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arXiv:1206.0579 · Journal of Low Temperature Physics

Power Handling and Responsivity of Submicron Wide Superconducting Coplanar Waveguide Resonators

R. M. J. Janssen, Akira Endo, J. J. A. Baselmans, Pieter de Visser, R. Barends, T. M. Klapwijk

Published Jan 19, 2012• 5 citations
arXivHTMLPDF

Abstract

The sensitivity of microwave kinetic inductance detectors (MKIDs) based on coplanar waveguides (CPWs) needs to be improved by at least an order of magnitude to satisfy the requirements for space-based terahertz astronomy. Our aim is to investigate if this can be achieved by reducing the width of the CPW to much below what has typically been made using optical lithography (>1 μm). CPW resonators with a central line width as narrow as 300 nm were made in NbTiN using electron beam lithography and reactive ion etching. In a systematic study of quarter-wave CPW resonators with varying widths it is shown that the behavior of responsivity, noise and power handling as a function of width continues down to 300 nm. This encourages the development of narrow KIDs using Al in order to improve their sensitivity.

DOI
10.1007/s10909-012-0458-1

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Spectroscopic observations of a large number of galaxies in the far-infrared are critical in the study of galaxy evolution. These observations are difficult at the moment, because of the lack of good far-infrared (FIR) detector technology. Microwave Kinetic Inductance Detectors (MKIDs) are showing promising results to fill this void. A common MKID design is the antenna-coupled coplanar waveguide (CPW) resonator patterned in a superconducting film. These resonators are extremely sensitive to changes in the Cooper pair density. FIR photons are energetic enough to break Cooper pairs. This means a superconducting resonator can be used as a pixel for a FIR camera. The inherent multiplexing advantage of MKIDs means they can easily be fabricated in arrays of up to 5000 pixels. By putting such an array in the SAFARI instrument on the cooled SPICA telescope a blind spectroscopic survey that can detect Milky Way sized galaxies out to redshift z = 2 will be possible. However, to achieve background limited performance on a cooled telescope like SPICA the sensivity of MKIDs needs to be improved by at least an order of magnitude. This project aims to investigate if this can be achieved by reducing the width of the CPW to much below what has typically been made using optical lithography (> 1 ?m). CPW resonators with a central line width as narrow as 300 nm were made in NbTiN using electron beam lithography and reactive ion etching. Using this fabrication method NbTiN resonators with a central line width varying between 0.3 ?m and 3 ?m were made. These resonators were used to do a systematic study of the width dependence of the kinetic inductance fraction, quality factor, responsivity, read-out power, noise and NEP. It is shown that the width dependence of all these properties does not change down to 300 nm. Encouraged by these results two prototype submicron pixel arrays were made in aluminum. These showed sensitivities comparable to resonators with a few micron wide CPW. The main reason for this lack of sensitivity improvement is the lower maximum read-out power of submicron wide aluminum resonators. Based on these results power handling seems a key issue that will determine if submicron resonators are a viable route to improve the MKIDs sensitivity. These results of this project indicate that aluminum has a different width dependence of its power handling compared to NbTiN. Therefore, a systematic study of submicron resonators in aluminum, which focuses on the power handling, is required.

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As superconducting kinetic inductance detectors (KIDs) continue to grow in popularity for sensitive submillimeter detection and other applications, there is a drive to advance toward lower-loss devices. We present measurements of diagnostic thin-film aluminum coplanar waveguide (CPW) resonators designed to inform ongoing KID development at NASA Goddard Space Flight Center. The resonance frequencies span $f_0$ = 3.5-4 GHz and include quarter-wave and half-wave resonators with varying coupling capacitor designs. We present measurements of the device film properties and an analysis of the dominant mechanisms of loss in the resonators measured in a dark environment, demonstrating quality factors of $Q_i^{-1} \approx 3.64-8.57\ \times 10^{-8}$. We observe an enhanced level of suppression in the loss contributions from two-level systems (TLS) at intermediate-to-high read powers, and a regime at these powers and low temperatures where contributions from intrinsic processes $Q_i^{-1}$,other dominate the total loss. We also observe deviations from the standard TLS loss model at low powers and temperatures below 60 mK, and use a modified model to describe this behavior.

arXiv:2412.08811•Dec 11, 2024•0 citations
The sensitivity of microwave kinetic inductance detectors (MKIDs) based on coplanar waveguides (CPWs) needs to be improved by at least an order of magnitude to satisfy the requirements for space-based terahertz astronomy. Our aim is to investigate if this can be achieved by reducing the width of the CPW to much below what has typically been made using optical lithography (>1 μm). CPW resonators with a central line width as narrow as 300 nm were made in NbTiN using electron beam lithography and reactive ion etching. In a systematic study of quarter-wave CPW resonators with varying widths it is shown that the behavior of responsivity, noise and power handling as a function of width continues down to 300 nm. This encourages the development of narrow KIDs using Al in order to improve their sensitivity.
Spectroscopic observations of a large number of galaxies in the far-infrared are critical in the study of galaxy evolution. These observations are difficult at the moment, because of the lack of good far-infrared (FIR) detector technology. Microwave Kinetic Inductance Detectors (MKIDs) are showing promising results to fill this void. A common MKID design is the antenna-coupled coplanar waveguide (CPW) resonator patterned in a superconducting film. These resonators are extremely sensitive to changes in the Cooper pair density. FIR photons are energetic enough to break Cooper pairs. This means a superconducting resonator can be used as a pixel for a FIR camera. The inherent multiplexing advantage of MKIDs means they can easily be fabricated in arrays of up to 5000 pixels. By putting such an array in the SAFARI instrument on the cooled SPICA telescope a blind spectroscopic survey that can detect Milky Way sized galaxies out to redshift z = 2 will be possible. However, to achieve background limited performance on a cooled telescope like SPICA the sensivity of MKIDs needs to be improved by at least an order of magnitude. This project aims to investigate if this can be achieved by reducing the width of the CPW to much below what has typically been made using optical lithography (> 1 ?m). CPW resonators with a central line width as narrow as 300 nm were made in NbTiN using electron beam lithography and reactive ion etching. Using this fabrication method NbTiN resonators with a central line width varying between 0.3 ?m and 3 ?m were made. These resonators were used to do a systematic study of the width dependence of the kinetic inductance fraction, quality factor, responsivity, read-out power, noise and NEP. It is shown that the width dependence of all these properties does not change down to 300 nm. Encouraged by these results two prototype submicron pixel arrays were made in aluminum. These showed sensitivities comparable to resonators with a few micron wide CPW. The main reason for this lack of sensitivity improvement is the lower maximum read-out power of submicron wide aluminum resonators. Based on these results power handling seems a key issue that will determine if submicron resonators are a viable route to improve the MKIDs sensitivity. These results of this project indicate that aluminum has a different width dependence of its power handling compared to NbTiN. Therefore, a systematic study of submicron resonators in aluminum, which focuses on the power handling, is required.
The sensitivity of a kinetic inductance detector is determined by the performance of the cavity circuit and therefore a high quality factor and low phase noise are required. We developed superconducting niobium coplanar waveguide resonators for kinetic inductance detectors at a resonance frequency of 6 GHz. The length of the resonators is adjusted to a quarter of a wavelength which corresponds to ≈ 5.3 mm in our geometry. Different layouts with coplanar waveguide transmission line topology for the resonator were designed and simulated. Some parameters of the device fabrication process were varied. The niobium thin films were deposited by magnetron sputtering on sapphire substrates kept at ambient temperature. The resonators were patterned by photolithography and reactive ion etching and measured at helium temperatures. Because of the quarter wave geometry with one shorted end the reflection parameter was measured. We have studied the influence of the coupling capacitances on quality factor. The optimization includes microwave simulations and implementation in different resonator structures. The measurements of optimized devices showed a very high quality factor above one million (10 6 ). The obtained results and perspective on further development of resonators will be discussed.
The objective of this thesis is to evaluate a generic process for fabrication and characterization of the Superconductive coplanar waveguide (CPW) resonators. Superconductive CPW resonators with various lengths and shapes are designed to investigate their electrical and magnetic properties as well as resonance properties and sensitivities. In the first part of thesis, two different models are introduced in order to estimate the nonlinear kinetic inductance of a superconducting CPW resonator. The first model is based on Bean criticalstate model and the second one is based on current dependence of London penetration depth, λL(I). The existence of a shift in resonant frequency, f0, of Superconductive CPW resonator caused by a non-linear kinetic inductance is also shown experimentally. Simulations were carried out to estimate the nonlinear kinetic inductance due to the selfinduced magnetic field penetration. The rest of the thesis is concerned with development of very smooth Aluminum (Al) thin films with RMS (Root Mean Square) roughness ∼ 1 nm and CAD (Computer Aid Design) of superconductive CPW resonators. Experimental investigation of a generic fabrication technique for superconductive CPW resonator is carried out. Many resonators are fabricated with different design parameters, such as centerline or gap width, film thickness and gap capacitors length. The fabrication process is described in detail. Electron Beam Lithography is used to fabricate Nb and Al CPW resonators which are coupled to outer conductors via gap capacitors. We have fabricated GHz frequency CPW resonators with quality factors, Q up to 5× 10.
The objective of this thesis is to evaluate a generic process for fabrication and characterization of the Superconductive coplanar waveguide (CPW) resonators. Superconductive CPW resonators with various lengths and shapes are designed to investigate their electrical and magnetic properties as well as resonance properties and sensitivities. In the first part of thesis, two different models are introduced in order to estimate the nonlinear kinetic inductance of a superconducting CPW resonator. The first model is based on Bean critical-state model and the second one is based on current dependence of London penetration depth. The existence of a shift in resonant frequency of Superconductive CPW resonator caused by a non-linear kinetic inductance is also shown experimentally. Simulations were carried out to estimate the nonlinear kinetic inductance due to the self- induced magnetic field penetration. The rest of the thesis is concerned with development of very smooth Aluminum (Al) thin films with RMS (Root Mean Square) roughness 1~nm and CAD (Computer Aid Design) of superconductive CPW resonators. Experimental investigation of a generic fabrication technique for superconductive CPW resonator is carried out. Many resonators are fabricated with different design parameters, such as centerline or gap width, film thickness and gap capacitors length. The fabrication process is described in detail. Electron Beam Lithography is used to fabricate Nb and Al CPW resonators which are coupled to outer conductors via gap capacitors. We have fabricated GHz frequency CPW resonators with quality factors, Q up 5X10^5.
In terahertz radio astronomy, superconducting coplanar waveguide resonators have been commonly applied in Kinetic Inductance Detectors (KIDs) to measure the absorption of photon energy in the millimeter and submillimeter bands. Here, we present an analysis on the performance of superconducting niobium coplanar waveguides (CPWs). To compute the loss in a superconducting CPW, we have incorporated the complex conductivity developed by Matis and Bardeen based on the superconducting BCS theory, into the CPW loss equation. We have made a comparison between the loss in a CPW at room temperature with that below the critical temperature Tc of the superconductor. It can be observed that at frequencies below the gap frequency fg, the low in the superconducting CPW is significantly lower than that in a normal CPW. Above fg, however, the material loses its superconductivity and the loss in both temperatures becomes comparable. In our analysi, we have also shown that the loss decreases as the gap bewteen the strip and groundplane becomes wider. Hence, with careful design, the loss in a CPW can actually be minimized.
As superconducting kinetic inductance detectors (KIDs) continue to grow in popularity for sensitive submillimeter detection and other applications, there is a drive to advance toward lower-loss devices. We present measurements of diagnostic thin-film aluminum coplanar waveguide (CPW) resonators designed to inform ongoing KID development at NASA Goddard Space Flight Center. The resonance frequencies span f0f_0f0​ = 3.5-4 GHz and include quarter-wave and half-wave resonators with varying coupling capacitor designs. We present measurements of the device film properties and an analysis of the dominant mechanisms of loss in the resonators measured in a dark environment, demonstrating quality factors of Qi−1≈3.64−8.57 ×10−8Q_i^{-1} \approx 3.64-8.57\ \times 10^{-8}Qi−1​≈3.64−8.57 ×10−8. We observe an enhanced level of suppression in the loss contributions from two-level systems (TLS) at intermediate-to-high read powers, and a regime at these powers and low temperatures where contributions from intrinsic processes Qi−1Q_i^{-1}Qi−1​,other dominate the total loss. We also observe deviations from the standard TLS loss model at low powers and temperatures below 60 mK, and use a modified model to describe this behavior.