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IEEE Transactions on Applied Superconductivity

YBa$_{2}$Cu$_{3}$O$_{7-\delta }$Single Flux Quantum Flip Flop Directly Written With a Focused Helium Ion Beam

Han Cai, Hao Li, Ethan Y. Cho, Jay C. LeFebvre, Shane A. Cybart

Published Apr 1, 2021• 15 citations
Publisher

Abstract

Superconducting logic circuits based on low transition temperature (Tc) are attractive due to their intrinsic low power consumption and high operating frequency. They have a wide variety of applications (particularly in future computing), but are difficult to use because they require cooling with liquid helium to operate. The current high Tclogic circuit based on YBa2Cu3O7-δ(YBCO) already has the ability to operate at a temperature above 4 K. However, this material is difficult to integrate into large-scale circuits by the traditional YBCO junction fabrication process. The limits of fabrication methods are the bottleneck stifling this material's potential for integration into logic circuits. As such, in this paper we aim to advance the state of the art in junction fabrication technology. Here we report the demonstration of a high Tcsuperconducting single flux quantum (SFQ) circuit made by a focused helium ion beam that is easily fabricated and can readily be incorporated into a large-scale integration with nano-scale junctions for future applications. An inductively coupled readout superconducting quantum interference device (SQUID) is employed to reduce the circuit complexity. The circuit parameters and performance are discussed.

DOI
10.1109/tasc.2021.3069904

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YBa2_{2}2​Cu3_{3}3​O7−δ_{7-\delta }7−δ​Single Flux Quantum Flip Flop Directly Written With a Focused Helium Ion Beam
Superconducting logic circuits based on low transition temperature (Tc) are attractive due to their intrinsic low power consumption and high operating frequency. They have a wide variety of applications (particularly in future computing), but are difficult to use because they require cooling with liquid helium to operate. The current high Tclogic circuit based on YBa2Cu3O7-δ(YBCO) already has the ability to operate at a temperature above 4 K. However, this material is difficult to integrate into large-scale circuits by the traditional YBCO junction fabrication process. The limits of fabrication methods are the bottleneck stifling this material's potential for integration into logic circuits. As such, in this paper we aim to advance the state of the art in junction fabrication technology. Here we report the demonstration of a high Tcsuperconducting single flux quantum (SFQ) circuit made by a focused helium ion beam that is easily fabricated and can readily be incorporated into a large-scale integration with nano-scale junctions for future applications. An inductively coupled readout superconducting quantum interference device (SQUID) is employed to reduce the circuit complexity. The circuit parameters and performance are discussed.
In this work, we present nanoscale superconducting quantum interference devices (SQUIDs) with dimensions as small as 10 nm from the high-transition-temperature superconductor YBa2Cu3O7−δ (YBCO). The SQUID features and Josephson junctions are directly written into a 35-nm thick YBCO film with a focused helium ion beam. We integrate these nano-SQUIDs with directly written nano-isolated inductively coupled control lines to demonstrate a low power superconducting output driver capable of transimpedance conversion over a very wide temperature range of 4–50 K.
Abstract The reliable fabrication of high-sensitivity superconducting quantum interference devices (SQUIDs) with high critical transition temperature (high- T c ) is crucial for many practical applications such as weak magnetic sensing. In this work, we report the first realization of the YBa 2 Cu 3 O 7− δ (YBCO) radio frequency SQUIDs (rf SQUIDs) based on focused helium ion beam (FHIB) technique. A series of YBCO rf SQUIDs with high consistency were fabricated using a 30 keV FHIB with different helium ion (He + ) dose. The dose-dependent characteristics of the fabricated devices were systematically investigated at a temperature of 77 K. The experimental results verify that the variation in He + dose can effectively modulate the junction parameters and thereby the device noise performance. A non-monotonic white noise trend with increasing He + dose was observed, which could be primarily attributed to the transition of operational working regime of the fabricated rf SQUIDs. Based upon the dose optimization, a flux noise of 58 μ Φ 0 / H z 1 / 2 , corresponding to a field sensitivity of 185 f T / H z 1 / 2 , was achieved with our current device configuration. Approaches to further optimize the overall device performance are also discussed. Our work demonstrates FHIB-based high- T c SQUIDs with high junction parameter consistency a promising candidate for the implementation of multi-channel weak magnetic field detection systems and might hopefully serve as a platform for validating the theoretical models of high- T c SQUIDs.
We report the fabrication and measurement of quantum flux parametron logic from high-transition-temperature Josephson junctions operating at 25 K, above the temperature of liquid helium. The circuits are written directly into the plane of a single-layer thin film of YBa2Cu3O7 using a focused helium ion beam. A single-cell quantum flux parametron was constructed and correct logic operation was verified by using an on-chip superconducting quantum interference device for readout. A three-cell shift register was also fabricated and tested using a three-phase clock cycle. We estimate the average bit energy to be about 1×10−20 J at 1 GHz.
Josephson microwave circuits are essential for the currently flourishing research on superconducting technologies, such as quantum computation, quantum sensing, and microwave signal processing. To increase the possible parameter space for device operation with respect to the current standards, many materials for superconducting circuits are under active investigation. Here, we present the realization of a frequency-tunable, weakly nonlinear Josephson microwave circuit made of the high-temperature cuprate superconductor YBa2Cu3O7 (YBCO), a material with a high critical temperature and a very high critical magnetic field. An in situ frequency-tunability of ∼300 MHz is achieved by integrating a superconducting quantum interference device (SQUID) into the circuit based on Josephson junctions directly written with a helium ion microscope (HIM). Our results demonstrate that YBCO-HIM-SQUID microwave resonators are promising candidates for quantum sensing and microwave technology applications.
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By focused 30 keV30\,\mathrm{keV}30keV He ion beam irradiation, epitaxially grown YBa2_22​Cu3_33​O7_77​ (YBCO) thin films can be driven from the superconducting to the insulating state with increasing irradiation dose. A properly chosen dose suppresses superconductivity down to 4 K4\,\mathrm{K}4K, while crystallinity is still preserved. With this approach we create areas of normal-conducting YBCO that can be used to define resistively shunted constriction-type Josephson junctions (cJJs) on the nanometer scale. We also demonstrate that the fabricated cJJs can be incorporated in direct current superconducting quantum interference devices and can be used as detector junctions in THz antennas.
We report on nanopatterned YBa2Cu3O7-δ (YBCO) direct current superconducting quantum interference devices (SQUIDs) based on grain boundary Josephson junctions. The nanoSQUIDs are fabricated by epitaxial growth of 120 nm-thick films of the high-transition temperature cuprate superconductor YBCO via pulsed laser deposition on MgO bicrystal substrates with 24° misorientation angle, followed by sputtering of dAu = 65 nm thick Au. Nanopatterning is performed by Ga focused ion beam (FIB) milling. The SQUID performance is comparable to devices on SrTiO3 (STO), as demonstrated by electric transport and noise measurements at 4.2 K. MgO has orders of magnitude smaller dielectric permittivity than STO; i.e., one may avoid Au as a resistively shunting layer to reduce the intrinsic thermal flux noise of the nanoSQUIDs. However, we find that the Au layer is important for avoiding degradation during FIB milling. Hence, we compare devices with different dAu produced by thinning the Au layer via Ar ion milling after FIB patterning. We find that the reduction of dAu yields an increase in junction resistance, however at the expense of a reduction of the critical current and increase in SQUID inductance. This results in an estimated thermal flux noise that is almost independent of dAu. However, for two devices on MgO with 65 nm-thick Au, we find an order of magnitude lower low-frequency excess noise as compared to nanoSQUIDs on STO or those on MgO with reduced dAu. For one of those devices we obtain with bias-reversal readout ultra-low flux noise of ∼175 nΦ0 Hz-1/2 down to ∼10 Hz.