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arXiv:1708.02502 · Physical Review Applied

Low-Loss Superconducting Nanowire Circuits Using a Neon Focused Ion Beam

Jonathan Burnett, James T. Sagar, Oscar W. Kennedy, Paul A. Warburton, J. C. Fenton

Published Jul 31, 2017• 34 citations
arXivHTMLPDF

Abstract

Quantum circuits based on superconducting nanowires have recently made an impact in the development of devices harnessing phase slip, superinductance, and Josephson effects. Exploiting this rich physics is difficult, though, due to fabrication-induced, parasitic two-level systems, which cause high levels of loss and decoherence. Using a focused beam of neon ions, the authors embed superconducting nanowires into coplanar waveguide resonators and realize much lower losses than in previous devices. This achievement suggests excellent prospects for this class of circuitry.

DOI
10.1103/physrevapplied.8.014039

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Quantum circuits based on superconducting nanowires have recently made an impact in the development of devices harnessing phase slip, superinductance, and Josephson effects. Exploiting this rich physics is difficult, though, due to fabrication-induced, parasitic two-level systems, which cause high levels of loss and decoherence. Using a focused beam of neon ions, the authors embed superconducting nanowires into coplanar waveguide resonators and realize much lower losses than in previous devices. This achievement suggests excellent prospects for this class of circuitry.
Parasitic two-level systems are generally present in superconducting circuits as a result of conventional fabrication and processing, and these lead to noise and loss of coherence in quantum systems. We examine the use of a Ne focused ion beam for producing nanowires integrated into superconducting circuits with a minimized density of parasitic two-level systems. We report measurements of nanowires produced by Ne focused-ion-beam milling in NbN resonators. The resonator losses increase after the nanowire is fabricated, with the Q factor decreasing by ~30% to ~105, which is a factor 10-100 higher than in the most closely comparable circuits previously measured. This indicates that the Ne focused ion beam is a promising route for creating superconducting-nanowire-based devices with low levels of decoherence.
Quantum phase slip (QPS) is the exact dual to the well-known Josephson effect. Although there are numerous proposals for applications of QPS devices, experimental work to develop these remains in the relatively early stages. Significant barriers to exploiting QPS nanowires for useful technologies still exist, such as establishing robust nanowire-fabrication methods that allow coupling to low-loss circuits, and demonstrating control over the QPS process with an experimenter-controlled external bias. Here we report experiments that show that both of these barriers have been overcome. We present measurements at 300 mK of NbN\mathrm{Nb}\mathrm{N}NbN coplanar-waveguide (CPW) resonators embedded with nanowires fabricated using a neon focused ion beam. The internal quality factor exceeds $2\ifmmode\times\else\texttimes\fi{}{10}^{4}$---significantly higher than previously reported in comparable experiments. The resonator frequency tunes periodically with an applied magnetic field, revealing tunneling of the order parameter that always occurs at half-integer values of the applied flux. In contrast to previous studies of single QPS, the order-parameter tunneling is shown to be adiabatic, demonstrating improved control over energy dissipation in nanowire QPS circuits. Our results highlight a promising pathway towards realizing low-loss nanowire-based QPS devices.
Abstract The performance of state-of-the-art superconducting quantum devices is currently limited by microwave dielectric loss at different interfaces. α -tantalum is a superconductor that has proven effective in reducing dielectric loss and improving device performance due to its thin low-loss oxide. Here, we demonstrate the fabrication of high-quality factor α -tantalum coplanar-waveguide resonators directly on pristine 300 mm silicon wafers over a variety of metal deposition conditions and perform a comprehensive material and electrical characterization study. Additionally, we apply a surface treatment based on hydrofluoric acid that allows us to modify different resonators surfaces, leading to a reduction in two-level system loss in the devices by a factor of three. This loss reduction can be entirely attributed to the removal of surface oxides. Our study indicates that large scale manufacturing of low-loss superconducting circuits should indeed be feasible and suggests a viable avenue to materials-driven advancements in superconducting circuit performance.
This article reviews recent progress in superconducting nanodevices, with particular emphasis on fabrication methods developed for superconducting nanowires and nanoscale Josephson junctions based on different barrier materials. It evaluates the future potential of superconducting nanodevices, including nano-superconducting quantum interference devices (nanoSQUIDs), in light of improvements in nanoscale fabrication and manipulation techniques, along with their likely impacts on future quantum technology and measurement. The article first considers efforts to realize devices at the physical scale of 100 nm and below before discussing different types of Josephson junction such as trilayer junctions. It also describes the use of focused ion beam milling and electron beam lithography techniques for junction fabrication at the nanoscale and the improved energy sensitivity detectable with a nanoSQUID. Finally, it looks at a range of applications for nanoSQUIDs, superconducting single photon detectors, and other superconducting nanodevices.
Quantum sensing and computation can be realized with superconducting microwave circuits. Qubits are engineered quantum systems of capacitors and inductors with non-linear Josephson junctions. They operate in the single-excitation quantum regime, photons of 27μ27 μ27μeV at 6.5 GHz. Quantum coherence is fundamentally limited by materials defects, in particular atomic-scale parasitic two-level systems (TLS) in amorphous dielectrics at circuit interfaces.[1] The electric fields driving oscillating charges in quantum circuits resonantly couple to TLS, producing phase noise and dissipation. We use coplanar niobium-on-silicon superconducting resonators to probe decoherence in quantum circuits. By selectively modifying interface dielectrics, we show that most TLS losses come from the silicon surface oxide, and most non-TLS losses are distributed throughout the niobium surface oxide. Through post-fabrication interface modification we reduced TLS losses by 85% and non-TLS losses by 72%, obtaining record single-photon resonator quality factors above 5 million and approaching a regime where non-TLS losses are dominant. [1]Müller, C., Cole, J. H. & Lisenfeld, J. Towards understanding two-level-systems in amorphous solids: insights from quantum circuits. Rep. Prog. Phys. 82, 124501 (2019)