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Applied Physics Letters

Microwave rf SQUID integrated into a planar YBa2Cu3O7 resonator

Y. Zhang, Michael Mück, M. Bode, Klaus Dieter Herrmann, Jürgen Schubert, W. Zander, Alex I. Braginski, Christoph Heiden

Published May 4, 1992• 46 citations
Publisher

Abstract

We fabricated and characterized microwave rf SQUIDs integrated into a planar, S-shaped λ/2 microstrip resonator. This 3 GHz resonator was fabricated from a pulsed-laser-deposited YBa2Cu3O7 epitaxial film. The SQUID structures incorporated double step-edge junctions and had a loop inductance of 120 pH. Such unoptimized SQUIDs operated between 4.2 and 85 K with dV/dΦ=18–20 μV/Φ0 at 77 K. At that temperature, the energy resolution of (8±2)×10−29 J/Hz above 0.1 Hz (in the best samples) was limited by the white noise, SΦ1/2=(7±1)×10−5 Φ0/Hz1/2. Optimization may increase dV/dΦ and improve the energy resolution by up to an order of magnitude.

DOI
10.1063/1.107011

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IEEE Transactions on Applied Superconductivity•Jun 1, 1999•17 citations
We fabricated and characterized microwave rf SQUIDs integrated into a planar, S-shaped λ/2 microstrip resonator. This 3 GHz resonator was fabricated from a pulsed-laser-deposited YBa2Cu3O7 epitaxial film. The SQUID structures incorporated double step-edge junctions and had a loop inductance of 120 pH. Such unoptimized SQUIDs operated between 4.2 and 85 K with dV/dΦ=18–20 μV/Φ0 at 77 K. At that temperature, the energy resolution of (8±2)×10−29 J/Hz above 0.1 Hz (in the best samples) was limited by the white noise, SΦ1/2=(7±1)×10−5 Φ0/Hz1/2. Optimization may increase dV/dΦ and improve the energy resolution by up to an order of magnitude.
A superconducting quantum interferometer device (SQUID) electronics with tank frequencies near 150 MHz was constructed to enhance the rf SQUID sensitivity. By these means we characterized our YBa2Cu3O7 thin-film rf SQUIDs with step-edge junctions immersed in liquid N2. We obtained transfer function values of over 40 μV/Φ0, at a 50 Ω input impedance, for both hysteretic and dispersive mode of rf SQUID operation. The rms white and 1/f flux noise levels were significantly lower than at the tank frequency of 20 MHz. The best magnetic field sensitivity at 77 K was 0.9 pT/Hz1/2, and the energy resolution 1.4×10−28 J/Hz, down to 0.3 Hz.
We have developed a technique which permits high-yield fabrication of microbridges and low noise YBa2Cu3O7 superconducting quantum interference devices (SQUIDs) in epitaxial thin films. These SQUIDs operate over a wide temperature range extending from 4 K to close to the superconducting transition temperature. Measurements of an rf SQUID operating at 77 K give a peak-to-peak flux sensitivity of 36 μV/Φ0 and a flux noise at 10 Hz of 1.5× 10−4 Φ0/√Hz. Device yields over 80% have been obtained.
The operation of YBa2Cu3O7 rf superconducting quantum interference devices (SQUIDs) using a dielectric SrTiO3 resonator as tank circuit was tested. At 77 K, we attained for such resonators unloaded quality factors Q0 up to 7000 at resonant frequencies near 1 GHz, when measuring without electromagnetic shielding. For a washer SQUID with an area of 4×4 mm2 and an inductance of ≂100 pH, which was properly coupled to the resonator, we measured an approximately 60 μV peak-to-peak SQUID signal and a white flux noise spectral density of SΦ1/2=1×10−5Φ0/√Hz, corresponding to a field sensitivity of BN=105 fT/√Hz. With an additional single-layer flux transformer with a diameter of the pickup loop of 22 mm in flip-chip arrangement, the field sensitivity was improved to 30 fT/√Hz.
The design and performance of a planar microwave RF-SQUID (superconducting quantum interference device) read out by a cryogenic high-electron-mobility-transistor (HEMT) preamplifier are described. The SQUID sensor consists of a planar half-wavelength microstrip resonator, into which the SQUID loop is integrated. The SQUID is operated at a pump frequency of 1.7 GHz. The cryogenic preamplifier uses a microwave HEMT, located close to the SQUID sensor. Measurements of the flux noise and the fractional step rise parameter were carried out in the temperature range between 4.2 K and 1.5 K. In an open loop, a flux noise of 2*10/sup -6/ Phi /sub 0// square root Hz was measured at 4.2 K, resulting in an energy resolution of about 100 h. The design of a 3-GHz magnetometer is also described, and the preliminary results of the measurements are reported.>
Autonomous single-layer dc superconducting quantum interference devices (SQUIDs) have been prepared from epitaxial, laser-deposited YBa2Cu3Ox films on step edge SrTiO3 and LaAlO3 substrates. For device patterning, a SiOx inhibit technique as well as conventional ethylenediaminetetraacetic wet etch was used. The Josephson junctions are of grain boundary type. Their widths are 5 μm. The SQUID hole is a square of about 5 μm; the SQUID inductance is estimated to be about 20 pH. We obtained a very regular, nonhysteretic flux to voltage modulation over more than 100 flux quanta (Φ0). The maximum voltage signal is of the order of 15 μV peak to peak and the maximum transfer function dV/dΦ at the appropriate flux bias is 50 μV/Φ0 at 77 K. The best value of the equivalent flux noise as measured in the flux locked loop mode is 1.4×10−5 Φ0/Hz1/2 at 1 Hz and 1×10−5 Φ0/Hz1/2 in the white noise region for f≳5 Hz. This results in an energy resolution εn,w(f≳5 Hz)=1×10−29 J/Hz in the white noise region and 2×10−29 J/Hz at 1 Hz.
This paper demonstrates a design of a planar multi-turn flux transformer integrated with a superconducting labyrinth resonator serving as the planar tank circuit for a radio frequency (rf) superconducting quantum interference device (SQUID) magnetometer. All structures were patterned from 200 nm-thick epitaxial YBa/sub 2/Cu/sub 3/O/sub 7/ (YBCO) films grown on 10/spl times/10 mm/sup 2/ LaAlO/sub 3/ substrates. A double-hole washer SQUID had one hole coupled to the input coil of the labyrinth resonator and the other hole coupled to the input coil of the multi-turn flux transformer using a flip-chip configuration to form a magnetometer. This resonator has a good high-frequency coupling to the double-hole rf SQUID, thus securing its optimum operation. For the voltage-to-flux (transfer function) coefficient, a value of 300-500 /spl mu/V//spl Phi//sub 0/ was obtained. A SQUID magnetometer with an inductance of 210 pH exhibited white flux noise of 11.5 /spl mu//spl Phi//sub 0///spl radic/Hz at 77 K. This corresponded to a white magnetic field noise of 11.5 fT//spl radic/Hz.