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Applied Physics Letters

Superconducting qubits consisting of epitaxially grown NbN/AlN/NbN Josephson junctions

Yasunobu Nakamura, Hirotaka Terai, K. Inomata, Tsuyoshi Yamamoto, Wei Qiu, Z. Wang

Published Nov 21, 2011• 87 citations
Publisher

Abstract

We demonstrate superconducting qubits using epitaxially grown Josephson junctions. A fully epitaxial NbN/AlN/NbN trilayer on MgO (100) substrate is processed by photolithography and dry-etching into transmon qubits with a large Josephson energy. The tunnel barrier made of cubic-phase AlN, rather than the ordinary hexagonal phase, is the key to avoid piezoelectric coupling to the phonon bath. The energy-relaxation time and the spin-echo decay time of ∼500 ns are observed in the qubits that are coupled to a monolithically made coplanar waveguide resonator.

DOI
10.1063/1.3663539

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The superconducting Josephson phase qubit device was fabricated by a NbN/AlN-based technology with the goal to carry out the spectroscopy of parasitic quantum two-level systems (TLSs) in the AlN tunnel barrier by combining qubit spectroscopy with mechanical strain tuning. So far all existing results on TLS spectroscopy have been obtained on Al-based Josephson qubits and thus only TLSs in amorphous aluminum oxide barriers were studied. Understanding the physics of TLS and TLS-induced decoherence requires a study of individual TLSs in tunnel barriers made from different materials. The layout of the NbN/AlN device was optimized to improve the magnetic flux coupling between the flux bias coil and the qubit loop and to minimize the unwanted coupling to the dc-readout SQUID. The area of the SiO insulation under wiring layer was made as small as possible in order to decrease the number of TLSs which can contribute to the suppression of the coherence time. The NbN/AlN Josephson phase qubit was tested in a 3He/4He dilution refrigerator at a temperature of about 60 mK by measuring Rabi oscillations and the energy relaxation time TD. Rabi oscillations had a mean decay time of about of 3-5 ns. We performed systematic studies of TD by varying the power and duration of a resonant microwave pulse. We observe a large enhancement of the qubit's relaxation time for longer microwave pulses. We explain this effect by microwave induced suppression of spontaneous qubit emission.

IEEE International Superconductive Electronics Conference (ISEC)•Jun 1, 2017•2 citations
We demonstrate superconducting qubits using epitaxially grown Josephson junctions. A fully epitaxial NbN/AlN/NbN trilayer on MgO (100) substrate is processed by photolithography and dry-etching into transmon qubits with a large Josephson energy. The tunnel barrier made of cubic-phase AlN, rather than the ordinary hexagonal phase, is the key to avoid piezoelectric coupling to the phonon bath. The energy-relaxation time and the spin-echo decay time of ∼500 ns are observed in the qubits that are coupled to a monolithically made coplanar waveguide resonator.
We demonstrate superconducting qubits using epitaxially grown Josephson junctions. A fully epitaxial NbN/AlN/NbN trilayer on MgO (100) substrate is processed by photolithography and dry-etching into transmon qubits with a large Josephson energy. The tunnel barrier made of cubic-phase AlN, rather than the ordinary hexagonal phase, is the key to avoid piezoelectric coupling to the phonon bath. The energy-relaxation time and the spin-echo decay time of ∼500 ns are observed in the qubits that are coupled to a monolithically made coplanar waveguide resonator.
Abstract Improving the coherence of superconducting qubits is a fundamental step towards the realization of fault-tolerant quantum computation. However, coherence times of quantum circuits made from conventional aluminum-based Josephson junctions are limited by the presence of microscopic two-level systems in the amorphous aluminum oxide tunnel barriers. Here, we have developed superconducting qubits based on NbN/AlN/NbN epitaxial Josephson junctions on silicon substrates which promise to overcome the drawbacks of qubits based on Al/AlOx/Al junctions. The all-nitride qubits have great advantages such as chemical stability against oxidation, resulting in fewer two-level fluctuators, feasibility for epitaxial tunnel barriers that reduce energy relaxation and dephasing, and a larger superconducting gap of ~5.2 meV for NbN, compared to ~0.3 meV for aluminum, which suppresses the excitation of quasiparticles. By replacing conventional MgO by a silicon substrate with a TiN buffer layer for epitaxial growth of nitride junctions, we demonstrate a qubit energy relaxation time $${T}_{1}=16.3\;{{\upmu }}{{{{{\rm{s}}}}}}$$ T 1 = 16.3 μ s and a spin-echo dephasing time $${T}_{2}=21.5\;{{\upmu }}{{{{{\rm{s}}}}}}$$ T 2 = 21.5 μ s . These significant improvements in quantum coherence are explained by the reduced dielectric loss compared to the previously reported $${T}_{1}\approx {T}_{2}\approx 0.5\;{{\upmu }}{{{{{\rm{s}}}}}}$$ T 1 ≈ T 2 ≈ 0.5 μ s of NbN-based qubits on MgO substrates. These results are an important step towards constructing a new platform for superconducting quantum hardware.
Abstract Superconducting qubits are a promising quantum computing platform, but significant challenges remain, such as achieving sufficiently long and stable coherence times and precise control of circuit parameters. Further improvements in material processing are essential to overcome these challenges. This paper introduces our research on superconducting quantum circuit technology based on nitride superconductors, where the core technologies are epitaxial growth of titanium nitride (TiN) on silicon (Si) substrates and epitaxial Josephson junctions using niobium nitride (NbN), aluminum nitride (AlN), and magnesium oxide (MgO). We have established a fabrication process of NbN/AlN/NbN epitaxial junctions on Si (100) substrates using a TiN film as a buffer layer and are working on applying this process to superconducting qubits. We describe recent results on the effect of junction annealing and discuss the advantages and potential of epitaxial Josephson junctions for realizing large-scale superconducting quantum circuits.
Epitaxial NbN/AlN/NbN Josephson junctions are promising alternatives to conventional Al/AlOx_xx​/Al junctions for superconducting qubits due to their crystalline tunnel barriers and the high transition temperature of NbN. However, their integration into quantum circuits typically requires complex fabrication processes involving amorphous interlayer dielectrics, which can degrade qubit coherence times. To address these issues, we developed sidewall spacer passivated epitaxial NbN/AlN/NbN junctions using a fabrication process that reduces both the volume of amorphous dielectric material and fabrication complexity. The fabricated junctions exhibited a large gap voltage of approximately 5.6 mV and low subgap leakage currents. By varying the thickness of the AlN tunnel barrier, high-quality junctions were fabricated over a wide range of critical current densities Jc{\it J}_cJc​, from 0.3 to 104^44 A/cm2^22. In addition, the comparison of the current-voltage characteristics before and after buffered hydrofluoric acid treatment indicated that the wet etching process did not degrade the electrical characteristics of the junctions. These results establish a scalable fabrication process for epitaxial Josephson junctions and provide a promising platform for high-coherence nitride-based superconducting qubits.
The development of large-scale quantum processors benefits from superconducting qubits that can operate at elevated temperatures and be fabricated with scalable, foundry-compatible processes. Atomic layer deposition (ALD) is increasingly being adopted as an industrial standard for thin-film growth, particularly in applications requiring precise control over layer thickness and composition. Here, we report superconducting qubits based on NbN/AlN/NbN trilayers deposited entirely by ALD. By varying the number of ALD cycles used to form the AlN barrier, we achieve Josephson tunneling through barriers of different thicknesses, with critical current density spanning seven orders of magnitude, demonstrating the uniformity and versatility of the process. Owing to the high critical temperature of NbN, transmon qubits based on these all-nitride trilayers exhibit microsecond-scale relaxation times, even at temperatures above 300 mK. These results establish ALD as a viable low-temperature deposition technique for superconducting quantum circuits and position all-nitride ALD qubits as a promising platform for operation at elevated temperatures.
The superconducting Josephson phase qubit device was fabricated by a NbN/AlN-based technology with the goal to carry out the spectroscopy of parasitic quantum two-level systems (TLSs) in the AlN tunnel barrier by combining qubit spectroscopy with mechanical strain tuning. So far all existing results on TLS spectroscopy have been obtained on Al-based Josephson qubits and thus only TLSs in amorphous aluminum oxide barriers were studied. Understanding the physics of TLS and TLS-induced decoherence requires a study of individual TLSs in tunnel barriers made from different materials. The layout of the NbN/AlN device was optimized to improve the magnetic flux coupling between the flux bias coil and the qubit loop and to minimize the unwanted coupling to the dc-readout SQUID. The area of the SiO insulation under wiring layer was made as small as possible in order to decrease the number of TLSs which can contribute to the suppression of the coherence time. The NbN/AlN Josephson phase qubit was tested in a 3He/4He dilution refrigerator at a temperature of about 60 mK by measuring Rabi oscillations and the energy relaxation time TD. Rabi oscillations had a mean decay time of about of 3-5 ns. We performed systematic studies of TD by varying the power and duration of a resonant microwave pulse. We observe a large enhancement of the qubit's relaxation time for longer microwave pulses. We explain this effect by microwave induced suppression of spontaneous qubit emission.