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Bulletin of the American Physical Society

Superconducting qubit devices: fabrication suite

K. W. Chan, Tianyi Li, Wei Liu, Johannes Heinsoo, Vasilii Sevriuk, Caspar F. Ockeloen-Korppi, Jani Tuorila, Juha Hassel, Juha J. Vartiainen, Kuan Yen Tan, Jan Goetz, Mikko Möttönen

Published Mar 6, 2020• 0 citations
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Abstract We use a magnetron sputtering system to grow a tantalum film on a sapphire substrate with a niobium buffer layer at room temperature. The tantalum film is in α-phase, which is preferred for superconducting quantum devices. We fabricate a superconducting heavy fluxonium qubit with this niobium-buffered tantalum film, which demonstrates good performance. Forbidden transitions and sideband transition phenomena between specific energy levels are observed. Due to the specific design parameters, the fluxonium described herein exhibits high anharmonicity while maintaining a long decoherence time in the higher energy states, making it well-suited for use as a qudit and enabling high-dimensional quantum computation. With further optimization of the film deposition process, superconducting qubits other than fluxoniums with higher performance are expected to be obtained using these multilayer films grown at room temperature.
Over the past two decades significant advances have been made in the research of superconducting quantum computing and quantum simulation, in particular of the device design and fabrication that leads to ever-increasing superconducting qubit coherence times and scales. With Google’s announcement of the realization of “quantum supremacy”, superconducting quantum computing has attracted even more attention. Superconducting qubits are macroscopic objects with quantum properties such as quantized energy levels and quantum-state superposition and entanglement. Their quantum states can be precisely manipulated by tuning the magnetic flux, charge, and phase difference of the Josephson junctions with nonlinear inductance through electromagnetic pulse signals, thereby implementing the quantum information processing. They have advantages in many aspects and are expected to become the central part of universal quantum computing. Superconducting qubits and auxiliary devices prepared with niobium or other hard metals like tantalum as bottom layers of large-area components have unique properties and potentials for further development. In this paper the research work in this area is briefly reviewed, starting from the design and working principle of a variety of superconducting qubits, to the detailed procedures of substrate selection and pretreatment, film growth, pattern transfer, etching, and Josephson junction fabrication, and finally the practical superconducting qubit and their auxiliary device fabrications with niobium base layers are also presented. We aim to provide a clear overview for the fabrication process of these superconducting devices as well as an outlook for further device improvement and optimization in order to help establish a perspective for future progress.
Quantum computers perform calculations using quantum bits, or qubits, which can be made from superconducting circuits. These superconducting qubits allow direct control over device parameters while leveraging conventional Si-based fabrication techniques. MIT Lincoln Laboratory is designing and building high performance superconducting qubit devices with increased connectivity and addressability by utilizing advanced process techniques and 3D integration. Our three-tier stack architecture combines separately fabricated qubit, interposer, and routing chips with indium bump bonding. This stack contains high performance qubits, resonators, and couplers, superconducting air bridge crossovers, hard-stop spacing control, superconducting high aspect-ratio through-Si vias, and planarized superconducting routing layers. I will discuss our most recent accomplishments in the fabrication of three-tier stack devices and the effects of additional processing on the uniformity and integrity of their individual components.