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Springer eBooks

Superconductor and Josephson Junction

Hiu Yung Wong

Published Jan 1, 2025• 0 citations
Publisher
DOI
10.1007/978-3-031-78219-0_16

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Several applications of Josephson junctions (JJs) in low-temperature superconducting circuits such as programmable voltage standards and SFQ logical circuits or SQUID sensors require JJs with sub-µm dimensions. A method for preparing superconductor-isolator-superconductor (SIS) JJs as well as superconductor-normal metal-superconductor (SNS) JJs was developed which allows the preparation of both types of junctions by nearly the same technological process. Titanium is used as the normal metal for the SNS JJ. Ti can be anodically oxidized and a technology similar to the well-tried Nb-Al technology for SIS JJs can be applied to the SNS system, too. By electron-beam exposure of a negative deep UV photoresist (ma-N 2400) a stable resist mask is generated which has to withstand the following three self-aligned process steps: etching of the Nb counterelectrode by RIE, isolation by anodization and lifting of a SiO planarization layer. By this process SNS (Nb-Ti-Nb) and SIS (Nb-Al/AlO x -Nb) Josephson junctions with smallest junction areas of 0.49 µm 2 were prepared and characterized by dc measurements and under the influence of microwave irradiation. The Nb-Ti-Nb junctions have I c R n products of 87 µV. They can be used for programmable Josephson voltage standard circuits at frequencies of 70 GHz.
The lack of dense, fast, energy efficient memory has been the main detractor for multiple superconducting digital projects in the past. Recently, fundamental physics research in superconductor-ferromagnet thin-film tunnel structures created a new opportunity to solve this long-standing problem. Superconductivity and ferromagnetism, two deeply antagonistic electronic properties, can co-exist in form of Magnetic Josephson Junctions (MJJs). The superconducting-ferromagnetic MJJs are electrically compatible with traditional superconductor-insulator-superconductor (SIS) Josephson junctions (JJs) used for digital energy-efficient single flux quantum (eSFQ/ERSFQ) circuits. Both MJJ and JJ circuits have similar fabrication process and can be integrated on a single chip. As a result, a combination of MJJs and JJs can be used to form addressable memory cells, energy-efficient memory periphery circuits and programmable logic elements. In this paper, we present the test results of superconductor-insulator-ferromagnet-superconductor (SIFS) MJJs showing their applicability for superconducting spintronic memory and digital circuits.
We investigate a Magnetic Josephson Junction (MJJ) - a superconducting device with ferromagnetic barrier for a scalable high-density cryogenic memory compatible with energy-efficient single flux quantum (SFQ) circuits. The superconductor-insulator-superconductor-ferromagnet-superconductor (SIS'FS) MJJs are analyzed both experimentally and theoretically. We found that the properties of SIS'FS junctions fall into two distinct classes based on the thickness of S'layer. We fabricate Nb-Al/AlOx-Nb-PdFe-Nb SIS'FS MJJs using a co-processing approach with a combination of HYPRES and ISSP fabrication processes. The resultant SIS'FS structure with thin superconducting S'-layer is substantially affected by the ferromagnetic layer as a whole. We fabricate these type of junctions to reach the device compatibility with conventional SIS junctions used for superconducting SFQ electronics to ensure a seamless integration of MJJ-based circuits and SIS JJ-based ultra-fast digital SFQ circuits. We report experimental results for MJJs, demonstrating their applicability for superconducting memory and digital circuits. These MJJs exhibitIcRnproduct only ~ 30% lower than that of conventional SIS junctions co-produced in the same fabrication. Analytical calculations for these SIS'FS structures are in a good agreement with the experiment. We discuss application of MJJ devices for memory and programmable logic circuits.