YBa $_{2}$ Cu $_{3}$ O $_{7-\delta }$ Single Flux Quantum Flip Flop Directly Written With a Focused Helium Ion BeamYBa$_{2}$Cu$_{3}$O$_{7-\delta }$Single Flux Quantum Flip Flop Directly Written With a Focused Helium Ion Beam

Han Cai, Hao Li, Ethan Y. Cho +2 more

Superconducting logic circuits based on low transition temperature (Tc) are attractive due to their intrinsic low power consumption and high operating frequency. They have a wide variety of applications (particularly in future computing), but are difficult to use because they require cooling with liquid helium to operate. The current high Tclogic circuit based on YBa2Cu3O7-δ(YBCO) already has the ability to operate at a temperature above 4 K. However, this material is difficult to integrate into large-scale circuits by the traditional YBCO junction fabrication process. The limits of fabrication methods are the bottleneck stifling this material's potential for integration into logic circuits. As such, in this paper we aim to advance the state of the art in junction fabrication technology. Here we report the demonstration of a high Tcsuperconducting single flux quantum (SFQ) circuit made by a focused helium ion beam that is easily fabricated and can readily be incorporated into a large-scale integration with nano-scale junctions for future applications. An inductively coupled readout superconducting quantum interference device (SQUID) is employed to reduce the circuit complexity. The circuit parameters and performance are discussed.Superconducting logic circuits based on low transition temperature (Tc) are attractive due to their intrinsic low power consumption and high operating frequency. They have a wide variety of applications (particularly in future computing), but are difficult to use because they require cooling with liquid helium to operate. The current high Tclogic circuit based on YBa2Cu3O7-δ(YBCO) already has the ability to operate at a temperature above 4 K. However, this material is difficult to integrate into large-scale circuits by the traditional YBCO junction fabrication process. The limits of fabrication methods are the bottleneck stifling this material's potential for integration into logic circuits. As such, in this paper we aim to advance the state of the art in junction fabrication technology. Here we report the demonstration of a high Tcsuperconducting single flux quantum (SFQ) circuit made by a focused helium ion beam that is easily fabricated and can readily be incorporated into a large-scale integration with nano-scale junctions for future applications. An inductively coupled readout superconducting quantum interference device (SQUID) is employed to reduce the circuit complexity. The circuit parameters and performance are discussed.

IEEE Transactions on Applied SuperconductivityApr 1, 202115 citations

Fabrication Process for Monolithic Integration of a Nitride Superconductor-Based Superconducting Qubit with a Single Flux Quantum Control Circuit

Shigeyuki Miyajima, Taro Yamashita, Masamitsu Tanaka +3 more

We developed a process for fabricating nitride superconductor-based superconducting qubits monolithically integrated with a single flux quantum (SFQ)-based readout and control circuits. Since we used a Josephson junction (JJ) made of an NbN/AlN/NbN tri-layer, including a critical current density (Jc) of 50 A/cm2as the suitable material for superconducting qubits and SFQ readout/control circuits operating at 20 mK, the JJs for both the qubits and the SFQ circuits could simultaneously be fabricated. The device structure was also composed of three superconductive layers, comprising two superconductive layers as wiring layers and other layers as the top ground plane. Then, we used a Pd film as the resistive layer, which is required as the shunt resistors and the bias resistors for the SFQ control circuits, followed by an investigation of the properties of NbN/AlN/NbN epitaxial junctions and evaluation of the sheet inductance of the base NbN and wiring NbTiN layer. Our results showed the successful fabrication of a JJ with a sufficiently low leakage current and aJcof around 50 A/cm2, which was close to the target value. Furthermore, the evaluated sheet inductance exceeded 1 pH, which was several times larger than the values obtained for Nb-integrated circuits.We developed a process for fabricating nitride superconductor-based superconducting qubits monolithically integrated with a single flux quantum (SFQ)-based readout and control circuits. Since we used a Josephson junction (JJ) made of an NbN/AlN/NbN tri-layer, including a critical current density (Jc) of 50 A/cm2as the suitable material for superconducting qubits and SFQ readout/control circuits operating at 20 mK, the JJs for both the qubits and the SFQ circuits could simultaneously be fabricated. The device structure was also composed of three superconductive layers, comprising two superconductive layers as wiring layers and other layers as the top ground plane. Then, we used a Pd film as the resistive layer, which is required as the shunt resistors and the bias resistors for the SFQ control circuits, followed by an investigation of the properties of NbN/AlN/NbN epitaxial junctions and evaluation of the sheet inductance of the base NbN and wiring NbTiN layer. Our results showed the successful fabrication of a JJ with a sufficiently low leakage current and aJcof around 50 A/cm2, which was close to the target value. Furthermore, the evaluated sheet inductance exceeded 1 pH, which was several times larger than the values obtained for Nb-integrated circuits.

IEEE Transactions on Applied SuperconductivityFeb 1, 202311 citations

Fundamental Research Toward SFQ-Integrated Circuits

Akira Fujimaki, Yasutoshi Suzuki, Hiroaki HASEGAWA +2 more

Springer eBooksJan 1, 20000 citations

Development of advanced Nb process for SFQ circuits

Shuichi Nagasawa, K. Hinode, T. Satoh +3 more

Physica C SuperconductivityJun 11, 200468 citations

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Single Flux Quantum Flip Flop Directly Written With a Focused Helium Ion Beam