Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Bulletin of the American Physical Society

Epitaxial Josephson junctions for superconducting qubits made by wafer-bonding

Anthony McFadden, Corey Rae McRae, Ruichen Zhao, David P. Pappas, C. J. Palmstrøm

Published Mar 4, 2020• 0 citations
OpenAlex

Related papers

Fabrication and measurement of superconducting qubits consisting of fully-epitaxial NbN-based Josephson junctions

Hirotaka Terai, Sunmi Kim, Tomoko Fuse +4 more

The Japan Society of Applied Physics•Jul 10, 2019•0 citations

Superconducting qubits consisting of epitaxially-grown NbN/AlN/NbN Josephson junctions

Yasunobu Nakamura, Hirotaka Terai, K. Inomata +3 more

We demonstrate superconducting qubits using epitaxially grown Josephson junctions. A fully epitaxial NbN/AlN/NbN trilayer on MgO (100) substrate is processed by photolithography and dry-etching into transmon qubits with a large Josephson energy. The tunnel barrier made of cubic-phase AlN, rather than the ordinary hexagonal phase, is the key to avoid piezoelectric coupling to the phonon bath. The energy-relaxation time and the spin-echo decay time of ∼500 ns are observed in the qubits that are coupled to a monolithically made coplanar waveguide resonator.

Bulletin of the American Physical Society•Mar 1, 2012•0 citations

Superconducting qubits consisting of epitaxially grown NbN/AlN/NbN Josephson junctions

Yasunobu Nakamura, Hirotaka Terai, K. Inomata +3 more

We demonstrate superconducting qubits using epitaxially grown Josephson junctions. A fully epitaxial NbN/AlN/NbN trilayer on MgO (100) substrate is processed by photolithography and dry-etching into transmon qubits with a large Josephson energy. The tunnel barrier made of cubic-phase AlN, rather than the ordinary hexagonal phase, is the key to avoid piezoelectric coupling to the phonon bath. The energy-relaxation time and the spin-echo decay time of ∼500 ns are observed in the qubits that are coupled to a monolithically made coplanar waveguide resonator.

Applied Physics Letters•Nov 21, 2011•87 citations

Superconducting qubits with semiconductor nanowire Josephson junctions

Karl D. Petersson, T. W. Larsen, Ferdinand Kuemmeth +4 more

Bulletin of the American Physical Society•Mar 4, 2015•0 citations

Via fabrication process for epitaxial superconducting qubits

Jeffrey S. Kline, Fabio Teixeira Ferreira da Silva, Michael R. Vissers +3 more

Bulletin of the American Physical Society•Mar 23, 2011•0 citations

Superconducting-Semiconducting Voltage-Tunable Qubits in the Third Dimension

Thomas Hazard, Andrew J. Kerman, Kyle Serniak +1 more

We propose superconducting-semiconducting (super-semi) qubit and coupler designs based on high-quality compact through-silicon vias (TSVs) to overcome challenges introduced by materials and processing required to fabricate high-quality super-semi Josephson junctions. In our designs, an interposer ``probe'' wafer containing TSVs is used to contact a sample wafer with, e.g., a superconductor-proximitized epitaxially grown germanium quantum well. By utilizing the capacitance of the probe-wafer TSVs, the majority of the electric field in the qubits is pulled away from lossy regions in the semiconducting wafer, such as the graded buffer layers sometimes required for epitaxial growth. Through simulations, we find that the probe wafer can reduce the electric field participation of the qubit in the sample wafer by an order of magnitude for thin substrates and remains small even when the epitaxial-layer thickness approaches $100\phantom{\rule{0.2em}{0ex}}\ensuremath{\mu}\mathrm{m}$. We also show how the qubit-coherence improvements achieved via this scheme are extensible to multiqubit systems that have tunable qubit-qubit couplings without magnetic fields. This approach additionally shrinks the on-chip footprint of voltage-tunable superconducting qubits while homogenizing critical wiring structures independent of semiconducting materials, which could aid in accelerating the understanding of super-semi heterostructures in a variety of systems.

arXiv:2203.06209•Physical Review Applied•Sep 25, 2023•6 citations
We demonstrate superconducting qubits using epitaxially grown Josephson junctions. A fully epitaxial NbN/AlN/NbN trilayer on MgO (100) substrate is processed by photolithography and dry-etching into transmon qubits with a large Josephson energy. The tunnel barrier made of cubic-phase AlN, rather than the ordinary hexagonal phase, is the key to avoid piezoelectric coupling to the phonon bath. The energy-relaxation time and the spin-echo decay time of ∼500 ns are observed in the qubits that are coupled to a monolithically made coplanar waveguide resonator.
We demonstrate superconducting qubits using epitaxially grown Josephson junctions. A fully epitaxial NbN/AlN/NbN trilayer on MgO (100) substrate is processed by photolithography and dry-etching into transmon qubits with a large Josephson energy. The tunnel barrier made of cubic-phase AlN, rather than the ordinary hexagonal phase, is the key to avoid piezoelectric coupling to the phonon bath. The energy-relaxation time and the spin-echo decay time of ∼500 ns are observed in the qubits that are coupled to a monolithically made coplanar waveguide resonator.
We propose superconducting-semiconducting (super-semi) qubit and coupler designs based on high-quality compact through-silicon vias (TSVs) to overcome challenges introduced by materials and processing required to fabricate high-quality super-semi Josephson junctions. In our designs, an interposer ``probe'' wafer containing TSVs is used to contact a sample wafer with, e.g., a superconductor-proximitized epitaxially grown germanium quantum well. By utilizing the capacitance of the probe-wafer TSVs, the majority of the electric field in the qubits is pulled away from lossy regions in the semiconducting wafer, such as the graded buffer layers sometimes required for epitaxial growth. Through simulations, we find that the probe wafer can reduce the electric field participation of the qubit in the sample wafer by an order of magnitude for thin substrates and remains small even when the epitaxial-layer thickness approaches $100\phantom{\rule{0.2em}{0ex}}\ensuremath{\mu}\mathrm{m}$. We also show how the qubit-coherence improvements achieved via this scheme are extensible to multiqubit systems that have tunable qubit-qubit couplings without magnetic fields. This approach additionally shrinks the on-chip footprint of voltage-tunable superconducting qubits while homogenizing critical wiring structures independent of semiconducting materials, which could aid in accelerating the understanding of super-semi heterostructures in a variety of systems.