Two new SQUID variants have been made and tested using nanobridges as Josephson contacts. The first is a dc SQUID whose hysteretic weak links are inductively shunted such that it operates as a relaxation oscillator with a frequency depending on the applied magnetic flux. When standard ICs are used for FM detection, the readout electronics are cheap and compact, of the size of a matchbox. The second variant is a microwave-biased rf SQUID incorporated into a λ/2 stripline resonator, which is capacitively coupled to a coaxial cable leading to the room-temperature electronics. Peak-to-peak modulation voltages of several hundred μV were obtained in the investigated frequency range of 3 to 4.2 GHz. For both SQUID variants, white flux noise values of some 10−5Φ0/Hz1/2 have been found.
Two new SQUID variants have been made and tested using nanobridges as Josephson contacts. The first is a dc SQUID whose hysteretic weak links are inductively shunted such that it operates as a relaxation oscillator with a frequency depending on the applied magnetic flux. When standard ICs are used for FM detection, the readout electronics are cheap and compact, of the size of a matchbox. The second variant is a microwave-biased rf SQUID incorporated into a λ/2 stripline resonator, which is capacitively coupled to a coaxial cable leading to the room-temperature electronics. Peak-to-peak modulation voltages of several hundred μV were obtained in the investigated frequency range of 3 to 4.2 GHz. For both SQUID variants, white flux noise values of some 10−5Φ0/Hz1/2 have been found.
Niobium nanobridge SQUIDs have shown exceptional noise performance with potential applications in quantum information processing, weak signal detection and single spin detection where the nanobridge geometry should enable efficient electromagnetic coupling to implanted spins. Combining such devices with dispersive microwave readout circuitry allows the spin sensitivity to be further improved by overcoming the standard thermal limit. Here we report on the fabrication and dispersive microwave readout of an array of niobium nanobridge rf SQUIDs incorporated into a superconducting resonator, including the optimization of the nanobridge fabrication process by electron beam lithography. We show the measured flux-tuneability of the resonance is in good agreement with theory, and we also discuss how the nonlinearity of the weak-link in the resonator structure allows for the mediation of parametric effects to enhance performance.
The dynamics and noise of a dc SQUID (the Superconducting Quantum Interference Device), with the McCumber parameter /spl beta//sub c/=2/spl pi/R/sup 2/l/sub c/C//spl Phi//sub 0/ close to the unity (where I/sub c/, R, C is the critical current, the shunt resistance and the capacitance of the Josephson junctions comprising the SQUID, respectively, /spl Phi//sub 0/=2.07 10/sup -15/ Wb is the magnetic flux quantum) integrated with a planar spiral input coil, have been experimentally studied. The length of the spiral input coil was chosen so as to match its /spl lambda//4 microwave resonance frequency to the plasma resonance frequency of the SQUID. The input coil resonance is found to enhance the overall quality factor Q of the Josephson oscillations in the SQUID and, as a result, to increase the dynamic resistance R/sub d/ and the gradient of the flux-to-voltage characteristics, /spl delta/V//spl delta//spl Phi/, without hysteresis. A dc SQUID with a loop inductance L=30.5 pH, /spl beta//sub c/=0.72, and a 6 turn input coil demonstrated a non-distorted quasi-sinusoidal flux-to-voltage transfer function with an exceptionally large modulation depth of 140 /spl mu/V peak-to-peak. The spectral density of the magnetic flux noise was as low as 3.5/spl times/10/sup -7/ /spl Phi//sub 0//Hz/sup 1/2/ in the double stage configuration, measured at a temperature 4.2 K using direct read out electronics. In combination with an intermediary transformer, the current resolution of the SQUID is as low as 1.25 pA/Hz/sup 1/2/ with an input coil inductance of 100 nH.
The authors have designed, fabricated and tested all-refractory DC SQUIDs in Nb-Al/sub 2/O/sub 3/-Nb trilayer technology that have noise performance comparable to the best previously reported for any technology. A variety of SQUID designs were incorporated as part of a trilayer process development test vehicle. SQUID inductance, junction area, and resistive shunt geometry were varied in matrix fashion to give SQUIDs with near-optimum parameter values for a factor of five range in Josephson current density and shunt sheet resistance. The devices were fabricated using a selective niobium anodization with a minimum feature size of 2 mu m. The base electrode and Nb wiring were patterned with dry etching, and the junction areas were defined by anodization: the Ti resistors were patterned with a lift-off process. Current density on different wafers was varied from 400 to 1000 A/cm/sup 2/ with typical junction V/sub m/'s of 60 mV. The shunt sheet resistance was varied in the 1-5- Omega / Square Operator range. The noise was measured with an RF SQUID direct small-signal readout scheme. A 50-pH SQUID with 3- mu m/sup 2/, 16- mu A junctions and 14- Omega shunt resistors was shown to have an ideally low white noise of 1*10/sup -13/ Phi /sub 0//sup 2//Hz, a white to 1/f crossover frequency at 7 Hz, and a noise level less than 6*10/sup -12/ Phi /sub 0//sup 2//Hz at 0.1 Hz.
We report on the low-frequency noise performance of niobium dc superconducting quantum interference devices (SQUIDs), which contain nanobridges fabricated by focused ion beam lithography as the active Josephson elements. The devices have feature sizes down to 70 nm. We have measured devices of different loop sizes in two readout configurations: nano-scale loop sizes in small signal mode using a series SQUID array as a low-temperature pre-amplifier, and larger micron-scale loop sizes in a conventional flux-locked loop. We investigate the different contributions to the low frequency noise and report on electrical measurements made in applied magnetic fields of up to 0.5 T (in-plane) and 0.1 T (perpendicular to the plane) at operating temperatures around 7 K. We compare the measurements with the existing theories of noise in a dc SQUID.
We have designed and characterized a micro-SQUID with dispersive readout for use in low temperature scanning probe microscopy systems. The design features a capacitively shunted RF SQUID with a tunable resonance frequency from 5 to 12 GHz, micrometer spatial resolution, and integrated superconducting coils for local application of magnetic fields. The SQUID is operated as a nonlinear oscillator with a flux- and power-dependent resonance frequency. Measurements for device characterization and noise benchmarking were carried out at 4 K. The measured flux noise above 10 kHz at 4 K is 80 nΦ0 Hz−1∕2 at a bandwidth of 200 MHz. Estimations suggest that one can benefit from parametric gain based on inherent nonlinearity of the Josephson junction and reduce the flux noise to 30 nΦ0Hz–1∕2 at 100 mK, which corresponds to 10.6 μBHz–1∕2 for a magnetic moment located at the center of the pickup loop.Measuring the magnetic response of mesoscopic samples or mapping it vs. position for extended systems is effective methods for revealing the fundamental quantum properties of condensed matter systems. Over the past few decades, many advanced magnetic imaging schemes have been developed, including magnetic force microscopy,1 scanning Hall probe microscopy,2 superconducting interference devices (SQUIDs),3,4 and NV center based magnetometry.5 The high sensitivity, low back action, and low power dissipation of SQUIDs make them attractive for many types of low temperature experiments. One classic example is the central role of scanning SQUID microscopy in tests of pairing symmetry of high-Tc cuprate superconductors.6 Other prominent applications are the thermodynamic characteristics of persistent currents in normal metal rings7 and proof of edge states in topological insulators in the quantum spin Hall regime.8A key performance for a SQUID is its flux sensitivity. Parametric amplification has been harnessed in nano-SQUIDs based on aluminum junctions9,10 in order to reduce the flux noise down to 30 nΦ0Hz–1∕2 with a bandwidth exceeding 60 MHz.10 Recent studies on parametric amplifiers and dispersive readout of superconducting qubits also harness the nonlinearity of the Josephson junction to boost sensitivity.11–13In scanning SQUID microscopy, signal sources often behave dipole-like, such as superconducting vortices in mesoscopic dots or currents in mesoscopic rings. Smaller SQUIDs provide better coupling to smaller samples which leads to higher spin sensitivity3,14 as the magnetic field of a dipole decreases with 1/r3. Various approaches have been pursued to reduce the size. The smallest nano-SQUID to date has been fabricated by evaporating Nb or Pb15 onto the apex of a sharp quartz tip reaching a loop diameter of below nm and a spin sensitivity of 0.38 μBHz−1/2 at tens of kHz bandwidth. Compared to such size-optimized devices, micro-SQUIDs fabricated using a standard Nb technique have the advantage of on-chip field coils and modulation coils,14 and can be operated at 4 K allowing for a wide range of applications. However, these come at the cost of larger pick-up loops of a few microns and a resulting poorer spin sensitivity of 200 μBHz−1/2 for a magnetic moment located at the center of the pickup loop.The limitation of large pickup loops was previously only overcome by devices with pickup loops defined by the focused-ion-beam,16 but has recently also been achieved by improvements in lithography and shown to offer better spatial resolution as well.17 Here, we present a scanning micro-SQUID which is based on the same fabrication technology incorporating another major advancement. Our design exploits the parametric amplification based on nonlinearities of the SQUID to boost sensitivity. The combination of a smaller pickup loop and parametric amplification of the signal leads to better spin sensitivity (10.6 μBHz−1/2) and higher bandwidth (200 MHz) compared to traditional DC micro-SQUIDs in which the flux sensitivity is mainly limited by internal dissipation.Our devices were fabricated at Hypres Inc. using planarized Nb/AlOx/Nb trilayer Josephson junction technology, including two planarized Nb layers with approximately 0.8 μm minimum feature size. The SQUID consists of a superconducting ring shunted by one Josephson junction with a designed critical current of 20 μA [Fig. 1(a)]. With this geometry, the SQUID is gradiometric, i.e., the effect of any homogeneous background magnetic field approximately cancels out. The smallest pickup loops implemented have an inner (outer) diameter of 1 μm (2 μm). The superconducting loop is shunted by an on-chip parallel-plate capacitor with amorphous silicon dioxide as dielectric which was designed to have a capacitance of 80 pF. The superconducting loop and the capacitor form a resonator with a flux dependent resonance frequency from 5 to 12 GHz. The pickup loops are placed on opposite corners of the parallel-plate capacitor at a distance of about 450 μm so that one loop can be located in close proximity to the sample while the other is kept far away from it. External fields can be applied to the sample by local single-turn field coils situated around each pickup loop. The field coils are fully integrated into the chip layout and can also be used to bias the SQUID at its most sensitive point. Compared to using additional modulation coils,14 this approach has the advantage of reducing the total device inductance, which leads to a higher sensitivity.18 In a scanning microscope, the field coil at the rear end (away from the sample) can be used to bias the SQUID or operate it in flux feedback such that resulting stray fields will not act on the sample, apart from a weak screening current through the pickup loop. The effective diameter of each coil is 7.5 μm, resulting in a mutual inductance of about 0.34 Φ0/mA (for the smallest pickup loop). The SQUID resonator is connected by an on-chip Z0 = 50 Ω coplanar waveguide (CPW) transmission line to the bonding pads. The two field coils are connected by two smaller CPWs to the bottom edge bonding pads [Fig. 1(c)], ending in two parallel-stripline waveguides running alongside the edges of the capacitor towards the respective field coils. Based on estimations, it should thus be possible to apply high frequency signals of at least several GHz to SQUID and sample.
For the fabrication of nanoscale SQUIDs, for example having loop diameters of order 1 µm or smaller, the conventional trilayer window-type Josephson junctions are too large. Instead, we consider the use of nanobridge junctions with dimensions of order 100 nm. The problem of hysteresis in the junctions' current–voltage characteristic (IVC) is avoided by depositing a gold overlayer, which serves as both a thermal and electrical shunt. Noise measurement of dc SQUIDs which incorporate such Nb nanobridges as the Josephson junctions are reported. Devices having different IVCs were fabricated and characterized. The best device has a flux noise of 5 × 10 −6 Φ 0 Hz −1/2 at 4.2 K, and there is no significant increase in the noise level in a static magnetic field up to 2 mT. Techniques for increasing the voltage modulation depth, and hence improving the flux noise performance, are discussed.