Abstract Superconducting microstrip single photon detectors (SMSPDs) exhibit high signal-to-noise ratios and large active areas, demonstrating broad application potential in high-energy particle detection, wide-field imaging, LiDAR, and related fields. To further improve the detection efficiency and operating temperature of SMSPDs, it is essential to bias the device with a current as close as possible to the depairing current—that is, to achieve the constriction factor (the ratio of the switch current to the depairing current) approaching unity. Currently, the geometric current crowding effect in the meandering region of the microstrip is regarded as the primary factor limiting the current constriction factor. In this study, we systematically evaluated three strategies for mitigating this effect: thickening the superconducting film at meandering region, increasing the width of the meandering region and localized ion milling in the straight section of the microstrip. Through theoretical simulations and comparative measurements of the switching current in identically sized MoSi microstrips incorporating these three modified structures, we demonstrated that all approaches effectively suppress current crowding. Notably, the ion milling method increased the device’s constriction factor from 0.44 ± 0.02 to 0.69 ± 0.02. This technique not only reduced current crowding but also enhanced device sensitivity. By implementing this approach, we achieved near-saturated intrinsic detection efficiency at 1550 nm under 1.7 K, offering a practical strategy for optimizing the performance of large-area SMSPDs.
Abstract Superconducting microstrip single photon detectors (SMSPDs) exhibit high signal-to-noise ratios and large active areas, demonstrating broad application potential in high-energy particle detection, wide-field imaging, LiDAR, and related fields. To further improve the detection efficiency and operating temperature of SMSPDs, it is essential to bias the device with a current as close as possible to the depairing current—that is, to achieve the constriction factor (the ratio of the switch current to the depairing current) approaching unity. Currently, the geometric current crowding effect in the meandering region of the microstrip is regarded as the primary factor limiting the current constriction factor. In this study, we systematically evaluated three strategies for mitigating this effect: thickening the superconducting film at meandering region, increasing the width of the meandering region and localized ion milling in the straight section of the microstrip. Through theoretical simulations and comparative measurements of the switching current in identically sized MoSi microstrips incorporating these three modified structures, we demonstrated that all approaches effectively suppress current crowding. Notably, the ion milling method increased the device’s constriction factor from 0.44 ± 0.02 to 0.69 ± 0.02. This technique not only reduced current crowding but also enhanced device sensitivity. By implementing this approach, we achieved near-saturated intrinsic detection efficiency at 1550 nm under 1.7 K, offering a practical strategy for optimizing the performance of large-area SMSPDs.
Abstract To facilitate high optical coupling efficiency and absorptance, the active area of a superconducting nano/microstrip single-photon detector (SNSPD/SMSPD) is often designed as a meander configuration with a high filling factor (e.g. ⩾0.5). However, the switching current (I sw) of SNSPD/SMSPD, at which the detector switches into the normal state, is significantly suppressed by a geometry-induced ‘current crowding effect’, where there are sharp bends in the strip. Here, we propose and experimentally verify an alternative method to reduce current crowding both in SNSPD and SMSPD by directly increasing the thickness of the bends through the deposition and lift-off of a secondary superconducting film. We measure and compare the performance of SNSPDs and SMSPDs with different filling factors and bend configurations, with or without thickened bends. Improvements for detectors were observed in detection efficiency, intrinsic dark count rate, and time jitter, owing to the enhanced I sw. Our method provides a promising way of optimizing SNSPD/SMSPD detection performance.
Superconducting single-photon detectors (SSPDs) are the leading detectors in terms of high-speed single-photon counting and high detection efficiency (DE). One factor that limits the DE is the critical current Ic, which is the maximum current before the superconductor switches to the normal state. Increasing device’s bias current towards the Ic can improve the DE. However, the device’s Ic is reduced due to constriction and current crowding at the edges of the wire. Typically, this is caused by fabrication defects. Locally suppressing superconductivity at these defects can potentially lessen the occurrence of current crowding. In this thesis, we used the beam from the helium ion microscope (HIM) and measured the Ic to observe the effects of locally irradiating specific areas on a SSPD wire. Due to the HIM’s small spot size and high collimation, we can control the superconducting gap precisely at the center and edges of the wire. Suppressing the edges can potentially reduce current crowding and increase the device’s critical current while suppressing the center can improve detection sensitivity for photons incident at that location. Our results showed that the irradiated devices had reduced Ic compared to unirradiated devices for both cases. We then extend this method of local suppression of superconductivity to explore an alternative method of fabricating SSPDs by directly writing the device on the superconducting thin film. This can enable the fabrication of devices without the use of lithography resist. In our experiment, we fabricated a 3 μm wire using optical lithography that was disconnected at the center and connected it by writing a single 1 μm wire with the He+ ion beam. We measured the Ic for samples with and without the 1 μm wire pattern and observed that the Ic decreased as we increased the ion dose. Overall, this work aims to contribute to the continuing investigation of the detection mechanism for SSPDs and the improvement of nanofabrication methods using the HIM.
Superconducting microstrips single-photon detectors (SMSPDs) are a novel type of single-photon sensor based on superconducting thin films patterned into micrometer-scale strip widths. Compared with superconducting nanowire single-photon detectors (SNSPDs), SMSPDs not only substantially lower the fabrication dependence on high-precision electron-beam lithography, but also exhibit lower kinetic inductance, higher bias current, and weaker polarization sensitivity. These advantages pave a new route toward superconducting single-photon detection systems with large active areas and low dark-count rates. Because of their performance, SMSPDs exhibit tremendous application potential in cutting-edge fields such as quantum communication, LiDAR, dark-matter searches, and high-energy particle detection. Accordingly, this paper provides a systematic review of recent advances in SMSPD research, covering the underlying physical mechanisms, material systems, geometrical design, readout circuitry, and application domains. Firstly, this review elaborates on the photon response mechanism of SMSPDs and clarifies its correlation with vortex dynamics. Secondly, this review categorizes the superconducting materials used for SMSPD fabrication and analyzes the influences of characteristic thin-film parameters on device performance. Furthermore, this work concludes the evolution and optimization strategies of geometrical design and readout circuit schemes for SMSPDs, and presents the current application status. Finally, we offer perspectives on its future development trajectory. This review provides a foundation in physical mechanisms and design guidance for the development of large active area SMSPDs with high efficiency and low dark counts.
Detecting single photons is essential for applications such as dark matter detection, quantum science and technology, and biomedical imaging. Superconducting nanowire single-photon detectors (SNSPDs) excel in this task due to their near-unity detection efficiency, subhertz dark count rates, and picosecond timing jitter. However, a local increase of current density (current crowding) in the bends of meander-shaped SNSPDs limits these performance metrics. By locally irradiating the SNSPD’s straight segments with helium ions while leaving the bends unirradiated, we realize current crowding–free SNSPDs with simultaneously enhanced sensitivity: After irradiation with 800 ions nm −2 , locally irradiated SNSPDs showed a relative saturation plateau width of 37%, while fully irradiated SNSPDs reached only 10%. This larger relative plateau width allows operation at lower relative bias currents, thereby reducing the dark count rate while still detecting single photons efficiently. We achieve an internal detection efficiency of 94% with 7 mHz dark count rate near the onset of saturating detection efficiency for a wavelength of 780 nm.
Abstract A superconducting microstrip single-photon detector (SMSPD) generally requires a shunt resistor to avoid latching, caused by its high current-carrying capacity and low kinetic inductance. Here, the effect of the shunt resistor on the behaviors of microbridge SMSPDs was investigated. We analyzed the change in equivalent switching current at different shunt resistances in two ways and determined the operating current range using intrinsic dark count rate (iDCR) curves. We observed that the reduction in shunt resistance can increase the operating current range, which helps to improve the internal detection efficiency (IDE) and reduce the iDCR. However, the reduction in the shunt resistance can reduce the pulse amplitude and increase the pulse decay time, which can degrade the timing jitter and count rate performance of the SMSPD. The trends of the experimental results can be qualitatively reproduced using a circuit model for an SMSPD with a shunt resistor, which provides useful information for the selection of shunt resistors. Furthermore, we report the improved detection performance of a helium-ion-irradiated SMSPD shunted with a small resistance of 5.2 Ω. We observed a weak IDE saturation with a bias current at a wavelength up to 2000 nm and a nonlinear relation between detection current and photon energy.
The effective and convenient detection of single photons via advanced detectors with a large active area is becoming significant for quantum and classical applications. This work demonstrates the fabrication of a superconducting microstrip single-photon detector (SMSPD) with a millimeter-scale active area via the use of ultraviolet (UV) photolithography. The performances of NbN SMSPDs with different active areas and strip widths are characterized. SMSPDs fabricated by UV photolithography and electron beam lithography with small active areas are also compared from the aspects of the switching current density and line edge roughness. Furthermore, an SMSPD with an active area of 1 mm × 1 mm is obtained via UV photolithography, and during operation at 0.85 K, it exhibits near-saturated internal detection efficiency at wavelengths up to 800 nm. At a wavelength of 1550 nm, the detector exhibits a system detection efficiency of ∼5% (7%) and a timing jitter of 102 (144) ps, when illuminated with a light spot of ∼18 (600) µm in diameter, respectively.