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Applied Physics Letters

High-transition-temperature nanoscale superconducting quantum interference devices directly written with a focused helium ion beam

Hao Li, Han Cai, Ethan Y. Cho, Stephen J. McCoy, Yan-Ting Wang, Jay C. LeFebvre, Yuchao W. Zhou, Shane A. Cybart

Published Feb 18, 2020• 28 citations
Publisher

Abstract

In this work, we present nanoscale superconducting quantum interference devices (SQUIDs) with dimensions as small as 10 nm from the high-transition-temperature superconductor YBa2Cu3O7−δ (YBCO). The SQUID features and Josephson junctions are directly written into a 35-nm thick YBCO film with a focused helium ion beam. We integrate these nano-SQUIDs with directly written nano-isolated inductively coupled control lines to demonstrate a low power superconducting output driver capable of transimpedance conversion over a very wide temperature range of 4–50 K.

DOI
10.1063/1.5143026

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In this work, we present nanoscale superconducting quantum interference devices (SQUIDs) with dimensions as small as 10 nm from the high-transition-temperature superconductor YBa2Cu3O7−δ (YBCO). The SQUID features and Josephson junctions are directly written into a 35-nm thick YBCO film with a focused helium ion beam. We integrate these nano-SQUIDs with directly written nano-isolated inductively coupled control lines to demonstrate a low power superconducting output driver capable of transimpedance conversion over a very wide temperature range of 4–50 K.
As the quantum generation of electronics takes the stage, a cast of important support electronics is needed to connect these novel devices to our classical worlds. In the case of superconducting electronics, this is a challenge because the Josephson junction devices they are based upon require tiny current pulses to create and manipulate the single flux quanta which guide their operation. Difficulty arises in transitioning these signals through large temperature gradients for connection to semiconductor components. In this work, we present nano superconducting quantum interference devices (SQUID) with critical dimensions as small as 10 nm from the high-transition-temperature superconductor YBa2_22​Cu3_33​O7−δ_{7-δ}7−δ​ (YBCO). We integrate these nano-SQUIDs with nano-isolated inductively coupled control lines to create a low power superconducting output driver capable of transimpedance conversion over a very wide temperature range.
YBa2_{2}2​Cu3_{3}3​O7−δ_{7-\delta }7−δ​Single Flux Quantum Flip Flop Directly Written With a Focused Helium Ion Beam
Superconducting logic circuits based on low transition temperature (Tc) are attractive due to their intrinsic low power consumption and high operating frequency. They have a wide variety of applications (particularly in future computing), but are difficult to use because they require cooling with liquid helium to operate. The current high Tclogic circuit based on YBa2Cu3O7-δ(YBCO) already has the ability to operate at a temperature above 4 K. However, this material is difficult to integrate into large-scale circuits by the traditional YBCO junction fabrication process. The limits of fabrication methods are the bottleneck stifling this material's potential for integration into logic circuits. As such, in this paper we aim to advance the state of the art in junction fabrication technology. Here we report the demonstration of a high Tcsuperconducting single flux quantum (SFQ) circuit made by a focused helium ion beam that is easily fabricated and can readily be incorporated into a large-scale integration with nano-scale junctions for future applications. An inductively coupled readout superconducting quantum interference device (SQUID) is employed to reduce the circuit complexity. The circuit parameters and performance are discussed.
In this work, we demonstrate the ability to fabricate superconducting quantum interference devices (SQUIDs) by directly writing Josephson junctions into the plane of YBa2Cu3O7−δ thin films with a focused helium ion beam. This technique allows for the control of the Josephson barrier transport properties through the single parameter, ion dose. SQUIDs written with a dose of 4 × 1016 ions/cm2 had metallic barrier junctions that exhibited nearly ideal electrical transport characteristics at 50 K and a flux noise of 20 μΦ0/Hz at 10 Hz. At higher irradiation doses, the SQUIDs had insulating barrier Josephson junctions with a quasi particle energy gap edge at 20 meV.
Abstract The reliable fabrication of high-sensitivity superconducting quantum interference devices (SQUIDs) with high critical transition temperature (high- T c ) is crucial for many practical applications such as weak magnetic sensing. In this work, we report the first realization of the YBa 2 Cu 3 O 7− δ (YBCO) radio frequency SQUIDs (rf SQUIDs) based on focused helium ion beam (FHIB) technique. A series of YBCO rf SQUIDs with high consistency were fabricated using a 30 keV FHIB with different helium ion (He + ) dose. The dose-dependent characteristics of the fabricated devices were systematically investigated at a temperature of 77 K. The experimental results verify that the variation in He + dose can effectively modulate the junction parameters and thereby the device noise performance. A non-monotonic white noise trend with increasing He + dose was observed, which could be primarily attributed to the transition of operational working regime of the fabricated rf SQUIDs. Based upon the dose optimization, a flux noise of 58 μ Φ 0 / H z 1 / 2 , corresponding to a field sensitivity of 185 f T / H z 1 / 2 , was achieved with our current device configuration. Approaches to further optimize the overall device performance are also discussed. Our work demonstrates FHIB-based high- T c SQUIDs with high junction parameter consistency a promising candidate for the implementation of multi-channel weak magnetic field detection systems and might hopefully serve as a platform for validating the theoretical models of high- T c SQUIDs.
YBa2_22​Cu3_33​O7_77​ nano-constriction Josephson junctions and SQUIDs fabricated by focused helium-ion-beam irradiation
By focused 30 keV30\,\mathrm{keV}30keV He ion beam irradiation, epitaxially grown YBa2_22​Cu3_33​O7_77​ (YBCO) thin films can be driven from the superconducting to the insulating state with increasing irradiation dose. A properly chosen dose suppresses superconductivity down to 4 K4\,\mathrm{K}4K, while crystallinity is still preserved. With this approach we create areas of normal-conducting YBCO that can be used to define resistively shunted constriction-type Josephson junctions (cJJs) on the nanometer scale. We also demonstrate that the fabricated cJJs can be incorporated in direct current superconducting quantum interference devices and can be used as detector junctions in THz antennas.
We report on nanopatterned YBa2Cu3O7-δ (YBCO) direct current superconducting quantum interference devices (SQUIDs) based on grain boundary Josephson junctions. The nanoSQUIDs are fabricated by epitaxial growth of 120 nm-thick films of the high-transition temperature cuprate superconductor YBCO via pulsed laser deposition on MgO bicrystal substrates with 24° misorientation angle, followed by sputtering of dAu = 65 nm thick Au. Nanopatterning is performed by Ga focused ion beam (FIB) milling. The SQUID performance is comparable to devices on SrTiO3 (STO), as demonstrated by electric transport and noise measurements at 4.2 K. MgO has orders of magnitude smaller dielectric permittivity than STO; i.e., one may avoid Au as a resistively shunting layer to reduce the intrinsic thermal flux noise of the nanoSQUIDs. However, we find that the Au layer is important for avoiding degradation during FIB milling. Hence, we compare devices with different dAu produced by thinning the Au layer via Ar ion milling after FIB patterning. We find that the reduction of dAu yields an increase in junction resistance, however at the expense of a reduction of the critical current and increase in SQUID inductance. This results in an estimated thermal flux noise that is almost independent of dAu. However, for two devices on MgO with 65 nm-thick Au, we find an order of magnitude lower low-frequency excess noise as compared to nanoSQUIDs on STO or those on MgO with reduced dAu. For one of those devices we obtain with bias-reversal readout ultra-low flux noise of ∼175 nΦ0 Hz-1/2 down to ∼10 Hz.