Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Journal of Physics Conference Series

Waveguide integrated superconducting single-photon detector for on-chip quantum and spectral photonic application

Vadim V. Kovalyuk, Simone Ferrari, Oliver Kahl, Alexander V. Semenov, Yu. V. Lobanov, Michael Shcherbatenko, Alexander A. Korneev, Wolfram H. P. Pernice, Gregory N Gol'tsman

Published Nov 1, 2017• 218 citations
Publisher

Abstract

With use of the travelling-wave geometry approach, integrated superconductor-nanophotonic devices based on silicon nitride nanophotonic waveguide with a superconducting NbN-nanowire suited on top of the waveguide were fabricated. NbN-nanowire was operated as a single-photon counting detector with up to 92 % on-chip detection efficiency in the coherent mode, serving as a highly sensitive IR heterodyne mixer with spectral resolution ( f/df ) greater than 10 6 in C-band at 1550 nm wavelength.

DOI
10.1088/1742-6596/917/6/062032

Related papers

Superconducting Nanowire Single Photon Detector for Coherent Detection of Weak Signals

Yury Lobanov, Michael Shcherbatenko, Alexander V. Semenov +9 more

Traditional photon detectors are operated in the direct detection mode, counting incident photons with a known quantum efficiency. Here, we have investigated a superconducting nanowire single photon detector (SNSPD) operated as a photon counting mixer at telecommunication wavelength around 1.5 μm. This regime of operation combines excellent sensitivity of a photon counting detector with excellent spectral resolution given by the heterodyne technique. Advantageously, we have found that low local oscillator (LO) power of the order of hundreds of femtowatts to a few picowatts is sufficient for clear observation of the incident test signal with the sensitivity approaching the quantum limit. With further optimization, the required LO power could be significantly reduced, which is promising for many practical applications, such as the development of receiver matrices or recording ultralow signals at a level of less-than-one-photon per second. In addition to a traditional NbN-based SNSPD operated with normal incidence coupling, we also use detectors with a travelling wave geometry, where a NbN nanowire is placed on the top of a Si3N4nanophotonic waveguide. This approach is fully scalable and a large number of devices could be integrated on a single chip.

IEEE Transactions on Applied Superconductivity•Dec 26, 2016•6 citations

On-chip coherent detection with quantum limited sensitivity

Vadim V. Kovalyuk, Simone Ferrari, Oliver Kahl +9 more

Abstract While single photon detectors provide superior intensity sensitivity, spectral resolution is usually lost after the detection event. Yet for applications in low signal infrared spectroscopy recovering information about the photon’s frequency contributions is essential. Here we use highly efficient waveguide integrated superconducting single-photon detectors for on-chip coherent detection. In a single nanophotonic device, we demonstrate both single-photon counting with up to 86% on-chip detection efficiency, as well as heterodyne coherent detection with spectral resolution f/∆f exceeding 1011. By mixing a local oscillator with the single photon signal field, we observe frequency modulation at the intermediate frequency with ultra-low local oscillator power in the femto-Watt range. By optimizing the nanowire geometry and the working parameters of the detection scheme, we reach quantum-limited sensitivity. Our approach enables to realize matrix integrated heterodyne nanophotonic devices in the C-band wavelength range, for classical and quantum optics applications where single-photon counting as well as high spectral resolution are required simultaneously.

Scientific Reports•Jun 30, 2017•19 citations

NbTiN superconducting nanowire detectors for visible and telecom wavelengths single photon counting on Si3N4 photonic circuits

Carsten Schuck, Wolfram H. P. Pernice, Hong X. Tang

We demonstrate niobium titanium nitride superconducting nanowires patterned on stoichiometric silicon nitride waveguides for detecting visible and infrared photons. The use of silicon nitride on insulator on silicon substrates allows us to simultaneously realize photonic circuits for visible and infrared light and integrate them with nanowire detectors directly on-chip. By implementing a traveling wave detector geometry in this material platform, we achieve efficient single photon detection for both wavelength regimes. Our detectors are an ideal match for integrated quantum optics as they provide crucial functionality on a wideband transparent waveguide material.

arXiv:1302.0786•Applied Physics Letters•Feb 4, 2013•89 citations

Amorphous superconducting nanowire single-photon detectors integrated with nanophotonic waveguides

M. Häußler, M. Yu. Mikhaı̆lov, Martin A. Wolff +1 more

Future applications in integrated quantum photonics will require large numbers of efficient, fast, and low-noise single-photon counters. Superconducting nanowire single-photon detectors made from amorphous material systems are best suited to meet these demands, but the integration with nanophotonic circuits has remained a challenge. Here, we show how amorphous molybdenum silicide (MoSi) nanowires are integrated with nanophotonic silicon nitride waveguides in traveling wave geometry. We found a saturated on-chip detection efficiency of (73 ± 10) % for telecom wavelength photons and the sub-10 Hz dark count rate at a temperature of 2.1 K, which allows for operation in robust, compact, and economic cryogenic systems. Applications requiring fast counting will benefit from the sub-5 ns recovery times of our devices that we combine with 135 ps timing accuracy. Achieving this performance with waveguide-integrated amorphous superconductors is an important step toward enabling high yield fabrication of competitive single-photon detectors on a large variety of nanophotonic material systems.

APL Photonics•Jul 1, 2020•24 citations

Cavity-Enhanced Superconducting Single Photon Detectors

Julian Münzberg, Andreas Vetter, Wladislaw Hartmann +5 more

Single photon technology is enabling for quantum communication and processing. Combining single photon sources, routing circuitry and highly efficient detectors in a high yield, low-loss and scalable fashion represent today a major challenge. Nanophotonic devices allow for the realization of on-chip small footprint architectures for generating, manipulating and detecting single photons. Waveguide-integrated superconducting nanowire single photon detectors are today state-of-the art devices capable of detecting single photons propagating in an integrated photonic circuit with high efficiency, speed and low timing uncertainty. Their excellent metrics in the near-infrared allows to directly interface on-chip devices with existing C-Band communication technology systems. To move towards high communication speed, efficient detectors able to sustain Gcps count rate are desirable. Here we present the design process and the experimental characterization of a new generation of fast detectors, consisting of µm-long NbN superconducting nanowires embedded in a SOI two-dimensional photonic crystal cavity. Almost 70% efficiency at telecommunication wavelengths has been achieved with negligible dark counts and sub-ns recovery time, which could enable Gcps count rates.

International Conference on Transparent Optical Networks•Jul 1, 2018•0 citations

High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits

Wolfram H. P. Pernice, Carsten Schuck, Olga V. Minaeva +4 more

Ultrafast, high-efficiency single-photon detectors are among the most sought-after elements in modern quantum optics and quantum communication. However, imperfect modal matching and finite photon absorption rates have usually limited their maximum attainable detection efficiency. Here we demonstrate superconducting nanowire detectors atop nanophotonic waveguides, which enable a drastic increase of the absorption length for incoming photons. This allows us to achieve high on-chip single-photon detection efficiency up to 91% at telecom wavelengths, repeatable across several fabricated chips. We also observe remarkably low dark count rates without significant compromise of the on-chip detection efficiency. The detectors are fully embedded in scalable silicon photonic circuits and provide ultrashort timing jitter of 18 ps. Exploiting this high temporal resolution, we demonstrate ballistic photon transport in silicon ring resonators. Our direct implementation of a high-performance single-photon detector on chip overcomes a major barrier in integrated quantum photonics. High-efficiency and high-speed single-photon detectors are vital for quantum optical technologies. Using superconducting nanowire detectors on nanophotonic waveguides, Pernice et al.demonstrate on-chip single-photon detection efficiencies up to 91% at telecommunications wavelengths.

arXiv:1108.5299•Nature Communications•Dec 21, 2012•477 citations
With use of the travelling-wave geometry approach, integrated superconductor-nanophotonic devices based on silicon nitride nanophotonic waveguide with a superconducting NbN-nanowire suited on top of the waveguide were fabricated. NbN-nanowire was operated as a single-photon counting detector with up to 92 % on-chip detection efficiency in the coherent mode, serving as a highly sensitive IR heterodyne mixer with spectral resolution ( f/df ) greater than 10 6 in C-band at 1550 nm wavelength.
Traditional photon detectors are operated in the direct detection mode, counting incident photons with a known quantum efficiency. Here, we have investigated a superconducting nanowire single photon detector (SNSPD) operated as a photon counting mixer at telecommunication wavelength around 1.5 μm. This regime of operation combines excellent sensitivity of a photon counting detector with excellent spectral resolution given by the heterodyne technique. Advantageously, we have found that low local oscillator (LO) power of the order of hundreds of femtowatts to a few picowatts is sufficient for clear observation of the incident test signal with the sensitivity approaching the quantum limit. With further optimization, the required LO power could be significantly reduced, which is promising for many practical applications, such as the development of receiver matrices or recording ultralow signals at a level of less-than-one-photon per second. In addition to a traditional NbN-based SNSPD operated with normal incidence coupling, we also use detectors with a travelling wave geometry, where a NbN nanowire is placed on the top of a Si3N4nanophotonic waveguide. This approach is fully scalable and a large number of devices could be integrated on a single chip.
Abstract While single photon detectors provide superior intensity sensitivity, spectral resolution is usually lost after the detection event. Yet for applications in low signal infrared spectroscopy recovering information about the photon’s frequency contributions is essential. Here we use highly efficient waveguide integrated superconducting single-photon detectors for on-chip coherent detection. In a single nanophotonic device, we demonstrate both single-photon counting with up to 86% on-chip detection efficiency, as well as heterodyne coherent detection with spectral resolution f/∆f exceeding 1011. By mixing a local oscillator with the single photon signal field, we observe frequency modulation at the intermediate frequency with ultra-low local oscillator power in the femto-Watt range. By optimizing the nanowire geometry and the working parameters of the detection scheme, we reach quantum-limited sensitivity. Our approach enables to realize matrix integrated heterodyne nanophotonic devices in the C-band wavelength range, for classical and quantum optics applications where single-photon counting as well as high spectral resolution are required simultaneously.
We demonstrate niobium titanium nitride superconducting nanowires patterned on stoichiometric silicon nitride waveguides for detecting visible and infrared photons. The use of silicon nitride on insulator on silicon substrates allows us to simultaneously realize photonic circuits for visible and infrared light and integrate them with nanowire detectors directly on-chip. By implementing a traveling wave detector geometry in this material platform, we achieve efficient single photon detection for both wavelength regimes. Our detectors are an ideal match for integrated quantum optics as they provide crucial functionality on a wideband transparent waveguide material.
Future applications in integrated quantum photonics will require large numbers of efficient, fast, and low-noise single-photon counters. Superconducting nanowire single-photon detectors made from amorphous material systems are best suited to meet these demands, but the integration with nanophotonic circuits has remained a challenge. Here, we show how amorphous molybdenum silicide (MoSi) nanowires are integrated with nanophotonic silicon nitride waveguides in traveling wave geometry. We found a saturated on-chip detection efficiency of (73 ± 10) % for telecom wavelength photons and the sub-10 Hz dark count rate at a temperature of 2.1 K, which allows for operation in robust, compact, and economic cryogenic systems. Applications requiring fast counting will benefit from the sub-5 ns recovery times of our devices that we combine with 135 ps timing accuracy. Achieving this performance with waveguide-integrated amorphous superconductors is an important step toward enabling high yield fabrication of competitive single-photon detectors on a large variety of nanophotonic material systems.
Single photon technology is enabling for quantum communication and processing. Combining single photon sources, routing circuitry and highly efficient detectors in a high yield, low-loss and scalable fashion represent today a major challenge. Nanophotonic devices allow for the realization of on-chip small footprint architectures for generating, manipulating and detecting single photons. Waveguide-integrated superconducting nanowire single photon detectors are today state-of-the art devices capable of detecting single photons propagating in an integrated photonic circuit with high efficiency, speed and low timing uncertainty. Their excellent metrics in the near-infrared allows to directly interface on-chip devices with existing C-Band communication technology systems. To move towards high communication speed, efficient detectors able to sustain Gcps count rate are desirable. Here we present the design process and the experimental characterization of a new generation of fast detectors, consisting of µm-long NbN superconducting nanowires embedded in a SOI two-dimensional photonic crystal cavity. Almost 70% efficiency at telecommunication wavelengths has been achieved with negligible dark counts and sub-ns recovery time, which could enable Gcps count rates.
Ultrafast, high-efficiency single-photon detectors are among the most sought-after elements in modern quantum optics and quantum communication. However, imperfect modal matching and finite photon absorption rates have usually limited their maximum attainable detection efficiency. Here we demonstrate superconducting nanowire detectors atop nanophotonic waveguides, which enable a drastic increase of the absorption length for incoming photons. This allows us to achieve high on-chip single-photon detection efficiency up to 91% at telecom wavelengths, repeatable across several fabricated chips. We also observe remarkably low dark count rates without significant compromise of the on-chip detection efficiency. The detectors are fully embedded in scalable silicon photonic circuits and provide ultrashort timing jitter of 18 ps. Exploiting this high temporal resolution, we demonstrate ballistic photon transport in silicon ring resonators. Our direct implementation of a high-performance single-photon detector on chip overcomes a major barrier in integrated quantum photonics. High-efficiency and high-speed single-photon detectors are vital for quantum optical technologies. Using superconducting nanowire detectors on nanophotonic waveguides, Pernice et al.demonstrate on-chip single-photon detection efficiencies up to 91% at telecommunications wavelengths.