Due to their multiplexing capability and their good sensitivity to radiation from submillimeter to X-ray wavelengths, microwave kinetic inductance detectors (MKIDs) are increasingly used in the field of astrophysics. The Advanced Technology Center of the National Astronomical Observatory of Japan is developing MKIDs for astronomical observations such as CMB B-mode search with LiteBIRD. MKIDs are made of superconductors whose energy gap determines the detector frequency range. The energy gap depends on Tc, the critical temperature of the superconductor. It is thus important to be able to adjust Tc in order to choose the suitable frequency range. When using a single-layer MKID, the Tc is fixed by the superconducting gap energy of the unique component and cannot be changed. One possibility is to make a bilayer MKID using the proximity effect to adjust its critical temperature. This paper presents our new study on MKIDs made of superconductor/metal bilayers. We investigated niobium and copper bilayers (Nb/Cu) and fabricated different bilayers in our clean room. The critical temperature of each of them has been measured. We show that the Tc depends on the ratio between Nb and Cu thicknesses and that we are able to control it. Then, we characterized one of these Nb/Cu bilayers (Nb = 8 nm and Cu = 22 nm) once integrated in a MKID. We measured the temperature dependence of the resonant frequency, and we achieved quality factors as high as 2 × 104. The measurement of the noise spectrum provided a lower limit equal to -85 dBc/Hz, and the calculation of the noise equivalent power has shown that the sensitivity of the Nb/Cu bilayer MKID is not very far from that of an Al monolayer MKID.
Due to their multiplexing capability and their good sensitivity to radiation from submillimeter to X-ray wavelengths, microwave kinetic inductance detectors (MKIDs) are increasingly used in the field of astrophysics. The Advanced Technology Center of the National Astronomical Observatory of Japan is developing MKIDs for astronomical observations such as CMB B-mode search with LiteBIRD. MKIDs are made of superconductors whose energy gap determines the detector frequency range. The energy gap depends on Tc, the critical temperature of the superconductor. It is thus important to be able to adjust Tc in order to choose the suitable frequency range. When using a single-layer MKID, the Tc is fixed by the superconducting gap energy of the unique component and cannot be changed. One possibility is to make a bilayer MKID using the proximity effect to adjust its critical temperature. This paper presents our new study on MKIDs made of superconductor/metal bilayers. We investigated niobium and copper bilayers (Nb/Cu) and fabricated different bilayers in our clean room. The critical temperature of each of them has been measured. We show that the Tc depends on the ratio between Nb and Cu thicknesses and that we are able to control it. Then, we characterized one of these Nb/Cu bilayers (Nb = 8 nm and Cu = 22 nm) once integrated in a MKID. We measured the temperature dependence of the resonant frequency, and we achieved quality factors as high as 2 × 104. The measurement of the noise spectrum provided a lower limit equal to -85 dBc/Hz, and the calculation of the noise equivalent power has shown that the sensitivity of the Nb/Cu bilayer MKID is not very far from that of an Al monolayer MKID.
Microwave Kinetic Inductance Detectors (MKIDs), just like a planar resonance cavity resonating at a microwave frequency, are emerging as a kind of high-sensitivity detector suitable for large format arrays at terahertz (THz) wavelengths. There are two types of MKIDs, namely distributed (or antenna-coupled) MKIDs and lumped-element MKIDs (aka LeKIDs). Various superconducting thin films (such as Al, TiN, NbTiN, NbN, and Nb) have been investigated for MKIDs. They do work so long as the detected photon energy exceeds their energy gap, but their response and noise behaviors are yet to be fully understood. Here we report on the design, fabrication, and characterization of distributed and lumped-element MKIDs made of NbTiN superconducting film. Detailed simulation and measurement results will be presented.
Astrophysical photons with a sub-millimetre wavelength are of great value to research star and galaxy formation. Superconductors have a small energy gap with which these sub-millimetre photons can be measured. Superconductors can absorb photons so that quasiparticles are created, which will in turn change the complex conductivity: incoming photons change the electrical response of the superconductor. This principle can be used to realise a detector. This is done with the Microwave Kinetic Inductance Detectors (MKIDs) that consist of a superconducting film embedded in a resonant circuit, so that photons falling in will change the resonant frequency. This can be measured with a readout signal. To enhance the sensitivity of the MKID, we want to increase the responsivity of an MKID as much as possible.A previous study has proposed a figure of merit regarding the material properties of a superconductor to achieve a high responsivity. However, the readout frequency used is not included in this figure. The goal of this work is to extend the figure of merit so that the readout frequency of the MKID can be optimised for a higher responsivity.
Abstract Microwave Kinetic Inductance Detectors (MKIDs) combine significant advantages for photon detection like single photon counting, single pixel energy resolution, vanishing dark counts and µs time resolution with a simple design and the feasibility to scale up into the megapixel range. But high quality MKID fabrication remains challenging as established superconductors tend to either have intrinsic disadvantages, are challenging to deposit or require very low operating temperatures. As alternating stacks of thin Ti and TiN films have shown very impressive results for far-IR and sub-mm MKIDs, they promise significant improvements for UV, visible to near-IR MKIDs as well, especially as they are comparably easy to fabricate and control. In this paper, we present our ongoing project to adapt proximity coupled superconducting films for photon counting MKIDs. Some of the main advantages of Ti/TiN multilayers are their good control of critical temperature (Tc) and their great homogeneity of Tc even over large wafers, promising improved pixel yield especially for large arrays. We demonstrate the effect different temperatures during fabrication have on the detector performance and discuss excess phase noise observed caused by surface oxidization of exposed Si. Our first prototypes achieved photon energy resolving powers of up to 3.1 but turned out to be much too insensitive. As the work presented is still in progress, we also discuss further improvements planned for the near future.
Microwave kinetic inductance detectors (MKID) are superconducting broadband direct detectors. If a superconducting thin film patterned into a resonator is illuminated with photons, Cooper pairs break up and the kinetic inductance of the film changes. This shifts the resonance frequency downwards and the dissipation of the resonator increases, which can be detected in the phase and amplitude of a transmitted signal. \n \nIn this thesis, a waveguide coupled MKID is designed and simulated. 350 GHz radiation is coupled into a copper waveguide via a horn antenna. A waveguide probe leads the signal onto a 9 µm silicon membrane where it is absorbed in a 40 nm superconducting aluminum film which is the inductive part of a superconducting resonator. The capacitor of the resonator is made of niobium. Two versions of the device are developed, a transmission line resonator and a lumped element resonator design. The new design will enable an accurate understanding of the optical sensitivity of MKIDs and allow comparison of different resonator materials. Since two different resonator types are used, the direct comparison of transmission line and lumped resonators will also be possible. \n \nA measurement setup is developed including an ADR cryostat to cool MKID devices down to below 40 mK. An analog readout system using either a vector network analyzer or an IQ mixer is designed and built. The necessary software to control the ADR, the temperature monitoring, the readout signal generation and detection and the signal acquisition of the setup is also developed. \n \nThe waveguide coupled MKID design is fabricated in our in-house microfabrication laboratory and measured in the new setup. In my measurements, the devices do not show a resonance feature. The VNA and DC measurements are analyzed to determine a plausible hypothesis of the failure. The devices are diagnosed for critical issues during fabrication which will be addressed in a future iteration. \n \nTo verify the measurement setup, a test device of the IRAM NIKA 2 MKID camera is measured and the complete analysis pipeline is exercised. The quasi-particle lifetime in the aluminum thin films is measured and a dark and optical noise equivalent power are determined. The results are within the uncertainty comparable to measurements of IRAM themselves. \n \nA test chip designed in my master thesis that contains eight NbTiN resonators is measured in the new setup and non-linear effects under strong readout power are studied. Parametric amplification and oscillation of a resonator are shown qualitatively.
Microwave Kinetic Inductance Detectors (MKIDs), with high sensitivity and relatively simple frequency multiplexing, are emerging as a kind of large-array detectors in the terahertz (THz) band. An MKID, like a superconducting resonator, is composed of a planar capacitor and inductor that are made from superconducting films. The energy gap of the superconducting film for the planar inductor (at least part of it) is lower than the energy of photons to be detected. The kinetic inductance of the superconducting film irradiated by the photons is increased, shifting the resonance frequency toward a lower frequency. The frequency shift is proportional to the kinetic inductance fraction, i.e., the ratio of the kinetic inductance to the total inductance of the planar superconducting inductor. In this paper, we thoroughly investigate the kinetic inductance fraction for lumped-element and antenna-coupled MKIDs, which are both made from NbTiN. The detailed simulation, calculation, and measurement results will be presented.
Microwave Kinetic Inductance Detectors (MKIDs) are extremely sensitive radiation detectors based on superconducting resonators that can be combined in large arrays on a single readout line within a limited frequency bandwidth. This makes MKIDs ideal detectors for the ultimate far-infrared observatory: a future space-based actively cooled telescope with its performance solely limited by the low universe background radiation. However, to reach these detector requirements, state-of-the-art MKIDs still need a order of magnitude improvement in device sensitivity. In this work, the MKID sensitivity is improved by reducing the aluminium volume that absorbs pair-breaking radiation into quasiparticle excitations, while making sure all radiation is still absorbed. Furthermore, a key requirement is sufficient reduction of excess noise as to keep the device intrinsically limited by thermally driven random fluctuations in the number of quasiparticles in absence of radiation, or Generation-Recombination (G-R) noise. To this end, a model is developed that describes the noise contributions as function of device geometry, readout power, material properties and radiation power. Subsequently, a realistic MKID design is presented and tested that reduces excess noise and maximises the sensitivity, expressed as Noise Equivalent Power (NEP). At high temperatures, good overall agreement is found between the measured noise spectra and the model. At low temperature T = 120 mK, the measurement results give an optical NEP similar to current state-of-the-art MKIDs. The NEP is not as low as expected due to short quasiparticle lifetimes, an unexpected decrease in the G-R noise level and a very high excess noise attributed to Two-Level Systems (TLS) noise that starts to dominate the already low G-R noise spectrum at low temperatures. Possibly, the quick quasiparticle lifetime saturation and noise level drop are caused by a strong readout power effect, as the readout power is known to create excess quasiparticles and to cause a strongly non-thermal electron energy distribution in the aluminium strip of the MKID. However, the exact microscopic details of these effects are unknown and not studied in this project. Based on the current chip design, a straightforward way to improve device performance and study the readout power effect in more detail is a reduction of the high TLS noise levels, which is possibly fabrication related. This would allow an unobstructed view of the G-R noise spectrum at low temperatures, thereby allowing both a study of the readout power effect on the quasiparticle system, and ultimately achieving the improvement in NEP needed reach the detector requirements for the ultimate space-based far-infrared observatory.