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Applied Physics Letters

Tunable superconducting microstrip resonators

A. A. Adamyan, Sergey Kubatkin, Andrey V. Danilov

Published Apr 25, 2016• 33 citations
Publisher

Abstract

We report on a simple yet versatile design for a tunable superconducting microstrip resonator. Niobium nitride is employed as the superconducting material and aluminum oxide, produced by atomic layer deposition, as the dielectric layer. We show that the high quality of the dielectric material allows to reach the internal quality factors in the order of Qi∼104 in the single photon regime. Qi rapidly increases with the number of photons in the resonator N and exceeds 105 for N∼10−50. A straightforward modification of the basic microstrip design allows to pass a current bias through the strip and to control its kinetic inductance. We achieve a frequency tuning δf=62 MHz around f0=2.4 GHz for a fundamental mode and δf=164 MHz for a third harmonic. This translates into a tuning parameter Qiδf/f0=150. The presented design can be incorporated into essentially any superconducting circuitry operating at temperatures below 2.5 K.

DOI
10.1063/1.4947579

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We report on a simple yet versatile design for a tunable superconducting microstrip resonator. Niobium nitride is employed as the superconducting material and aluminum oxide, produced by atomic layer deposition, as the dielectric layer. We show that the high quality of the dielectric material allows to reach the internal quality factors in the order of Qi∼104 in the single photon regime. Qi rapidly increases with the number of photons in the resonator N and exceeds 105 for N∼10−50. A straightforward modification of the basic microstrip design allows to pass a current bias through the strip and to control its kinetic inductance. We achieve a frequency tuning δf=62 MHz around f0=2.4 GHz for a fundamental mode and δf=164 MHz for a third harmonic. This translates into a tuning parameter Qiδf/f0=150. The presented design can be incorporated into essentially any superconducting circuitry operating at temperatures below 2.5 K.
We have designed, fabricated, and tested a frequency-tunable high-Q superconducting resonator made from a niobium titanium nitride film. The frequency tunability is achieved by injecting a DC through a current-directing circuit into the nonlinear inductor whose kinetic inductance is current-dependent. We have demonstrated continuous tuning of the resonance frequency in a 180 MHz frequency range around 4.5 GHz while maintaining the high internal quality factor Qi > 180 000. This device may serve as a tunable filter and find applications in superconducting quantum computing and measurement. It also provides a useful tool to study the nonlinear response of a superconductor. In addition, it may be developed into techniques for measurement of the complex impedance of a superconductor at its transition temperature and for readout of transition-edge sensors.
We present a design and implementation of a frequency-tunable superconducting resonator. The resonance frequency tunability is achieved by flux-coupling a superconducting LC loop to a current-biased feedline; the resulting screening current leads to a change of the kinetic inductance and shift in the resonance frequency. The thin-film aluminum resonator consists of an interdigitated capacitor and thin line inductors forming a closed superconducting loop. The magnetic flux from the nearby niobium current feedline induces Meissner shielding currents in the resonator loop leading to a change in the kinetic part of the total inductance of the resonator. We demonstrate continuous frequency tuning within 160 MHz around the resonant frequency of 2.7 GHz. We show that: (1) frequency up-conversion is achieved when a kilohertz ac modulation signal is superimposed onto the dc bias resulting in sidebands to the resonator tone; (2) three-wave mixing is attained by parametrically pumping the nonlinear kinetic inductance using a strong rf pump signal in the feedline. The simple architecture is amenable to large-array multiplexing and on-chip integration with other circuit components. The concept could be applied in flux magnetometers, up-converters, and parametric amplifiers operating above 4 K when alternative high-critical-temperature material with high kinetic inductance is used.
Frequency-tunable microwave resonators are in great demand especially in hybrid systems where precise frequency alignment of resonances is required. Here, we present frequency-tunable high-Q superconducting resonators fabricated from thin niobium nitride and niobium titanium nitride films. The resonant frequency is tuned by applying a magnetic field perpendicular to the hole structures in the resonator's inductor wire, whose kinetic inductance is modified by wirelessly induced DC supercurrents. A continuous in situ frequency tuning of over 300 MHz is achieved for a 10 GHz resonator with a moderate magnetic field of 1.2 mT. The planar resonator design and the noncontact tuning scheme greatly ease the fabrication complexity and can be widely applied in many hybrid systems for coupling microwave modes with other forms of excitations such as optical photons, phonons, magnons, and spins.
Hybridizing a microwave mode with a quantum state requires precise frequency matching of a superconducting microwave resonator and the corresponding quantum object. However, fabrication always brings imperfections in geometry and material properties, causing deviations from the desired operating frequencies. An effective and universal strategy for their resonant coupling is to tune the frequency of a resonator, as quantum states like phonons are hardly tunable. Here, we demonstrate gate-tunable, titanium-nitride (TiN)-based superconducting resonators by implementing a nanowire inductor whose kinetic inductance is tuned via the gate-controlled supercurrent (GCS) effect. We investigate their responses for different gate biases and observe 4% (∼150 MHz) frequency tuning with decreasing internal quality factors. We also perform temperature-controlled experiments to support phonon-related mechanisms in the GCS effect and the resonance tuning. The GCS effect-based method proposed in this study provides an effective route for locally tunable resonators that can be employed in various hybrid quantum devices.
We present fast tunable superconducting microwave resonators fabricated from planar NbN\mathrm{Nb}\mathrm{N}NbN on a sapphire substrate. The $3\ensuremath{\lambda}/4$ wavelength resonators are tuning fork shaped and tuned by passing a dc current that controls the kinetic inductance of the tuning fork prongs. The $\ensuremath{\lambda}/4$ section from the open end operates as an integrated impedance converter that creates a nearly perfect short for microwave currents at the dc terminal coupling points, thus preventing microwave energy leakage through the dc lines. We measure an internal quality factor Qint>105{Q}_{\mathrm{int}}>{10}^{5}Qint​>105 over the entire tuning range. We demonstrate a tuning range of greater than $3\mathrm{%}$ and tuning response times as short as 20 ns for the maximum achievable detuning. Because of the quasifractal design, the resonators are resilient to magnetic fields of up to 0.5 T.
We report our development on design, fabrication and characterization of various superconducting resonators for quantum device applications. The resonators are developed mainly for superconducting qubit implementation in circuit QED structure, but future application will include photon detectors such as microwave kinetic inductance detectors. First we designed and fabricated half-wavelength coplanar waveguide resonators with niobium thin film on a high resistive silicon wafer, with the fundamental frequencies in the range of 1 to 8 GHz. The loaded quality factors are controlled by the coupling capacitors, and the lower bound of the intrinsic quality factor was measured down to 7 mK in the dilution refrigerator. We have also designed quarter-wavelength resonators and lumped LC resonators coupled to a transmission line, and characterized multiple resonators in a single transmission line. For the 3D transmon qubit application, we designed and fabricated a rectangular box resonator with superconducting aluminum. The intrinsic quality factor of the box resonator exceeds three million at 7 mK. We will also present basic results on the integration of a transmon qubit in the superconducting resonator.