We report on nanopatterned YBa2Cu3O7-δ (YBCO) direct current superconducting quantum interference devices (SQUIDs) based on grain boundary Josephson junctions. The nanoSQUIDs are fabricated by epitaxial growth of 120 nm-thick films of the high-transition temperature cuprate superconductor YBCO via pulsed laser deposition on MgO bicrystal substrates with 24° misorientation angle, followed by sputtering of dAu = 65 nm thick Au. Nanopatterning is performed by Ga focused ion beam (FIB) milling. The SQUID performance is comparable to devices on SrTiO3 (STO), as demonstrated by electric transport and noise measurements at 4.2 K. MgO has orders of magnitude smaller dielectric permittivity than STO; i.e., one may avoid Au as a resistively shunting layer to reduce the intrinsic thermal flux noise of the nanoSQUIDs. However, we find that the Au layer is important for avoiding degradation during FIB milling. Hence, we compare devices with different dAu produced by thinning the Au layer via Ar ion milling after FIB patterning. We find that the reduction of dAu yields an increase in junction resistance, however at the expense of a reduction of the critical current and increase in SQUID inductance. This results in an estimated thermal flux noise that is almost independent of dAu. However, for two devices on MgO with 65 nm-thick Au, we find an order of magnitude lower low-frequency excess noise as compared to nanoSQUIDs on STO or those on MgO with reduced dAu. For one of those devices we obtain with bias-reversal readout ultra-low flux noise of ∼175 nΦ0 Hz-1/2 down to ∼10 Hz.
We report on nanopatterned YBa2Cu3O7-δ (YBCO) direct current superconducting quantum interference devices (SQUIDs) based on grain boundary Josephson junctions. The nanoSQUIDs are fabricated by epitaxial growth of 120 nm-thick films of the high-transition temperature cuprate superconductor YBCO via pulsed laser deposition on MgO bicrystal substrates with 24° misorientation angle, followed by sputtering of dAu = 65 nm thick Au. Nanopatterning is performed by Ga focused ion beam (FIB) milling. The SQUID performance is comparable to devices on SrTiO3 (STO), as demonstrated by electric transport and noise measurements at 4.2 K. MgO has orders of magnitude smaller dielectric permittivity than STO; i.e., one may avoid Au as a resistively shunting layer to reduce the intrinsic thermal flux noise of the nanoSQUIDs. However, we find that the Au layer is important for avoiding degradation during FIB milling. Hence, we compare devices with different dAu produced by thinning the Au layer via Ar ion milling after FIB patterning. We find that the reduction of dAu yields an increase in junction resistance, however at the expense of a reduction of the critical current and increase in SQUID inductance. This results in an estimated thermal flux noise that is almost independent of dAu. However, for two devices on MgO with 65 nm-thick Au, we find an order of magnitude lower low-frequency excess noise as compared to nanoSQUIDs on STO or those on MgO with reduced dAu. For one of those devices we obtain with bias-reversal readout ultra-low flux noise of ∼175 nΦ0 Hz-1/2 down to ∼10 Hz.
We report on the fabrication and characterization of nanopatterned superconducting quantum interference devices (SQUIDs) based on grain boundary Josephson junctions in epitaxially grown multilayer YBa2Cu3O7 (YBCO)/SiTrO3 (STO) thin films. Nanopatterning is performed by Ga+ focused ion beam milling. The evolution of the electric transport and noise properties of the YBCO nanoSQUIDs over a time span of more than one year are recorded and analyzed. We find that the multilayer YBCO/STO nanoSQUIDs show stable and high performance over time. The critical current decreases within ∼40 days by 30%–50% and then remains almost constant without obvious decline trend for nanoSQUIDs with STO layer as the interface even more than 380 days, which demonstrates the superiority of STO as the capping layer. Moreover, we find that the multilayer nanoSQUIDs have about an order of magnitude smaller low-frequency excess flux noise (compared to similar single layer devices) with root-mean-square spectral density ∼5–6 µΦ0/Hz1/2 at 1 Hz. For one device, we show that the low-frequency excess noise does not degrade within three months.
NanoSQUIDs from YBa2Cu3O7/SrTiO3 superlattices with bicrystal grain boundary Josephson junctions
We report on the fabrication and characterization of nanopatterned dc SQUIDs with grain boundary Josephson junctions based on heteroepitaxially grown YBa2Cu3O7 (YBCO)/ SiTrO3 (STO) superlattices on STO bicrystal substrates. Nanopatterning is performed by Ga focused-ion-beam milling. The electric transport properties and thermal white flux noise of superlattice nanoSQUIDs are comparable to single layer YBCO devices on STO bicrystals. However, we find that the superlattice nanoSQUIDs have more than an order of magnitude smaller low-frequency excess flux noise, with root-mean-square spectral density SΦ1/2∼5−6μΦ0/Hz at 1 Hz (Φ0 is the magnetic flux quantum). We attribute this improvement to an improved microstructure at the grain boundaries forming the Josephson junctions in our YBCO nanoSQUDs.
YBa2Cu3O7 24∘ (30∘) bicrystal grain boundary junctions (GBJs), shunted with 60\,nm (20\,nm) thick Au, were fabricated by focused ion beam milling with widths 80nm≤w≤7.8μm. At 4.2\,K we find critical current densities jc in the 105A/cm2 range %\dkc{\#1} (without a clear dependence on w) and an increase in resistance times junction area ρ with an approximate scaling ρ∝w1/2. For the narrowest GBJs jcρ≈100μV, which is promising for the realization of sensitive nanoSQUIDs for the detection of small spin systems. We demonstrate that our fabrication process allows the realization of sensitive nanoscale dc SQUIDs; for a SQUID with w≈100\,nm wide GBJs we find an rms magnetic flux noise spectral density of SΦ1/2≈4μΦ0/Hz1/2 in the white noise limit. We also derive an expression for the spin sensitivity Sμ1/2, which depends on SΦ1/2, on the location and orientation of the magnetic moment of a magnetic particle to be detected by the SQUID, and on the SQUID geometry. For the not optimized SQUIDs presented here, we estimate Sμ1/2=390μB/Hz, which could be further improved by at least an order of magnitude.
DC superconducting quantum interference devices (dc-SQUIDs) were fabricated in Co-doped BaFe 2 As 2 epitaxial films on (La, Sr)(Al, Ta)O 3 bicrystal substrates with 30° misorientation angles. The 18 × 8 µm 2 SQUID loop with an estimated inductance of 13 pH contained two 3 µm wide grain boundary junctions. The voltage–flux characteristics clearly exhibited periodic modulations with Δ V = 1.4 µV at 14 K, while the intrinsic flux noise of dc-SQUIDs was 7.8 × 10 − 5 Φ 0 Hz − 1/2 above 20 Hz. The rather high flux noise is mainly attributed to the small voltage modulation depth which results from the superconductor–normal-metal–superconductor junction nature of the bicrystal grain boundary.
We have studied low frequency (1/f) noise of YBa2Cu3O7−δ dc superconducting quantum interference devices (SQUIDs) on SrTiO3 bicrystal substrates. 1/f flux noise, either measured at different temperatures for optimized bias current or measured at 77 K for different bias currents, is almost constant. These facts imply that 1/f noise mainly comes from fluctuations of the critical current of the Josephson junction that form the SQUID. Also, we explain the critical current fluctuations in the junction by an equilibrium temperature fluctuation model.
Abstract We propose the fabrication of micro-superconducting quantum interference devices via nano laser direct writing (NLDW). A 20 nm thick Nb film with a critical transition temperature of 9.2 K was deposited on a silicon substrate by sputtering, and nanopatterning was performed with NLDW. After optimizing parameters such as the laser pulse width and power, we investigated the electrical performance of SQUIDs by varying the laser power between 245 mW and 270 mW in 5 mW steps. Experimentally, the voltage–flux (V–Φ) characteristics of micro SQUIDs exhibited typical periodic modulation, confirming the Josephson effect and magnetic flux quantization effect based on the NLDW process. The noise spectral density measurements of SQUID fabricated with laser power of 265 mW achieved a white noise level of 3 μ Φ 0 /Hz 1 / 2 , demonstrating comparable flux noise sensitivity compared to electron beam and ion beam fabrication processes. Furthermore, the devices retained stable superconducting and electrical performance after 101 days, illustrating excellent long-term stability. To some extent, the NLDW shows the potential to perform micro-nanopatterning of superconducting devices efficiently and cost-effectively, as well as an avenue for conducting nanoscale thermal engineering on superconducting devices for basic science research.