We use a floating tunable coupler to mediate interactions between qubits on separate chips to build a modular architecture. We demonstrate three different designs of multichip tunable couplers using vacuum-gap capacitors or superconducting indium-bump bonds to connect the coupler to a microwave line on a common substrate and then connect to the qubit on the next chip. We show that the zero-coupling condition between qubits on separate chips can be achieved in each design and that the relaxation rates for the coupler and qubits are not noticeably affected by the extra circuit elements. Finally, we demonstrate two-qubit gate operations with fidelity at the same level as qubits with a tunable coupler on a single chip. Using one or more indium bonds does not degrade qubit coherence or impact the performance of two-qubit gates.
Scaling superconducting quantum processors beyond the constraints of monolithic planar architectures is essential for fault-tolerant quantum computation. Here we demonstrate a three-dimensional (3D) integrated superconducting quantum processor in which two qubit chips are vertically stacked on opposing sides of a carrier chip and galvanically connected via multilayer flip-chip bonding. Intrachip qubit coupling is mediated by planar tunable couplers, whereas interchip coupling is enabled by vertical tunable couplers embedded in the carrier chip. Randomized benchmarking reveals simultaneous single-qubit gate fidelities of 99.87 % with negligible crosstalk, and controlled-Z gates achieve an average fidelity of 97.5 % for both intrachip and interchip operations. We further demonstrate high-fidelity Bell-state preparation and coherent generation of a four-qubit
W state, confirming the architecture's capability for interchip entanglement distribution. These results establish vertical coupling as a promising pathway toward scalable quantum processors compatible with advanced quantum error-correcting codes.
High-fidelity parametric gates have been demonstrated with superconducting qubits via rf flux modulation of the qubit frequency. The modulation however leads to renormalization of the bare qubit-qubit coupling, thereby reducing the gate speed. Here, we realize a parametric-resonance gate, which is activated by bringing the average frequency of the modulated qubit in resonance with a static-frequency qubit while approximately retaining the bare qubit-qubit coupling. The activation of parametric-resonance gates does not depend on the frequency of modulation, allowing us to choose the modulation frequencies and avoid frequency collisions. Moreover, we show that this approach is compatible with tunable coupler architectures, which reduce always-on residual couplings. Using these techniques, we demonstrate iswap and controlled-
Z gates between two qubits coupled via a tunable coupler with average process fidelities as high as $99.3\mathrm{%}$ and $97.9\mathrm{%}$, respectively. The flexibility in activating parametric-resonance gates combined with a tunable coupler architecture provides a pathway for building large-scale quantum computers.