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IEEE Journal of Selected Topics in Quantum Electronics

Fabrication Development of High-Performance Fractal Superconducting Nanowire Single-Photon Detectors

Kai Zou, Xiaolong Hu

Published Dec 25, 2024• 3 citations
Publisher

Abstract

Fractal superconducting nanowire single-photon detectors (SNSPDs) have been demonstrated with high system detection efficiency for incident photons in all states of polarization. This paper aims at presenting the nano- and mico-fabrication development of the high-performance fractal SNSPDs, with particular emphasis on the important experimental nuances that are key to the success of these devices. We believe that the paper will benefit the community by facilitating the fabrication of the fractal SNSPDs, and therefore, more advanced devices, based on the fractal SNSPDs, but with additional functionality, can be made and developed in the future.

DOI
10.1109/jstqe.2024.3522176

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Fractal superconducting nanowire single-photon detectors (SNSPDs) have been demonstrated with high system detection efficiency for incident photons in all states of polarization. This paper aims at presenting the nano- and mico-fabrication development of the high-performance fractal SNSPDs, with particular emphasis on the important experimental nuances that are key to the success of these devices. We believe that the paper will benefit the community by facilitating the fabrication of the fractal SNSPDs, and therefore, more advanced devices, based on the fractal SNSPDs, but with additional functionality, can be made and developed in the future.
In this paper,the fabrication details and optimization of micro-fabrication process are presented for developing superconducting nanowire single-photon detectors (SNSPD). Besides,the device failure analysis is also introduced. With those methods,we successfully fabricated high-quality SNSPDs whose maximum system efficiencies were up to 30% for 660 nm wavelength and 4.2% for 1550 nm wavelength according to the single-photon detection experiment. At the dark count rate of 10 c/s,the detection efficiencies were 20% (660 nm) and 3% (1550 nm) with the SNSPD fabricated with above mentioned methods.
The important development of quantum technologies during the past decade brought the need for efficient, fast and precise single-photon detection. Superconducting Nanowire Single-Photon Detectors (SNSPDs) are currently considered as the detection method of choice when extreme performances are required. This thesis aimed at investigating this technology, with the objective of improving existing detectors for high-rate applications in quantum communication. This document presents the work and result achieved over four years dedicated to the subject. During this thesis, single-photon detection based on superconducting nanowire has been investigated, with a particular focus on specific requirements for high speed quantum communication applications. The work achieved ranges from the design and nano-fabrication of the structures, to the characterization and the understanding of the physics, detection models and fundamental limits of the devices.
Superconducting nanowire single-photon detectors (SNSPDs) have become a mainstream photon-counting technology that has been used in various applications. So far, most multi-channel SNSPD systems, either reported in literature or been commercially available, are polarization sensitive, that is, the system detection efficiency (SDE) of each channel is dependent on the state of polarization of the to-be-detected photons. Here, we report on an eight-channel system with fractal superconducting nanowire single-photon detectors working in the wavelength range of 930-940 nm that all feature low polarization sensitivity. In a close-cycled Gifford-McMahon cryocooler system with the base temperature of 2.2 K, we install and compare the performance of two types of devices: (1) SNSPD, composed of a single, continuous nanowire, and (2) superconducting nanowire avalanche photodetector (SNAP), composed of 16 cascaded units of two nanowires electrically connected in parallel. The highest system detection efficiency (SDE) among the eight channels reaches 96−5+4%, with polarization sensitivity of 1.02 and dark-count rate of 13 counts per second. The average SDE for eight channels for all states of polarization is estimated to be 90 ± 5%. We conclude that both the SNSPDs and the SNAPs can reach saturated, high SDE at the wavelength of interest, and the SNSPDs show lower dark- (false-) count rates while the SNAPs show better properties in the time domain. Using this system, we showcase the measurements of the second-order photon-correlation functions of light emission from a single-photon source based on a semiconductor quantum dot and from a pulsed laser. We believe that our work provides new choices of systems with single-photon detectors combining the merits of high SDE, low polarization sensitivity, and low noise that can be tailored for different applications.
Superconducting nanowire single photon detectors (SNSPD) made from amorphous superconductors have showed great promise for achieving high fabrication yields, due to the highly uniform nature of the films. We present progress on the development of SNSPD based on amorphous MoSi with a critical temperature of around 5 K, which is ideal for detector operation at temperatures of 1 – 2.5 K, accessible with widely available cryogenic systems. First generation devices have achieved a saturated internal efficiency from visible to near-infrared wavelengths, which is the first requirement for high overall system efficiency. The broadband response has allowed us to make a robust study the energy-current relation in these devices, which defines the current required for a saturated internal detection efficiency for a given incident photon energy. Contrary to previous studies with other material systems, we find a nonlinear energy-current relation, which is an important insight into the detection mechanism in SNSPDs. The latest generation devices have been embedded into an micro-cavity structure in order to increase the system detection efficiency, which has increased to over 65% at 1550 nm. The efficiency is believed to be limited by fabrication imperfections and we present ongoing progress towards improving this characteristic as well as the yield of the devices. Efforts are also being made towards increasing the maximum operating temperature of the devices.
We demonstrate superconducting nanowire single-photon detectors (SNSPDs) based on a fractal design of the nanowires to reduce the polarization sensitivity of detection efficiency. We patterned niobium titanium nitride thin films into Peano curves with a linewidth of 100 nm and integrated the nanowires with optical microcavities to enhance their optical absorption. At a base temperature of 2.6 K, the fractal SNSPD exhibited a polarization-maximum device efficiency of 67% and a polarization-minimum device efficiency of 61% at a wavelength of 1550 nm. Therefore, the polarization sensitivity, defined as their ratio, was 1.1, lower than the polarization sensitivity of the SNSPDs in the meander design. The reduced polarization sensitivity of the detector could be maintained for higher-order spatial modes in multimode optical fibers and could tolerate misalignment between the optical mode and the detector. This fractal design is applicable to both amorphous and polycrystalline materials that are commonly used for making SNSPDs.