV, the original wire bonding pads as well as the connection circuits on the surface electrodes can be eliminated. As a result, the form factor of TSV integrated trap is reduced by ~10 times. Correspondingly, the parasitic capacitance between neighboring electrodes is reduced from >24 pF to 3 pF. Similarly, the insertion loss of TSV integrated trap drops to 0.11 dB, in sharp comparison to the previous traps on silicon substrates (up to 2.4 dB). Analytical models are built to respectively characterize the electrode capacitance and overall power loss, and a good agreement is achieved between the model and the measurement result. In addition, since TSV is located in the half space underneath the surface electrodes, the electrodes geometry design is enabled with high flexibility. Meanwhile, the laser obstruction issue due to the stick-out bonding wires has been resolved. In terms of the ion trapping performance, both the heating rate (17 quanta/ms for an axial frequency of 300 kHz) and the lifetime (~30 minutes) of TSV trap are comparable with non-cryogenic traps of similar dimensions. Moreover, a customized CPGA with patterned redistribution layer is used to locate TSV integrated trap directly in the absence of glass interposer, facilitating high-efficiency thermal management and upgrading the packaging flexibility. At the next stage, the co-integration of other functional modules such as silicon photonics and multilayer metallization with TSV trap is investigated. In silicon photonics module, waveguide and grating coupler are on-chip introduced in place of bulk optics to achieve localized light routing and emission. In multilayer metallization module, as a first step, a grounding plane is incorporated into TSV trap to shield the silicon substrate from RF signal, in which specific windows are patterned onto the plane to accommodate TSV and allow the transmission of lights. The compatibility between TSV/multilayer metallization and waveguide/grating coupler for electrical and optical (E/O) signal routing is demonstrated. The preliminary test result based on wafer frontside shows that a ~40% capacitance reduction is achieved, and the insertion loss further drops to 0.06 dB, close to the performance of glass trap. In addition, the simulation results on photonics components indicate that an overall coupling efficiency of <30 dB is obtained from the input fiber to the ion through the photonics circuit. However, the measured power loss for light with wavelength of 1092 nm is as high as 50 dB. The deviation between the simulation and measurement is largely due to the fabrication imperfection and the resultant sloped grating coupler profile. This thesis focuses on the scalability enhancement of ion trap by integrating TSV, silicon photonics and multilayer metallization into conventional ion trap. The results are promising and pave the way for the future large scale quantum computing based on trapped ion.
We present the design, fabrication, and characterization of a monolithic, segmented, three-dimensional linear Paul ion trap for quantum science applications. The trap is fabricated from a single fused-silica block using selective laser-induced etching (SLE) and is subsequently metallized, forming electrodes isolated by self-shadowing trench structures without the need for layer alignment or external shadow masks. The segmented electrodes allow for shaping of the axial potential, enabling the creation of anharmonic potential wells, such as those required for equidistant ion strings. In addition, they enable shuttling and splitting of ion chains. We discuss key design choices and SLE-imposed constraints on achievable feature sizes, and evaluate electron-beam evaporation and magnetron sputtering as metallization approaches. Across two independent experimental setups, we demonstrate stable trapping and control of linear chains of up to 33 40Ca+ ions, including approximately equally spaced configurations. The measured secular frequencies in both traps agree with boundary-element simulations at the percent level, with residual deviations attributed to stray electric fields in the presence of anharmonic axial potentials, rather than fabrication imperfections. We measure axial micromotion field strengths on the order of 100 V/m along the trap axis, in approximate agreement with simulations. For radial mode frequencies near 2 MHz and an ion-electrode distance of 300 um, we measure heating rates of the order of 10 quanta/s in all but one motional mode, which is elevated by a technical noise source. The presented trap design is thus suitable for a wide range of quantum science applications and demonstrates the viability of SLE for the fabrication of finely segmented, monolithic, three-dimensional ion traps.
Monolithic three-dimensional (3D) Paul traps combine the high-precision microfabrication of two-dimensional (2D) chip traps with the deep trapping potentials and low heating rates characteristic of macroscopic 3D Paul traps, which are typically machined by traditional means and mechanically assembled. However, achieving low motional heating rates and optical access with a high numerical aperture (NA) while maintaining the high radio-frequency (rf) voltages required for trapping heavy ionic species, such as Yb + and Ba + , remains a significant technical challenge. In this work, we present a fused silica, monolithic segmented 3D Paul trap with an ion-electrode distance of 250 μ m , and stable operation at high rf voltages. We benchmark the trap’s performance using Yb + ions, demonstrating axially homogeneous trapping potentials spanning over 200 μ m about the trap’s axial center, high multidirectional optical access (up to 0.7 NA), and radial motional heating as low as n ¯ ˙ = 1.1 ± 0.1 quanta / s at radial trap frequencies about 3 MHz near room temperature. Furthermore, we observe a motional Ramsey coherence time, T 2 , of about 96 ms for the radial center-of-mass mode. We demonstrate the generation of a two-qubit Bell state with a parity contrast of 99.3 − 1.5 + 0.7 % with state preparation and measurement correction. These results establish fused-silica monolithic 3D Paul traps as a scalable, modular platform for quantum simulation, computation, metrology, and networking with heavy ionic species.