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Fabrication process of NbN integrated circuit for superconducting qubit

Hirotaka Terai

The Japan Society of Applied PhysicsFeb 13, 20130 citations

Superconducting Electronics. Superconductor-Semiconductor Hybrid Device Technologies.

Akira Shoji

In this paper, the author describes studies on electronic devices and circuits utilizing both of superconductors and semniconductors. First, a design of an interface circuit composed of Josephson junctions and MOSFETs is described. The Josephson-MOS interface circuit will be used for realizing high-speed data communication between a Josephson digital circuit and a semiconductor one. Second, fabrication and characterization of MOSFETs with superconductive NbN gate electrodes are described. The use of superconductive gates makes it easy to hybridize MOSFETs with Josephson junctions. Finally, studies of Josephson-CMOS hybrid memory circuits are introduced.In this paper, the author describes studies on electronic devices and circuits utilizing both of superconductors and semniconductors. First, a design of an interface circuit composed of Josephson junctions and MOSFETs is described. The Josephson-MOS interface circuit will be used for realizing high-speed data communication between a Josephson digital circuit and a semiconductor one. Second, fabrication and characterization of MOSFETs with superconductive NbN gate electrodes are described. The use of superconductive gates makes it easy to hybridize MOSFETs with Josephson junctions. Finally, studies of Josephson-CMOS hybrid memory circuits are introduced.

TEION KOGAKU (Journal of Cryogenics and Superconductivity Society of Japan)Jan 1, 19960 citations

Fabrication and Characterization of Superconducting NbN Nanowire Single

Photon Detectors, Jeffrey A. Stern, William H. Farr

Jan 1, 20070 citations

Superconducting NbN-Al hybrid technology for quantum devices

E. Mutsenik, S. Linzen, Evgeni V. Il’ichev +7 more

The high kinetic inductance of niobium nitride (NbN) thin films can be used for an implementation of compact on-chip inductances in cryoelectronic circuits. Here, for the first time, we demonstrate the implementation of a hybrid superconducting technology that includes the fabrication of standard aluminum submicron Josephson junctions and the NbN atomic layer deposition process. As an example, we fabricated and characterized a single and array of Al Josephson junctions together with NbN interconnections. The main Al Josephson junction parameters as well as NbN superconducting properties are in a good agreement with the values obtained by our standard fabrication process. The combination of technological processes for the NbN layers with Al Josephson junction allows implementing a new generation of innovative superconducting devices for different applications.The high kinetic inductance of niobium nitride (NbN) thin films can be used for an implementation of compact on-chip inductances in cryoelectronic circuits. Here, for the first time, we demonstrate the implementation of a hybrid superconducting technology that includes the fabrication of standard aluminum submicron Josephson junctions and the NbN atomic layer deposition process. As an example, we fabricated and characterized a single and array of Al Josephson junctions together with NbN interconnections. The main Al Josephson junction parameters as well as NbN superconducting properties are in a good agreement with the values obtained by our standard fabrication process. The combination of technological processes for the NbN layers with Al Josephson junction allows implementing a new generation of innovative superconducting devices for different applications.

Low Temperature PhysicsJan 1, 20234 citations

Fabrication and characterization of sub-micron high current density NbN Josephson junctions for large-scale digital circuits

Yingyi Shao, Huiwu Wang, Wei Peng +2 more

Physica C SuperconductivityDec 26, 20235 citations

Submicron NbN Josephson tunnel junctions for digital applications

Masahiro Aoyagi, Alexandre Shoji, S. Kosaka +2 more

Submicron NbN/MgO/NbN Josephson tunnel junctions for Josephson integrated circuits were investigated. The junctions have been fabricated by the cross-line patterning (CLIP) method with an electron-beam (EB) direct-writing technique. The all-refractory fabrication process for logic circuits using the CLIP method is presented. This process is applied to the fabrication of a logic gate of 4JL containing 0.8- mu m-square junctions as an example of digital application. A logic gate has been fabricated by this process, and its characteristics are discussed.>Submicron NbN/MgO/NbN Josephson tunnel junctions for Josephson integrated circuits were investigated. The junctions have been fabricated by the cross-line patterning (CLIP) method with an electron-beam (EB) direct-writing technique. The all-refractory fabrication process for logic circuits using the CLIP method is presented. This process is applied to the fabrication of a logic gate of 4JL containing 0.8- mu m-square junctions as an example of digital application. A logic gate has been fabricated by this process, and its characteristics are discussed.>

IEEE Transactions on MagneticsMar 1, 19899 citations

Fabrication of Superconducting NbN Gate MOSFET for Hybrid Circuit Applications

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