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arXiv:1911.06434 · Applied Physics Letters

Design and performance of hafnium optical and near-IR kinetic inductance detectors

Nicholas Zobrist, Grégoire Coiffard, Bruce Bumble, Noah J. Swimmer, Sarah Steiger, M. Daal, Giulia Collura, Alex B. Walter, Clint Bockstiegel, Neelay Fruitwala, Isabel Lipartito, Benjamin A. Mazin

Published Nov 18, 2019• 28 citations
arXivHTMLPDF

Abstract

We report on the design and performance of microwave kinetic inductance detectors (MKIDs) sensitive to single photons in the optical to near-infrared range using hafnium as the sensor material. Our test device had a superconducting transition temperature of 395 mK and a room temperature normal state resistivity of 97 μΩ cm with RRR=1.6. Resonators on the device displayed internal quality factors of around 200 000. Similar to the analysis of MKIDs made from other highly resistive superconductors, we find that modeling the temperature response of the detector requires an extra broadening parameter in the superconducting density of states. Finally, we show that this material and design is compatible with a full-array fabrication process, which resulted in pixels with decay times of about 40 μs and resolving powers of ∼9 at 800 nm.

DOI
10.1063/1.5127768

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High quality factor platinum silicide microwave kinetic inductance detectors

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We report on the development of microwave kinetic inductance detectors (MKIDs) using platinum silicide as the sensor material. MKIDs are an emerging superconducting detector technology, capable of measuring the arrival times of single photons to better than two microseconds and their energies to around ten percent. Previously, MKIDs have been fabricated using either sub-stoichiometric titanium nitride or aluminum, but TiN suffers from the spatial inhomogeneities in the superconducting critical temperature and Al has a low kinetic inductance fraction, causing low detector sensitivity. To address these issues, we have instead fabricated the PtSi microresonators with the superconducting critical temperatures of 944 ± 12 mK and high internal quality factors (Qi≳106). These devices show typical quasiparticle lifetimes of τqp≈30–40 μs and spectral resolution, R=λ/Δλ, of 8 at 406.6 nm. We compare PtSi MKIDs to those fabricated with TiN and detail the substantial advantages that PtSi MKIDs have to offer.

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Abstract We report on the experimental investigation of optical coupling for superconducting microresonators known as microwave kinetic inductance detectors (MKIDs) in the visible and near-infrared bands. MKIDs are photon-counting, time and energy-resolving detectors that still suffer from a poor quantum efficiency. To improve this efficiency, we propose to add a superconducting reflective layer below the absorbing part of the detector separated by a transparent Al2O3 layer with a quarter-wavelength thickness optimized around a single wavelength λ = 405 nm. We have first fabricated samples patterned from stoichiometric TiN ( T c ∼ 4 K), one with the full optical stack, one without for reference and one with a partial optical stack in order to characterize the noise influence of each layer individually. We observe that the full optical stack geometry has the most impact on the resonator’s noise and quality factors. A second design was fabricated to characterize the optical response to short pulses of the optical stack and we show from both the frequential noise and optical response that a strong signature of TLS is still present in the optical stack sample. We have finally obtained single-photon response with the optical stack using a more sensitive tri-layer TiN/Ti/TiN absorber ( T c ∼ 1.3 K) for which a maximum energy resolving power of R = E / Δ E ∼ 1.3 was achieved using 405 nm laser pulses at 225 mK. The quality factors of both the reference and optical stack samples are similar but the frequency noise is still a tenfold higher for the optical stack sample which degrades the energy-resolving power of the detector.

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Design and measurement of superconducting microwave kinetic inductance detectors

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Microwave kinetic inductance detectors (MKID) are superconducting broadband direct detectors. If a superconducting thin film patterned into a resonator is illuminated with photons, Cooper pairs break up and the kinetic inductance of the film changes. This shifts the resonance frequency downwards and the dissipation of the resonator increases, which can be detected in the phase and amplitude of a transmitted signal. \n \nIn this thesis, a waveguide coupled MKID is designed and simulated. 350 GHz radiation is coupled into a copper waveguide via a horn antenna. A waveguide probe leads the signal onto a 9 µm silicon membrane where it is absorbed in a 40 nm superconducting aluminum film which is the inductive part of a superconducting resonator. The capacitor of the resonator is made of niobium. Two versions of the device are developed, a transmission line resonator and a lumped element resonator design. The new design will enable an accurate understanding of the optical sensitivity of MKIDs and allow comparison of different resonator materials. Since two different resonator types are used, the direct comparison of transmission line and lumped resonators will also be possible. \n \nA measurement setup is developed including an ADR cryostat to cool MKID devices down to below 40 mK. An analog readout system using either a vector network analyzer or an IQ mixer is designed and built. The necessary software to control the ADR, the temperature monitoring, the readout signal generation and detection and the signal acquisition of the setup is also developed. \n \nThe waveguide coupled MKID design is fabricated in our in-house microfabrication laboratory and measured in the new setup. In my measurements, the devices do not show a resonance feature. The VNA and DC measurements are analyzed to determine a plausible hypothesis of the failure. The devices are diagnosed for critical issues during fabrication which will be addressed in a future iteration. \n \nTo verify the measurement setup, a test device of the IRAM NIKA 2 MKID camera is measured and the complete analysis pipeline is exercised. The quasi-particle lifetime in the aluminum thin films is measured and a dark and optical noise equivalent power are determined. The results are within the uncertainty comparable to measurements of IRAM themselves. \n \nA test chip designed in my master thesis that contains eight NbTiN resonators is measured in the new setup and non-linear effects under strong readout power are studied. Parametric amplification and oscillation of a resonator are shown qualitatively.

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We have fabricated 2024 pixel microwave kinetic inductance detector (MKID) arrays in the ultraviolet/optical/ near-IR (UVOIR) regime that are currently in use in astronomical instruments. In order to make MKIDs desirable for novel instruments, larger arrays with nearly perfect yield need to be fabricated. As array size increases, however, the percent yield often decreases due to frequency collisions in the readout. The per-pixel performance must also be improved, namely, the energy resolution. We are investigating ways to reduce frequency collisions and to improve the per-pixel performance of our devices through new superconducting material systems and fabrication techniques. There are two main routes that we are currently exploring. First, we are attempting to create more uniform titanium nitride films through the use of atomic layer deposition rather than the more traditional sputtering method. In addition, we are experimenting with completely new material systems for MKIDs, such as platinum silicide.

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Abstract Microwave Kinetic Inductance Detectors (MKIDs) combine significant advantages for photon detection like single photon counting, single pixel energy resolution, vanishing dark counts and µs time resolution with a simple design and the feasibility to scale up into the megapixel range. But high quality MKID fabrication remains challenging as established superconductors tend to either have intrinsic disadvantages, are challenging to deposit or require very low operating temperatures. As alternating stacks of thin Ti and TiN films have shown very impressive results for far-IR and sub-mm MKIDs, they promise significant improvements for UV, visible to near-IR MKIDs as well, especially as they are comparably easy to fabricate and control. In this paper, we present our ongoing project to adapt proximity coupled superconducting films for photon counting MKIDs. Some of the main advantages of Ti/TiN multilayers are their good control of critical temperature (Tc) and their great homogeneity of Tc even over large wafers, promising improved pixel yield especially for large arrays. We demonstrate the effect different temperatures during fabrication have on the detector performance and discuss excess phase noise observed caused by surface oxidization of exposed Si. Our first prototypes achieved photon energy resolving powers of up to 3.1 but turned out to be much too insensitive. As the work presented is still in progress, we also discuss further improvements planned for the near future.

Journal of Low Temperature Physics•May 15, 2024•1 citation
We report on the design and performance of microwave kinetic inductance detectors (MKIDs) sensitive to single photons in the optical to near-infrared range using hafnium as the sensor material. Our test device had a superconducting transition temperature of 395 mK and a room temperature normal state resistivity of 97 μΩ cm with RRR=1.6. Resonators on the device displayed internal quality factors of around 200 000. Similar to the analysis of MKIDs made from other highly resistive superconductors, we find that modeling the temperature response of the detector requires an extra broadening parameter in the superconducting density of states. Finally, we show that this material and design is compatible with a full-array fabrication process, which resulted in pixels with decay times of about 40 μs and resolving powers of ∼9 at 800 nm.
We report on the development of microwave kinetic inductance detectors (MKIDs) using platinum silicide as the sensor material. MKIDs are an emerging superconducting detector technology, capable of measuring the arrival times of single photons to better than two microseconds and their energies to around ten percent. Previously, MKIDs have been fabricated using either sub-stoichiometric titanium nitride or aluminum, but TiN suffers from the spatial inhomogeneities in the superconducting critical temperature and Al has a low kinetic inductance fraction, causing low detector sensitivity. To address these issues, we have instead fabricated the PtSi microresonators with the superconducting critical temperatures of 944 ± 12 mK and high internal quality factors (Qi≳106). These devices show typical quasiparticle lifetimes of τqp≈30–40 μs and spectral resolution, R=λ/Δλ, of 8 at 406.6 nm. We compare PtSi MKIDs to those fabricated with TiN and detail the substantial advantages that PtSi MKIDs have to offer.
Abstract We report on the experimental investigation of optical coupling for superconducting microresonators known as microwave kinetic inductance detectors (MKIDs) in the visible and near-infrared bands. MKIDs are photon-counting, time and energy-resolving detectors that still suffer from a poor quantum efficiency. To improve this efficiency, we propose to add a superconducting reflective layer below the absorbing part of the detector separated by a transparent Al2O3 layer with a quarter-wavelength thickness optimized around a single wavelength λ = 405 nm. We have first fabricated samples patterned from stoichiometric TiN ( T c ∼ 4 K), one with the full optical stack, one without for reference and one with a partial optical stack in order to characterize the noise influence of each layer individually. We observe that the full optical stack geometry has the most impact on the resonator’s noise and quality factors. A second design was fabricated to characterize the optical response to short pulses of the optical stack and we show from both the frequential noise and optical response that a strong signature of TLS is still present in the optical stack sample. We have finally obtained single-photon response with the optical stack using a more sensitive tri-layer TiN/Ti/TiN absorber ( T c ∼ 1.3 K) for which a maximum energy resolving power of R = E / Δ E ∼ 1.3 was achieved using 405 nm laser pulses at 225 mK. The quality factors of both the reference and optical stack samples are similar but the frequency noise is still a tenfold higher for the optical stack sample which degrades the energy-resolving power of the detector.
This article is focused on the design and development of superconducting Microwave Kinetic Inductance Detector (MKID) which is used at near, mid and far-infrared, optical and ultraviolet wavelengths for astronomical applications. MKIDs are superconducting micro-resonators which are very much considered, due to high sensitivity, simplicity in fabrication and ease of read out by a coplanar waveguide or microstrip transmission line. Here a new structure for inductor of lumped element microwave resonator is proposed that causes a very high Quality factor in smaller dimensions. Our resonator's intrinsic Q factor is above 8×106in dimensions of 441×487 μm2which is the highest value in such dimensions. due to the small dimensions of this resonator, makes it desirable to use in large arrays spectrometers.
Microwave kinetic inductance detectors (MKID) are superconducting broadband direct detectors. If a superconducting thin film patterned into a resonator is illuminated with photons, Cooper pairs break up and the kinetic inductance of the film changes. This shifts the resonance frequency downwards and the dissipation of the resonator increases, which can be detected in the phase and amplitude of a transmitted signal. \n \nIn this thesis, a waveguide coupled MKID is designed and simulated. 350 GHz radiation is coupled into a copper waveguide via a horn antenna. A waveguide probe leads the signal onto a 9 µm silicon membrane where it is absorbed in a 40 nm superconducting aluminum film which is the inductive part of a superconducting resonator. The capacitor of the resonator is made of niobium. Two versions of the device are developed, a transmission line resonator and a lumped element resonator design. The new design will enable an accurate understanding of the optical sensitivity of MKIDs and allow comparison of different resonator materials. Since two different resonator types are used, the direct comparison of transmission line and lumped resonators will also be possible. \n \nA measurement setup is developed including an ADR cryostat to cool MKID devices down to below 40 mK. An analog readout system using either a vector network analyzer or an IQ mixer is designed and built. The necessary software to control the ADR, the temperature monitoring, the readout signal generation and detection and the signal acquisition of the setup is also developed. \n \nThe waveguide coupled MKID design is fabricated in our in-house microfabrication laboratory and measured in the new setup. In my measurements, the devices do not show a resonance feature. The VNA and DC measurements are analyzed to determine a plausible hypothesis of the failure. The devices are diagnosed for critical issues during fabrication which will be addressed in a future iteration. \n \nTo verify the measurement setup, a test device of the IRAM NIKA 2 MKID camera is measured and the complete analysis pipeline is exercised. The quasi-particle lifetime in the aluminum thin films is measured and a dark and optical noise equivalent power are determined. The results are within the uncertainty comparable to measurements of IRAM themselves. \n \nA test chip designed in my master thesis that contains eight NbTiN resonators is measured in the new setup and non-linear effects under strong readout power are studied. Parametric amplification and oscillation of a resonator are shown qualitatively.
We have fabricated 2024 pixel microwave kinetic inductance detector (MKID) arrays in the ultraviolet/optical/ near-IR (UVOIR) regime that are currently in use in astronomical instruments. In order to make MKIDs desirable for novel instruments, larger arrays with nearly perfect yield need to be fabricated. As array size increases, however, the percent yield often decreases due to frequency collisions in the readout. The per-pixel performance must also be improved, namely, the energy resolution. We are investigating ways to reduce frequency collisions and to improve the per-pixel performance of our devices through new superconducting material systems and fabrication techniques. There are two main routes that we are currently exploring. First, we are attempting to create more uniform titanium nitride films through the use of atomic layer deposition rather than the more traditional sputtering method. In addition, we are experimenting with completely new material systems for MKIDs, such as platinum silicide.
Abstract Microwave Kinetic Inductance Detectors (MKIDs) combine significant advantages for photon detection like single photon counting, single pixel energy resolution, vanishing dark counts and µs time resolution with a simple design and the feasibility to scale up into the megapixel range. But high quality MKID fabrication remains challenging as established superconductors tend to either have intrinsic disadvantages, are challenging to deposit or require very low operating temperatures. As alternating stacks of thin Ti and TiN films have shown very impressive results for far-IR and sub-mm MKIDs, they promise significant improvements for UV, visible to near-IR MKIDs as well, especially as they are comparably easy to fabricate and control. In this paper, we present our ongoing project to adapt proximity coupled superconducting films for photon counting MKIDs. Some of the main advantages of Ti/TiN multilayers are their good control of critical temperature (Tc) and their great homogeneity of Tc even over large wafers, promising improved pixel yield especially for large arrays. We demonstrate the effect different temperatures during fabrication have on the detector performance and discuss excess phase noise observed caused by surface oxidization of exposed Si. Our first prototypes achieved photon energy resolving powers of up to 3.1 but turned out to be much too insensitive. As the work presented is still in progress, we also discuss further improvements planned for the near future.