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Journal of Superconductivity and Novel Magnetism

Superconducting Coplanar Waveguide Resonators Capable of Cofabrication with Josephson Junctions

Yingshan Zhang, Jianshe Liu, Changhao Zhao, Rutian Huang, Wei Chen

Published Jan 14, 2019• 0 citations
Publisher
DOI
10.1007/s10948-018-4959-2

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Superconducting qubits are one of the most promising candidates for the physical implementation of quantum computing. In this paper, a brief review of superconducting qubits based on Josephson tunnel junctions and coplanar waveguide resonators is presented, focusing on Al/Al2O3/Al junctions, fabrication techniques, and important areas of opportunity for these devices. Simulation results of Al-based MIM capacitor structures and coplanar waveguide resonators are presented as an initial approach to the study of these devices and the impact of certain design parameters on their performance.
We propose a scheme to couple NV centers in diamond through coplanar waveguide resonators. The central conductor of the resonator is split into several pieces which are coupled strongly with each other via simple capacitive junctions or superconducting Josephson junctions. The NV centers are then put at the junctions. The discontinuity at the junctions induces a large local magnetic field, with which the NV centers are strongly coupled to the circuit resonator. The coupling strength ggg between the resonator and the NV center is of order of g/2π∼1g/2π\sim 1g/2π∼1--$30\unit{MHz}$.
We demonstrate superconducting qubits using epitaxially grown Josephson junctions. A fully epitaxial NbN/AlN/NbN trilayer on MgO (100) substrate is processed by photolithography and dry-etching into transmon qubits with a large Josephson energy. The tunnel barrier made of cubic-phase AlN, rather than the ordinary hexagonal phase, is the key to avoid piezoelectric coupling to the phonon bath. The energy-relaxation time and the spin-echo decay time of ∼500 ns are observed in the qubits that are coupled to a monolithically made coplanar waveguide resonator.