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arXiv:2204.13669 · Physical Review Letters

Membraneless Phonon Trapping and Resolution Enhancement in Optical Microwave Kinetic Inductance Detectors

Nicholas Zobrist, W. Hawkins Clay, Grégoire Coiffard, M. Daal, Noah J. Swimmer, Peter Day, Benjamin A. Mazin

Published Jul 1, 2022• 29 citations
arXivHTMLPDF

Abstract

Microwave kinetic inductance detectors (MKIDs) sensitive to light in the ultraviolet to near-infrared wavelengths are superconducting microresonators that are capable of measuring photon arrival times to microsecond precision and estimating each photon's energy. The resolving power of nonmembrane MKIDs has remained stubbornly around 10 at 1 μm despite significant improvements in the system noise. Here we show that the resolving power can be roughly doubled with a simple bilayer design without needing to place the device on a membrane, avoiding a significant increase in fabrication complexity. Based on modeling of the phonon propagation, we find that the majority of the improvement comes from the inability of high energy phonons to enter the additional layer due to the lack of available phonon states.

DOI
10.1103/physrevlett.129.017701

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Microwave kinetic inductance detectors (MKIDs) sensitive to light in the ultraviolet to near-infrared wavelengths are superconducting microresonators that are capable of measuring photon arrival times to microsecond precision and estimating each photon's energy. The resolving power of nonmembrane MKIDs has remained stubbornly around 10 at 1 μm despite significant improvements in the system noise. Here we show that the resolving power can be roughly doubled with a simple bilayer design without needing to place the device on a membrane, avoiding a significant increase in fabrication complexity. Based on modeling of the phonon propagation, we find that the majority of the improvement comes from the inability of high energy phonons to enter the additional layer due to the lack of available phonon states.
Abstract We report on the experimental investigation of optical coupling for superconducting microresonators known as microwave kinetic inductance detectors (MKIDs) in the visible and near-infrared bands. MKIDs are photon-counting, time and energy-resolving detectors that still suffer from a poor quantum efficiency. To improve this efficiency, we propose to add a superconducting reflective layer below the absorbing part of the detector separated by a transparent Al2O3 layer with a quarter-wavelength thickness optimized around a single wavelength λ = 405 nm. We have first fabricated samples patterned from stoichiometric TiN ( T c ∼ 4 K), one with the full optical stack, one without for reference and one with a partial optical stack in order to characterize the noise influence of each layer individually. We observe that the full optical stack geometry has the most impact on the resonator’s noise and quality factors. A second design was fabricated to characterize the optical response to short pulses of the optical stack and we show from both the frequential noise and optical response that a strong signature of TLS is still present in the optical stack sample. We have finally obtained single-photon response with the optical stack using a more sensitive tri-layer TiN/Ti/TiN absorber ( T c ∼ 1.3 K) for which a maximum energy resolving power of R = E / Δ E ∼ 1.3 was achieved using 405 nm laser pulses at 225 mK. The quality factors of both the reference and optical stack samples are similar but the frequency noise is still a tenfold higher for the optical stack sample which degrades the energy-resolving power of the detector.
We report on the design and performance of microwave kinetic inductance detectors (MKIDs) sensitive to single photons in the optical to near-infrared range using hafnium as the sensor material. Our test device had a superconducting transition temperature of 395 mK and a room temperature normal state resistivity of 97 μΩ cm with RRR=1.6. Resonators on the device displayed internal quality factors of around 200 000. Similar to the analysis of MKIDs made from other highly resistive superconductors, we find that modeling the temperature response of the detector requires an extra broadening parameter in the superconducting density of states. Finally, we show that this material and design is compatible with a full-array fabrication process, which resulted in pixels with decay times of about 40 μs and resolving powers of ∼9 at 800 nm.
We report on the development of microwave kinetic inductance detectors (MKIDs) using platinum silicide as the sensor material. MKIDs are an emerging superconducting detector technology, capable of measuring the arrival times of single photons to better than two microseconds and their energies to around ten percent. Previously, MKIDs have been fabricated using either sub-stoichiometric titanium nitride or aluminum, but TiN suffers from the spatial inhomogeneities in the superconducting critical temperature and Al has a low kinetic inductance fraction, causing low detector sensitivity. To address these issues, we have instead fabricated the PtSi microresonators with the superconducting critical temperatures of 944 ± 12 mK and high internal quality factors (Qi≳106). These devices show typical quasiparticle lifetimes of τqp≈30–40 μs and spectral resolution, R=λ/Δλ, of 8 at 406.6 nm. We compare PtSi MKIDs to those fabricated with TiN and detail the substantial advantages that PtSi MKIDs have to offer.
Abstract Microwave Kinetic Inductance Detectors (MKIDs) combine significant advantages for photon detection like single photon counting, single pixel energy resolution, vanishing dark counts and µs time resolution with a simple design and the feasibility to scale up into the megapixel range. But high quality MKID fabrication remains challenging as established superconductors tend to either have intrinsic disadvantages, are challenging to deposit or require very low operating temperatures. As alternating stacks of thin Ti and TiN films have shown very impressive results for far-IR and sub-mm MKIDs, they promise significant improvements for UV, visible to near-IR MKIDs as well, especially as they are comparably easy to fabricate and control. In this paper, we present our ongoing project to adapt proximity coupled superconducting films for photon counting MKIDs. Some of the main advantages of Ti/TiN multilayers are their good control of critical temperature (Tc) and their great homogeneity of Tc even over large wafers, promising improved pixel yield especially for large arrays. We demonstrate the effect different temperatures during fabrication have on the detector performance and discuss excess phase noise observed caused by surface oxidization of exposed Si. Our first prototypes achieved photon energy resolving powers of up to 3.1 but turned out to be much too insensitive. As the work presented is still in progress, we also discuss further improvements planned for the near future.
Due to their multiplexing capability and their good sensitivity to radiation from submillimeter to X-ray wavelengths, microwave kinetic inductance detectors (MKIDs) are increasingly used in the field of astrophysics. The Advanced Technology Center of the National Astronomical Observatory of Japan is developing MKIDs for astronomical observations such as CMB B-mode search with LiteBIRD. MKIDs are made of superconductors whose energy gap determines the detector frequency range. The energy gap depends on Tc, the critical temperature of the superconductor. It is thus important to be able to adjust Tc in order to choose the suitable frequency range. When using a single-layer MKID, the Tc is fixed by the superconducting gap energy of the unique component and cannot be changed. One possibility is to make a bilayer MKID using the proximity effect to adjust its critical temperature. This paper presents our new study on MKIDs made of superconductor/metal bilayers. We investigated niobium and copper bilayers (Nb/Cu) and fabricated different bilayers in our clean room. The critical temperature of each of them has been measured. We show that the Tc depends on the ratio between Nb and Cu thicknesses and that we are able to control it. Then, we characterized one of these Nb/Cu bilayers (Nb = 8 nm and Cu = 22 nm) once integrated in a MKID. We measured the temperature dependence of the resonant frequency, and we achieved quality factors as high as 2 × 104. The measurement of the noise spectrum provided a lower limit equal to -85 dBc/Hz, and the calculation of the noise equivalent power has shown that the sensitivity of the Nb/Cu bilayer MKID is not very far from that of an Al monolayer MKID.
We demonstrate photon counting at 1550 nm wavelength using microwave kinetic inductance detectors (MKIDs) made from TiN/Ti/TiN trilayer films with superconducting transition temperature Tc≈ 1.4 K. The detectors have a lumped-element design with a large interdigitated capacitor covered by aluminum and inductive photon absorbers whose volume ranges from 0.4 μm3 to 20 μm3. The energy resolution improves as the absorber volume is reduced. We achieved an energy resolution of 0.22 eV and resolved up to 7 photons per optical pulse, both greatly improved from previously reported results at 1550 nm wavelength using MKIDs. Further improvements are possible by optimizing the optical coupling to maximize photon absorption into the inductive absorber.